Digital Pressure Switch

Output impedance approx. 1 k Display 3 1/2 digits, 7-segment display, colour display (red) Display accuracy 2%F.S. 1 digit (at ambient temperature 253 oC) Indicator LED LED is ON when output is ON.

VXF

1 1 2 17-3-76 7 The VX series will be revised shortly.

Compact Cylinder/Guide Rod Type Series CQM

4 0.5 14.9 6 14 0.1 9.9 3.5 20 3.5 6.5 7.5 7 4 0.5 20 6 17 0.1 12 4.5 25.5 5.4 9 9 10 7 1 26 8 22 0.1 15.6 5 28 5.4 9 11 10 7 1 30 8 Note) For the following bore/stroke sizes, the through-hole is threaded.

Square Tube Type Air Cylinder Series MB1

7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 135 139 156 156 190 190 22 30 35 35 40 40 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Construction/ Main Parts 1 3 4 5 7 2 Main Parts Description Solenoid coil Body Fixed iron core Movable iron core ass'y Return spring Poppet Phillips/ordinary round head screw Interface gasket Subplate No. 1 2 3 4 5 6 7 8 9 Note Material Resin SUS SUS Resin SUS NBR Carbon steel NBR ZDC 6 8 AXT632-7-3 (M1.714) AXT782-11 AXT662-11 (1: M5,2:M3) 2 9 P A R 14 Operation Guide Series VQ100 Operating

Cylinder with lock

Description Qty Note 1 BRAKE BODY 1 23 ROD COVER 1 2 BODY CAP 1 24 HEAD COVER 1 3 COLLAR 1 25 CYLINDER TUBE 1 4 HOLDER 1 26 PISTON ROD 1 5 BRAKE METAL 1 27 PISTON B 1 6 PISTON A 1 28 CUSHION RING 1 7 ROLLER HOLDER 1 29 CUSHION RING B 1 8 ROLLER PLATE 2 30 CUSHION VALVE 2 9 NEEDLE ROLLER 2 31 CUSHION SEAL HOLDER 1 10 PISTON SPRING 1 32 TIE ROD 4 11 ROLLER SPRING 1 33 TIE ROD NUT 8 12 BUSHING

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMV0017 Nut assembly 16 25 40 50 Valve size Description Part indication No. Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Cylinder with lock

Description Qty Note 1 BRAKE BODY 1 21 SEAL WASHER 1 2 BODY CAP 1 22 HEXAGON SOCKET CAP BOLT 4 3 COLLAR 1 23 ROD COVER 1 4 HOLDER 1 24 HEAD COVER 1 5 BRAKE METAL 1 25 CYLINDER TUBE 1 6 PISTON A 1 26 PISTON ROD 1 7 ROLLER HOLDER 1 27 PISTON B 1 8 ROLLER PLATE 2 28 CUSHION RING 1 9 NEEDLE ROLLER 2 29 CUSHION RING B 1 10 PISTON SPRING 1 30 CUSHION VALVE 2 11 ROLLER SPRING 1 31 RETAINING RING

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMV0019 Nut assembly 16 25 40 50 Valve size Description Part indication No. Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

21

2A 2B 2C 3 4 5 6 7 8 9 10 11 12 13 14 Anodized Anodized Anodized Anodized Chromated Hard chrome plated 1.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

7 !8 !

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimensions 3 x 7.2 (=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black Main circuit 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2 mm.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

1 t @4 #1 #0 !9 i u !8 y r w !2 !4 @7 $3 #8 #9 $0 $2 #7 @8 @9 o !6!0 @1 $1 !7 SMC !5 #6 @3 !

VCL

Valve model VCL2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

Series KDM Rectangular Multi-connector

O f o r e b m u N g n i t c e n n o c s e b u t h c n I h c n I h c n I c i r t e M c i r t e M c i r t e M 8 / 1 1 0 P 0 1 M D K 1 0 S 0 1 M D K 2 . 3 3 2 P 0 1 M D K 1 0 S 0 1 M D K e u l B 2 3 / 5 3 0 P 0 1 M D K 3 0 S 0 1 M D K 4 4 0 P 0 1 M D K 3 0 S 0 1 M D K 0 1 d e R 4 / 1 7 0 P 0 1 M D K 7 0 S 0 1 M D K 6 6 0 P 0 1 M D K 7 0 S 0 1 M D K 6 1 / 5 9 0 P 0 1 M D K 9 0 S 0 1 M

3 Port Solenoid Valve

Wipe off the dust inside the body (1), too. Take the O-rings (5) and (7) in the sliding part off of the spool valve (6), wipe them to clean and apply grease. Apply grease to the portion A of the spool valve (1), internal surface of the guide ring and portions B, C, D of the body (1), too. Note 1) Do not wash the O-ring and the spool valve with organic solvent or such.

VCS

Valve model Port size VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A Note 1) 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket

INFORMATION Step Motor Controller 5 types of communication protocols New New

E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 7.) * Only the step motor type is applicable.

C92

1 !2 !3 No. !4 !5 !6 !7 !8 !

Compact Cylinder with Air Cushion Series RQ

34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 9 for details on rod end nut and accessories.