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Specifications 1-1 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 Mpa Min. operating pressure 0.05Mpa -10 to +70 oC. With magnet built in: -10 to +60 o Ambient and fluid C temperature (No freezing) Lubrication Not required (non-lube) Stroke length tolerance Cushion Air cushion Piston speed 50 to 1000 mm/s Warning Confirm the specifications.

Applicable cable Cross section of the wire: 0.5 to 1.5 mm2 Cable O.D.: 8 to 10 Applicable crimp terminal shown below. Although A, B+ and B marks are indicated on the terminal block, this can be used as either +COM or COM.

Specifications Specifications Model MHF2-8D MHF2-12D MHF2-16D MHF2-20D Bore size (mm) 8 12 16 20 Fluid Air Operating pressure (MPa) 0.15 to 0.7 0.1 to 0.7 Ambient and fluid temperature (oC) -10 to 60 (No freezing) Note 1) Repeatability (mm) 0.05 Short stroke 120 Maximum operating frequency (c.p.m.)

With floating joint 13 Internal Construction and Parts List A 14 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

Applicable filter model Element size Set description ZFC-EL-1 ZFC1 5 x 3 x L11 ZFC-EL-2 ZFC3 6 x 4 x L25 Spare element: 10 pcs.

Pilot port piping 12(P1) and 10(P2) piping should be as follows according to the model () If the pilot air is not supplied, the valve position will not be held. Pressurize Port 12 (P1 ) or Port 10 (P2) when using the product. Installing a silencer to the exhaust port and the bleed port is recommended for noise reduction and for dust entry prevention.

(It is possible to blow the poppet valve.) (7) Install a tank on the supply side to stabilize the supply pressure. (8) Install a tank on the pilot pressure supply side to stabilize the pilot pressure. (9) Connect wires correctly. (10) Replace the part. (11) Replace the part or connect wires correctly.

0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40

Construction / Options / Replacement parts 10 6. Bowl assembly specifications 11 to 13 7. Assembly of Optional parts 14 8. Troubleshooting 15 9. Replacement work procedure 16 to 22 1) Element assembly (AMK20) 16 to 17 2) Bowl assembly (AMK20) 18 1) Element assembly (AMK30/AMK40) 19 to 20 2) Bowl assembly (AMK30/AMK40) 21 to 22 10. Exploded Drawing 23 11.

Lead wire length Output specification CE-compliant 10 For positive pressure 3 m L Wetted part material Sensor part: Silicon, Body part: PBT, O-ring: HNBR Nil No For vacuum and residual puressure 11 Q CE-compliant Piping specification For vacuum 12 R06 6 reducer URL http://www.smcworld.com R07 1/4 reducer Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3

Export Function 12 10. Troubleshooting 13 11. Definitions and Terminology (Supplementary Explanation) 15 -1No.EX-OMV1026-B 1.

As a guide, insert bolts in 2 positions for 2-5 stations, 3 positions for 6-10 stations, 4 positions for 11-15 stations, 5 positions for 16-20 stations and 6 positions for 21-24 stations. Take the same measures for horizontal mounting if the mounting surface vibrates. 2.

B A, B A VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 3.2 4.2 A B VQ1000 VQ2000 90 3.2 4.2 VQ1000 VQ2000 90 VQ1000 VQ2000 No.VQ1000V-OMV0001 8 - VQ1000 Series VQ1000 Series VQ1000 Series VQ1000 Series/ / / / 3,4,5 3,4,5 3,4,5 3,4,5 / / / / M M M M-03 03 03 03-3 3 3 3 IP65 IP65 IP65 IP65 IP65 IP65 Assy )O )M5 Assy (0.81.2Nm) )10 Assy VQ1000 VQ2000 Assy VVQ1000-82A-1 VVQ2000-82A-1 10

When the product is continuously energized for a long period of time (10 minutes or longer), select the low wattage type (DC specification). The AC type cannot be continuously energized for 10 minutes or longer. If anything is unclear, please contact SMC.

No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25 0.3mm 2 AXT100-DS25-150 15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3

B (3) (MPa) 3 OFF 1)4 1) OUT 0.7 0.6 VM1 VM1 () 0.5 0.4 0.3 0.2 ,0.6MPa VM2 VM2 0.1 ,0.3MPa 2 0 1 2 3 4 5 6 7 8 9 10 (m) 4 11 7. 4 (EXH) 1/8 (PIL) R 3 (R) 21/8 2 (A) 1 (P) 2M61 8 () 2x6.5 M6x1x12 4xM6 4X7 t=2 t=3 12 Revision history DVM VM100-A E (JIS) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

Address HW/SW 9 10 7 8 5 6 3 4 1 2 ON Note: Be sure to switch off the power supply when set on the switch. Safety Instructions Address setting (switch No. 5 to 10) Set the DeviceNetTM node address (MAC ID) in binary coded. Address range is 0 to 63. Note: Factory default setting is 63.

Setting range: 1 to 99 (10 dec.) Example: Example: 2 Address is set in network by using ET200 hand held unit or PG (programing tool). Once address is set, it is saved even if power is cut. Setting range: 1 to 125 (10 dec.) Value set on shipment: 125. CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply SI unit common status PROFIBUS DP status

DG DG DG SLD SLD SLD CC-Link-dedicated cable FG CC-Link-dedicated cable 5 FG FG DIP SW.1 DIP SW.2 ON EX180 Series for CC-Link 6 1 Figure 2 PWR(V) PWR L ERR 0 1 2 3 4 5 6 7 8 9 10 1 2 1 Thank you for purchasing an SMC EX180 Series Fieldbus device (Hereinafter referred to as "SI unit").