PFxx-OMP0001CN

0999,999,999 ft 0.1 cfm 3 1 ft 3/pulse 1 ft 3/pulse 0.1 ft -0.918.6 cfm -1.837.1 cfm -3.674.2 cfm (-0.20.2 [ 0]) (-0.40.4 [ 0]) (-0.80.8 [ 0]) 3 0999,999,999 ft 0.1 cfm 3 1 ft -27No.PF-OMP0001CN-F [F 1] OUT1 OUT1 ( )OUT2 0 ON 0 OFF 0 ON 0 OFF -28No.PF-OMP0001CN-F ( )OUT2 3 3 3 3 3 3 ON OFF ON OFF OUT2 -29No.PF-OMP0001CN-F <>OUT1 [F 1] [F 1][oU1] [oU1][] [1ot][] 31

Voltage Monitor for PFMV5

PFMV5 MODEL / Series / Product Number PFMV3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 15 Installation 15 Wiring 17 Flow Setting 21 Function Setting 23 Default settings 23 F0 Auto-preset 24 F1 Setting of OUT1 26 F2 Setting of OUT2 29 F3 Response time 30 F4 External input 31

Digital Flow Monitor

Switching function of [F 0] Flow range, display unit and switch output specifications Page 31 Item Default setting Flow range 3000 L/min Display units 1 L Switch output specifications NPN 1: This setting is only available for models with the units selection function.

Digital Flow Switch (Integrated display type)

Installation 14 Installation 14 Piping 15 Wiring 16 Outline of setting 18 List of outputs 19 Function selection mode 20 F_0 Initialize mode 21 F_1 Selection of display mode 22 F_2 Unit selection function 23 F_3 Selection of output mode 24 F_4 Selection of switch operation 25 F_5 Key-lock function 26 F_6 Input of the Set point 27 F_7 Selection of reference condition 30 F_8 Accumulated value hold 31

LV50-OMQ0002

Setting of reversed output 1_P/1_N (page 29) * Input of set values Setting of Add/dEC P1AH/n2AH Setting of P1L/n1LP1H/ n1H/H1 (Page 30) Setting of P_1/n_1/H_1 (Page 30) P1dH/n1dH (Page 31) 4 Select display color SoG/ SoR/ Red/ GRN (page 33) 5.

LFE-OMZ0013

Setting of reversed output 2_P/2_N(Page 31) 3.Input of set values Setting of Setting of tnL/tPL P2L/n2L Setting of tn/tP/H_t P_2/n_2/ tnH/tPH/Ht P2H/n2H/ Add/dEC setting H_2 setting (Page 34) H2 (Page 33) (Page 32) (Page 34) (Page 32) 4. Completed [F 2] Setting of OUT2 complete -30No.LFE*-OMZ0013 1.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

, Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 12 Valve for Water and Chemical Base Fluids VCC Series Dimensions Manifold Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) VV2CC1 VVMCC1, VV3CC1 30 31

XMC/XYC Series

XYC Exterior dimensions D G C C B J Fd (K Flange) 45 H Fn (KF Flange) A E Unit:mm Model A B C D E Fn Fd G H J XYC-25 100.2 85 48 1 23.5 40 26 64 28 XYC-40 130 115 66 2 38 55 41 84 36 C D G C B J Fd (K Flange) 45 K H Fn (KF Flange) A E Unit:mm Model A B C D E Fn Fd G H J K XYC-50 178 121 80 31 53 75 52 104 29 10.5 XYC-63 209 148 100 39 61 87 95 70 126 36 9 XYC-80 268 177 117 45.5 80 114 110

IP80-OM00019

(1) (1) (2) (3) A O B (4) (5) /() 0.2 AB (6) 31 (7) 9. (1)(1.) (2) (3) (4) (5) 18 (1) (2) (3) IP65IP65 2.83.0Nm (4) (5) (6) (7) (8) 0 (1) (1) (2) (3) (4) (1) (2) (3) (4) 19 (1) (2) (3) 10 1. OUT1OUT2 OUT1OUT2 OUT2 OUT2 / +/ ( 8. ) ( 5. ) ( 7-3) 2.ON-OFF OUT1OUT2 ( 3-2-3 ( 4. ) ) 20 3. ( ) ( 8. ( 11-1 ) ) (A) (A): P2240112 4.

