Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.15 to 0.9MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 0 to 1.0MPa, Effective area (Cv): 19mm 2 (1.0), Fluid temperature: -5 to 60 C (no freezing), European threads G(PF), Port size (nominal size): 1/4 (8A), MECH VALVE W/ACTUATORS

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: -100kPa to 1.0MPa, Effective area (Cv): 7mm 2 (0.38), Ambient and fluid temperature: -5 to 60 C (no freezing), Port size (nominal size): 1/8 (6A), North American threads-NPT,

CATALOG

F E R E N T D I A.

2

, 60C (F and FS type only)] IDF IDU IDF FS Refer to SMC website for details.

A

(E X C E S S I V E F O R C E I N T H E D I R E C T I O N O F R O TAT I O N A P P L I E D T O T H E P I S T O N R O D M AY D A M A G E T H E I N T E R N A L M E C H A N I S M.) R E F E R T O T H E F O L L O W I N G TA B L E F O R D I M E N S I O N S W I T H A R M 32/40/50/63S E R I E S MK2 T I G H T E N I N G T O R Q U E F O R M O U N T I N G.

Electric Actuators

Refer to pages starting with 181 for mounting. 95 95 100 8(4)-6.2 B () () (170) A 110 20 95 95 () () (150) A B A B 100 200 300 400 500 600 Stroke Model LG1H212SC-700-F-X10 LG1H212SC-800-F-X10 LG1H212SC-900-F-X10 LG1H212SC-1000-F-X10 LG1H212SC-1200-F-X10 Stroke Model LG1H212SC100-F-X10 LG1H212SC200-F-X10 LG1H212SC300-F-X10 LG1H212SC400-F-X10 LG1H212SC500-F-X10 LG1H212SC600-F-X10 580 680

Table of Contents

Refer to pages starting with 181 for mounting. 95 100 8(4)-6.2 B 95 ( ) ( ) (170) A 95 110 20 95 ( ) ( ) (150) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H212SC-100-F LG1H212SC-200-F LG1H212SC-300-F LG1H212SC-400-F LG1H212SC-500-F LG1H212SC-600-F LG1H212SC-700-F LG1H212SC-800-F LG1H212SC-900-F LG1H212SC-1000-F LG1H212SC-1200-F 80 180 280 380 480 580 680 780 880

ZP

only Hexagon width across flats G Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats G Flat with ribs Flat with ribs Flat/Flat with Ribs Flat/Flat with Ribs 1 8 B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U

ZP

E F G H J K Vacuum inlet direction q Pad dia.

High Purity Fluoropolymer

M M H W Y L E 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size 18.5 35 1/8" 16.5 14 14 15 (L) 21.5 36.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M H L M E W Y 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size VC 18.5 35 1/8" 16.5 14 15 14 L VDW 21.5

Fluoropolymer Piping Equipment

21.5 LQ1R2E-F3/16" 2.9 LQ1R2F-F 1/8" 1.8 LQ1R3A-F 3/8" 1/4" 3.6 21.5 LQ1R24-F 4 2.6 LQ1R2F-F 3 1.8 LQ1R31-F 10 1/4" 5.8 21.5 LQ1R3B-F 1/4" 3.6 LQ1R3C-F 3/8" 3/8" 25.5 5.8 25 LQ1R3D-F 1/4" 3.6 LQ1R3F-F 3/8" 1/8" 34.5 19.7 5.8 18.5 LQ1R4A-F 1/2" 3/8" 24 7.4 5 20 9 18 17 36.5 21.5 LQ1R32-F 8 5.5 LQ1R33-F 6 3.6 LQ1R34-F 10 3/8" 25.5 24 23 5 9 18 36.5 7.4 20 17 23 25 LQ1R35-F 8 5.5 LQ1R36-F 6

Table of Contents

only Hexagon width across flats G Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats G Flat with ribs Flat with ribs Flat/Flat with Ribs Flat/Flat with Ribs 1 8 B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5 to 60C (no freezing), Effective area (Cv): 0.55, Port size