Vacuum Gripper

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

Vacuum Gripper

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

Vacuum Gripper

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122

JXCx-OMT0005CN

byte 3 12 byte 4 byte 4 10 byte 5 20 byte 6 20 byte 4 byte 7 10 byte 8 20 byte 9 36 byte 4 byte 10 10 byte 11 20 byte 125 Get/Set 2 JOG *1 IO 20 - 3IO IO Number Type Name 100 Input 101 Input 102 Input 14 110 Output 111 Output 112 Output 12 113 Output 4IO Input Assembly Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM ESTOP

VXR21/22/23

IN Model/Valve Specifications Connection Max. operating pressure differential (MPa) Flow characteristics Water, Oil Weight (g) Min.operating pressure differential (MPa) Orifice size (mm) Max. system pressure (MPa) Model Thread Water Oil Cv converted Av x 10 -6 (m 2) 1 2 3 4 VXR2150-04 VXR2150-06 VXR2260-10 VXR2270-12 VXR2380-14 VXR2390-20 20 20 25 35 40 50 1250 160 180 290 530 720 1200 6.5

Flow Sensor Series PFMV

20 9.1 9.1 2 1 1 2 L-type bracket (Through hole) The dimensions show the PFMV5-1.

COQ2BP

Zone 40 :/ 1 30 " /' i 20 ;/ Danger Zone 10 SOOO 120 ' . , ,.. .. Welding Current (A) t2 50 , . > Safe ~~n~ .-. 40 . .. lao :!20 g . .. . ~er ~ Zone 10 Distance From Auto Switch Top Face 0 5000 10 15000 20 Welding Current CAl .. ... i1 SO >. . /" /. 40 Sai. Zone ..

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30

Digital Flow Switch

Reference condition for volumetric flow: 101.3 kPa, 20 C, 65%RH The flow measurement which is converted at normal atmospheric pressure conditions at 20 C, 65%R.H. Standard condition (ANR) An output type that has only 2 conditions, ON or OFF. In the ON condition an indicator LED will turn on, and any connected load will be powered.

Low Differential Pressure Sensor

DC() IN (1 to 5 V) Analog output or auto shift input Gray 2 DC(-) Blue 1 20 2 m 20 With bracket A 30 20 46 4.2 10 15 40 31.5 26.5 1.6 7.2 22 35 41 A View ZS-28-B Bracket With panel mount adapter With panel mount adapter + Front protective cover 42.4 34.5 24 7 34.5 24 11 Panel thickness 0.5 to 6 ZS-27-D Panel mount adapter + Front protective cover 8.75 ZS-27-C Panel mount adapter 6 Series

VCC

M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly

Fieldbus System

SS5Y5 10 NA 05 N M S U C 8 6 Refer to page 20 for Type 11/ Bottom ported dimensions. Mixed Mounting Type q w e r t o y !0 u i It is possible to mount SY3000 size valves on all stations. In this case, there is no need to fill in part i in the order code.

Suction cups with flange

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

AZ1000

140 160 180 200 Flow rate (slpm, N2) AZ1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.00 (50.8) 10 0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Connections inch

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

PFxx-OMX0002

Do not use a cable longer than 20 m. Wire the DC(-) line (blue) as close as possible to the power supply.

Process Pump

30 40 50 5 0 10 15 20 25 Discharge rate (L/min) Discharge rate (L/min) PAF3410 Air Consumption PAF5410 Air Consumption 200 SUP = 0.5 MPa 300 SUP = 0.5 MPa Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 0 10 15 20 25 5 0 20 30 40 50 10 0 Discharge rate (L/min) Discharge rate

KA

(mm) Applicable fitting size d 3.2 L Weight (g) D A M Model Urethane Soft nylon Applicable tubing KAR23-04 9.6 4 33.5 34.5 36.5 18.5 18.5 17.5 18 15.5 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 KAR04-10 39.5 37 39.5 10 3.3 2.5 KAR06-08 8 18.5 KAR06-10 6 12.8 KAR06-12 42 4.7 12 20 17 10 3.0 13.1 13.1 Applicable fitting size d 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2

Sensor Monitor

(Additional range) Relation between analog input and digital display Set value A B 0.002 0 kPa 2 kPa -0.1 0 kPa -101 kPa F0.1 -100 kPa 100 kPa 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa 1 0 MPa 1 MPa 2 0 MPa 2 MPa 5 0 MPa 5 MPa 10 0 MPa 10 MPa 20 0 MPa 20 MPa 25 0 MPa 25 MPa USEr Input value (setting) Input value (setting) Available display unit and minimum set value Pressure range Rated pressure