MX-OMP0051

25.4 30.7 29.7 29.7 29.7 42.7 42.7 28.7 67.7 67.7 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 18 7.4 7.4 7.4 7.4 7.4 3 13.6 13.6 19.6 36.6 13.6 MXQ8B 29 13.9 13.9 13.9 13.9 13.9 13.9 4 11.1 11.1 19.1 19.1 38.1 38.1 MXQ12B 16.5 16.5 16.5 16.5 16.5 16.5 16.5 16.5 26.1 20.1 20.1 27.1 27.1 33.1 52.1 52.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 35 25 25 25 31

Rotary Actuator

Internal parts are broken. 31 - Refere nce Problem Possible cause Solution page 23 29 30 Please confirm the presence of the wound in the cylinder inner wall after cleaning the inside of the cylinder.

CVRA1-E

Magnet A Magnet B Auto switch A Auto switch B Fig. 13 Auto switch operation principle -31- Maintenance and Inspection Periodic inspection is necessary for optimum use. Generally, annual inspection is recommended for the rotary actuator. Even if no problem is found, seal parts replacement is recommended every three years.

DOC1023126

Preparation of necessary supplies . 31 . Installation of electric actuators . 32 . Wiring and Connection . 33 .. Connection to input power supply . 33 .. Connection to PC . 38 .. Connection to PLC . 38 . Power ON alarm (error) . 40 . Setup of the operation parameters . 40 . Test run . 41 Operation .42 . Operation flow . 42 . Procedure for power set up. 43 ..

LECA6_C

S [S ] 2.S [S ] S S 1 () (0 ) (+) (+) 1 + mm (-) (-) 1 mm 1 mm/s 1 mm/s 2 1 INP mm 1 31 - mm 0mm M (0mm) 100mm 1 M (100mm) (+)(-) 1 1 +(++) 12 2 (+) SW SW SW 12 1. 2. W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

LECP6_C

CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13

JXCx-OMU0004

P.46 c 31 No.JXC-OMU0004-A 7.2 (1)3 (1) e e (4) [2] i j 3 LED a LED a i j 7 LED f 3 h O g 3 7 LED 0 LED b LED b g h 32 No.JXC-OMU0004-A (4) h NO( 7 LED f 2)7 LED h h *NO NO. 1 2 3 (5 g 7 LED 7 LED f 1 g h * h 4 7 LED f 6 g 2 7 LED f g 33 No.JXC-OMU0004-A (7) i j e 3) g 2 7 LED g j i * 47 e NO. (*) 1 1CW [CW] 2.

Step Motor Driver （ Pulse input type ）

Differential input Open collector input 2s or more 2.5V to 4.3V 5s or more 24V 21.6V to 26.4V 5V 4.75V to 5.25V 0V 0.25s or less 0.25s or less 0V to 0.8V 3s or less 5s or moer 3s or less -2.5V to -4.3V 2s or more 16s or more 5s or more 31 - 6.3 The parallel I/O signal is detailed Pin No.

JXCx-OMT0032CN

) . 13 (2)DIN(LECGDN1D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1 (NODE ADDRESS,B RATE) . 15 4.2(CN2SW) . 15 4.3(LEC) . 16 5. . 18 5.2 CN3 . 18 5.3 CN1CONT . 18 5.4 CN2PC/TB . 19 .CN4 . 20 6.1 . 20 6.2 . 20 6.3 . 21 1 - . 22 7.CN3 . 23 8.CN1IF(CONT) . 24 8.1 . 24 8.2 . 26 9.CN2TB/PC . 27 9.1 . 27 10.LED . 28 10.1 LED . 28 10.2IFLED . 28 11. . 29 11.1 . 29 11.2 . 29 11.3 . 29 11.4 . 31

IDX-OM-W016

IDX-OM-W016 Air dryer6 References 6-3 Dimensions DRAFT AIR OUTLET IDFA3E B Q A E D AIR INLET VENTILATION WITH LAMP SWITCH AIR OUTLET THERMOMETER EVAPORATION G F C DRAFT AIR INLET DRAIN TUBE (O.D.10 LENGTH:0.8m) VENTILATION (820) J TERMINAL BLOCK N L K M H GROMMET POWER SUPPLY ENTRY(17) P Measuremm Model Thread size A B C D E F G H J K L M N P Q IDFA3E Rc3/8 226 410 473 67 125 304 33 73 31

IDX-OM-W037

Pressure increase End equipment inlet Pressure decrease End Valve 2 equipment Valve 1 Dryer outlet Flushing air 31 IDH Series 3.1 Check points before operation IDX-OM-W037 Thermo-dryer 3. Operation/ Shutdown (5) Open Valve 2 and close Valve 1 to start using the compressed air. (6) Slowly turn the pressure adjustment handle to set the pressure supplied to the end equipment.