MHx-OMU0057

6 MHZ2-16 M40.7 1.6 4.5 MHZ2-20 M50.8 3.3 8 L L MHZ2-25 M61 5.9 10 MHZ2-32 M61 5.9 10 MHZ2-40 M81.25 13.7 13 Nm Lmm MHZ2-10 M30.5 0.69 5 MHZ2-16 M40.7 2.1 8 MHZ2-20 M50.8 4.3 10 MHZ2-25 M61 7.3 12 MHZ2-32 M61 7.9 13 MHZ2-40 M81.25 17.7 16 Nm MHZ2-10 M2.50.45 0.49 MHZ2-16 M30.5 0.88 MHZ2-20 M40.7 2.1 MHZ2-25 M50.8 4.3 MHZ2-32 M50.8 4.3 MHZ2-40 M61 7.3 D-Y59 D-Y69 D-Y7P 7 - 1. 2. 1.

KP/KPQ/KPG

0 20 40 60 80 Particle diameter m or less Operating temperature C 15-5-8 Clean One-touch Fittings Series KP How to Order KP H 06 KP P 08 01 Applicable fitting size Port size/Applicable tubing O.D.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

Description Material 20 PDU-8Z 25 PDU-10Z 32 PDU-12LZ 40 PDU-14LZ !

25

Comparison of potential amplitude between AC type and dual AC type (Installation height of sensor: 300 mm) 40 AC type Surface potential of workpiece (V) 20 25 V or less Dual AC type IZS42 0 20 40 Time Independent Dual AC type is implemented.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Applicable cylinder bore size (mm) 3.2 Metric size Inch size Model 1/8" 5/32" 3/16" 1/4" 6 8 5/16" 4 6, 10, 16, 20 AS1001FM 20, 25, 32 AS2001FM 20, 25, 32, 40 AS2051FM Specifications Air Fluid 1.5 MPa Proof pressure 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure 5 to 60C (No freezing) Ambient and fluid temperature 10 turns (20 turns (1)) Number of needle rotations Nylon, Soft

Vacuum Regulator

Vacuum pump Conditions: Vacuum pump exhaust speed: 2500 l/min VAC side pressure: 101 kPa (At initial setting) Flow-rate Characteristics (Representative Value) Pressure Characteristics (Representative Value) IRV10-C08 (One-touch fitting 8) IRV10 53.0 0 10 53.5 SET side pressure (kPa) 20 54.0 Set pressure (kPa) 30 54.5 40 55.0 50 55.5 60 56.0 70 Set point 56.5 80 57.0 90 0 20 40 60 80 100 120

VQ4000

Refer to pages 2-5-40 to 2-5-43 for control unit.

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

Vacuum System Peripherals:

Series ZM 13-14-20 4.

Step Motor Controller (Servo / 24 VDC)

External Wiring Diagram . 20 4.1 CN1: Power connector . 20 4.2 CN2: Motor power connector and CN3: Encoder connector . 20 4.3 CN4: Serial I/O connector . 20 (1) Connection with the teaching box . 20 (2) Connection with a PC . 21 1 - 4.4 CN5: Parallel I/O connector. 21 5.

HRX-OM-W058

fluid pressure [Mpa] 20 Outlet60Hz 0.2 Pump head [m] 10 0.1 Outlet50Hz Return port 0.0 0 10 20 30 Circulating fluid flow [L/min] Fig 9.6-1 Pump capacity(HRS018/030--20-R) 9.6.2 HRS018-A-20-T-R, HRS030-A-20-T-R 0.8 80 0.7 70 available area Circulating fluid pressure [MPa] 0.6 60 Pump head[m] 0.5 50 Outlet: 60Hz 0.4 40 0.3 30 Outlet: 50Hz 0.2 20 available area 0.1 10 Return port 0.0 0 0 5

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

x 1.75 11 22 17 M22 x 1.5 23 37 21 4 40 204 102 18.5 80.5 116 1/2 up to 750 40 37 116 41 92 30 20 52 14 21 72 16 72.8 87.5 M12 x 1.75 11 26 17 M26 x 1.5 23 40 21 126 4 40 215 1/2 For more information about the rod end nut and accessories, please refer to page 12.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

For double solenoid For 3 position type: For 4 position type SX100-40-4DNegative common specifications Electric circuit diagram (With positive common and light/surge voltage suppressor) For single solenoid: SX100-41-4SFor double solenoid For 3 position type: For 4 position type SX100-41-4D[SOL.b] () Coil How to Order Lead wire length 2000 mm 10-SZ3160-5MO-M5 SX100-40-4S-20 COM (

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

VM

(2 position) Twist selector (3 position) Foot pedal Push-pull P . 5-6-8 P . 5-6-12 P . 5-6-20 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet Function 5-6-2 Mechanical Valves Series VM Mechanical Valves SA VA VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM VR VH VHS Roller lever

IZx-OMP0064

Detecting port Installation Detection range distance mm mm 10 45 25 100 50 180 M3 screw Unit: mm A B 10 20 20 40 25 45 30 55 40 65 50 75 Mount a metal plate directly beneath the ionizer so that the metal plate faces the ionizer. Offset voltage may vary depending on the installation environment.

HEC_001W-E

C 10 20 30 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-6 Cooling capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 1000 Cooling capacity W 5 Radiating water flow rate L/min 800 1 3 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 40 100 160 200 10 16 20 25 32 30 60 80 40 80 100 20 40 60 50 100 120 70 120 160 Nil 1 2 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type

MHL2

10, 16, 20, 25: 40 mm, Bore size 32, 40: 80 mm.