AL800/900 AL800 AL900 AL800 AL900 12316 12314PA Sight dome Lubrication plug assembly Polycarbonate Aluminum casted Aluminum die-casted Aluminum die-casted Body Housing 12316 12314PA e r Platinum silver painted Platinum silver painted q w 1 4 1 2 1 1 123528A t Damper assembly 123413A-1 123413A-2 ( ) ( ) Needle stud assembly Siphon tube assembly Sight dome seal Siphon nut seal Bowl O-ring Housing O-ring
Description q w e r t y Note Body Valve cover Adapter plate Cover Tension bolt Flow adjustment screw AMJ Misc. ZMA-HCB Electroless nickel plated Replacement Parts No. Description u i o !0 !1 !2 Part no.
Series: SS5Y3 (SY3000 Manifold), Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢, Version A), SI Unit Common, End Plate: 5 (Negative Common, 7/8" Connector), I/O Unit Stations: None, Valve Stations: 6 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), P, E Port Size: ø8 One-touch Fitting, Mounting: D
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, SOL, VALVE, VG/VGA VALVE, JA, VG BODY PT 1/2, 2.28886 lb
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 5 Stations, Input Block Type, Common Spec: C (Positive Common, M8, 4 Inputs), Valve Stations: 8 Stations, P,E Port Location, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting)
Model: 10S (Side Ported), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 1 Station, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: U (Port Location U Side, Internal Pilot), A, B Port Size: C8 (ø8 One-touch Fitting)
Model: 10S (Side Ported), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 4 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A, B Port Size: N7 (ø1/4" One-touch Fitting)
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: None, Input Block Type, Common Spec: A (Positive Common, M12, 2 Inputs), Valve Stations: 12 Stations, P,E Port, SUP/EXH Block Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø5/16" One-touch Fitting)
Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 16 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø3/8" One-touch Fitting)
Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 16 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø3/8" One-touch Fitting)
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 2 Stations, Input Block Type, Common Spec: B (Positive Common, M12, 4 Inputs), Valve Stations: 10 Stations, P,E Port, SUP/EXH Block Assembly: C (Port Location U Side, Internal Pilot, Built-in Silencer), P, E Port Size: N (ø3/8" One-touch Fitting)
Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
~~===rr-N"~e-_ ~~ =4It PNP, and analog output.
SRF Flow rate (L/min (ANR)) Example of mounting ITV Pressure Characteristics (Representative Value) Initial setting P1 = 0.7 MPa P2 = 0.2 MPa Q = 20 L/min (ANR) Bracket IC ITVH Set nut Outlet pressure (MPa) ITVX PVQ VY1 VBA VBAT Model Part no.
Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28
F G H I J ASCII code 4BH 4CH 4DH 4EH 4FH 50H 51H 52H 53H 54H Character used K L M N O P Q R S T ASCII code 55H 56H 57H 58H 59H 5AH Character used U V W X Y Z HEF002-A6 3-9 Troubleshooting 4 Troubleshooting The table below shows the solutions for the problems.
F G H I J ASCII code 4BH 4CH 4DH 4EH 4FH 50H 51H 52H 53H 54H Character used K L M N O P Q R S T ASCII code 55H 56H 57H 58H 59H 5AH Character used U V W X Y Z INR-244-831 3-9 Troubleshooting 4 Troubleshooting The table below shows the solutions for the problems.
(REFRIGERANT) IDFA60-23 W R 0001 (2018 4 ) W R 0001 o 1 Z 12 o P Q R A Z 1 2 3 4 W X y Z 2018 2019 2020 2021 IDFA60/70/80/90 Series 1-4 IDX-OM-W094 1.3 HFC 1-4 IDFA60/70/80/90 Series 1-5 IDX-OM-W094 1.4 / 1 1.5 () IDFA60/70/80/90 Series 1-6 IDX-OM-W094 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFA60/70/80/90 Series 2-1 IDX-OM-W094 () IDFA60/70/80/90 Series 2-2 IDX-OM-W094 3