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ZSE ISE PSE Z I SE3 PS Two independent flow rate settings are possible.

Air Cylinder

45 16 Z CJP CJ2 CJ2 CDJ2K S B Z With auto switch (Built-in magnet) 45 16 M9BW B With auto switch JCM q w e r t y u i o !

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m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

AC Servo Motor Driver (Network card type ）

The Z-phase signal was Review the Z-phase unpassed not detected normally. signal and wirings. not detected.

High Vacuum Angle Valve

D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

A

X B 5 _ C D N Inches Example: 04 = 4 Stroke R O D T H R E A D R O D B O R E S I Z E G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z 3/4-16 1-14 1-14 1 1-3/8 1-3/8 500 5 600 6 800 8 Up to 32 Bore available Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Power saving circuit is only available in the Z type.

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Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S 128 [129] 129 [130] 116 [117] 117 [118] 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 10 16 84 72 60 52.5 M8 x

AC Servo Motor Driver (Pulse input type/Positioning type ）

The Z-phase signal was Review the Z-phase unpassed not detected normally. signal and wirings. not detected.

Air Cylinder Series CM2

U L RR Z + Stroke 20 CX CZ ZZ + Stroke N L Stroke Head side trunnion style: -H -R -W -H -R -W N L Stroke Rod side trunnion style: CBM2U Bore size CBM2T Bore size TY TD TT Z + Stroke ZZ + Stroke Z TT TZ TX ZZ + Stroke (mm) Axial foot style Trunnion style Clevis style Flange style Bore size (mm) Stroke range Stroke range Stroke range Stroke range Z Z ZZ FX LD FT LH B LC LS LT LX LZ X Y Z ZZ

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15 9 13 8.5 2-M5 x 0.8 (30) (Z) 6 2-M8 x 1.25 thread depth 12 thread depth 7.5 60 0.2 12 (mm) S SS ZZ Z Part no.

Air Cylinder

ZZ S Z ZZ S Z ZZ S Z ZZ S Z ZZ 20 87 132 141 112 157 166 137 182 191 25 87 136 145 112 161 170 137 186 195 32 89 138 147 114 163 172 139 188 197 164 213 222 40 113 168 179 138 193 204 163 218 229 188 243 254 213 268 279 Symbol Bore size The bracket is shipped together.

Magnetically Coupled Rodless Cylinder

, z + A = 100 y, z + A a 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A =

Aluminum High Vacuum Angle Valve

D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

4/5 Port Solenoid Valve

) Z: Positive common specifications only.

CJ2

Z + 2 x Stroke Rod End Nut Material: Iron Applicable bore (mm) 10 16 H d C B Part no.

CV/MVGQ

2 10-15-13 14 Series CVJ3 Single Acting, Spring Return/Basic Style (B) M5 x 0.8 CVJ3B S Bore size Stroke M5 x 0.8 28 [34.5] 48 [49] Manual override Width across flats B1 Rod End Nut Bore size (mm) 10 16 H1 B1 7 3.2 16 [17] S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S

CV/MVGQ

15 34.5 M26 x 1.5 14 15 50 39 18 10 24 16 7 11 22 8 76 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Q QY Bore size (mm) 20 25 32 40 Symbol S ZZ Z S ZZ Z S ZZ Z S Z ZZ S Z ZZ 20 25 32 40 14 65.3 19.8 217 208 137 192 183 112 167 158 87 14 70.5 22 221 212 137 196 187 112

Compact Cylinder

Symbol Cylinder Tube: With Concave Boss on Head End -X1876 ClQ2 ClQ2K ClQ2lS D(C)(M)(Z) S(M)(Z) T(M)(Z) X1876 Mounting Bore size Stroke With concave boss on head end The specifications are the same as those of the CQ2 series.

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100