HEC-OM-S019

Alarm b contact (CLOSE During Alarm) 10 Temperature Alarm Common 10 10m 02 2m 04 4m 06 6m N AC100V L AC100V 6-8 PT-RTD 5 Unused 9 Unused RS-485 Communication connector Note: Always use shielded cable connected to this connector. 6-9 Unused 3-4 Unused 3-5 Unused 1-3 Unused 12-14 Unused 1 BUS + 2 BUS 5 SG 4 FG 15 FG Power supply connector (IEC60320,C14) E PE HEA100 1 2 Specifications Continued

CG1-OM0227

P.13281329 (NC=b )(D-F9G,F9H )Best Pneumatics No. P.1290 (D-G5NB )Best Pneumatics No. P.1320 16 / 17 3. 3-1. 1 2 3 4 5 6 7 8 9 10 3-2. 2040 50100 18 3-2-1. 02 50 3-2-2. 1 6 2 7 6. 7. 3 19 3-2-3.

FREE MOUNT CYLINDER

JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. *2) Labor Safety and Sanitation Law, etc. Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

VK300

Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38 0.47 0.38 0.76 0.41 0.41 0.76 0.41 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39

VHS20/30/40/50

A OUT IN A OUT IN 1 2 B 3 B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

How to Order ALD 20 B 9 00 S1 Float switch Style Nil None 1b (without oil ON) ALD ALDU D.P . Lube (Single unit) D.P .

Drain Separator for Vacuum Series AMJ 1

AMJ 30 0003 2R ZR ZM Body size Pressure gauge position 30 3/8 None Bracket Nil ZH 40 1/2 B Option 50 3/4 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03

Series DXT474

Non-locking push type [Standard type] Locking slotted type [B] Crimping area Core wire contact area Turn in the direction of arrow.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

Flow Rate Characteristics Weight (g) Flow rate characteristics 12 (PA) 23 (AR) Model Weight VFN212N-5D-02F 240 VFN212N-5D-02F-D 380 C b Cv C b Cv 2-position Single solenoid 2.68 0.40 0.72 5.41 0.31 1.38 Double solenoid 2.68 0.40 0.72 5.41 0.31 1.38 189 A VFN200N Series Dimensions DIN terminal VFN212N-l D (Y)ll-02l-l 138 19 23 Applicable heavy-duty cord O.D. 6 to 8 Pg 9 Indicator light (With

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

Flow Rate Characteristics Weight (g) Flow rate characteristics 12 (PA) 23 (AR) Model Weight VFN212N-5D-02F 240 VFN212N-5D-02F-D 380 C b Cv C b Cv 2-position Single solenoid 2.68 0.40 0.72 5.41 0.31 1.38 Double solenoid 2.68 0.40 0.72 5.41 0.31 1.38 189 A

Drain Separator for Vacuum Series AMJ

AMJ 30 0003 2R ZR ZM Body size Pressure gauge position 30 3/8 None Bracket Nil ZH 40 1/2 B Option 50 3/4 ZU Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03 3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

IDX-OM-P023E

The instructions described in this manual must be followed in addition to ISO 4414*1) and JIS B 8370*2) and other safety regulations. *1) ISO4414: Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B 8370: General rules for pneumatic equipment.

IDX-OM-P026E

The instructions described in this manual must be followed in addition to ISO 4414*1) and JIS B 8370*2) and other safety regulations. *1) ISO4414: Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B 8370: General rules for pneumatic equipment.

3/5 Port Solenoid Valve

Common SUP/Common EXH Common SUP/ Individual EXH Type 40 (VV5K3-40): Base mounted (A, B port bottom ported) Type 20 (VV5K3-20): Body ported (A, B port top ported) Type 42 (VV5K3-42): Base mounted (A, B port side ported) Type 41 (VV5K3-41): Base mounted (A, B port side ported) Type S41 Type S42 (VV5K3-S41) (VV5K3-S42) Type 21 (VV5K3-21): Body ported (A, B port top ported) 12 VK300-OMH0002-

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

A OUT IN A OUT IN 1 2 3 B B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

D. P. Lube (Unit) Series ALD(U)600/900

How to Order ALD 20 B 9 00 S1 Float switch Style Nil None 1b (without oil ON) ALD ALDU D.P . Lube (Single unit) D.P .

BP1000

(ASME B40.1 Grade B or better) psig/bar 4) (No code) Accuracy Cleanliness No oil ASME B40.1 level IV No oil Brass Polycarbonate Brass Phosphor bronze B Case Window Socket Bourdon tube Material MPa MPA 1.14 (29) 2.28 (58) 2.1 (53.5) 2.12 (54) NPT 1/4 0.42 (10.5) inch (mm) 3) Part number of pressure gauge itself.