Manifold Type: Base Mounted, Stations: 05, Port Size: M5 x 0.8

Pad Connection Thread: A5A5 (M5 x 0.8), Orifice Size: 05 (0.5 mm)

Pad Connection Thread: A5W4 (M5 x0.8 Male Thread, Ø4 One-touch Fitting), Orifice Size: 05 (0.5 mm)

Pad Connection Thread: B5B5 (M5 x 0.8), Orifice Size: 05 (0.5 mm)

Pad Connection Thread: A5 (M5 x 0.8), Orifice Size: 05 (0.5 mm)

Pad Connection Thread: B5 (M5 x 0.8), Orifice Size: 05 (0.5 mm)

Pad Connection Thread: B5W4 (M5 x 0.8 Female Thread, Ø4 One-touch Fitting), Orifice Size: 05 (0.5 mm)

Body Size: 1 (M5 Basis), Style: 3 (Universal), Control Method: 1 (Meter-in), Port Size: 10-32UNF, Applicable Tube OD: 05 (3/16"), Sealant: None

Body Size: 1 (M5 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Port Size: 10-32UNF, Applicable Tube OD: 05 (3/16"), Sealant: None

Body Size: 1 (M5 Basis), Style: 3 (Universal), Control Method: 0 (Meter-out), Port Size: 10-32UNF, Applicable Tube OD: 05 (3/16"), Sealant: None

Body Size: 1 (M5 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Port Size: 10-32UNF, Applicable Tube OD: 05 (3/16"), Sealant: None

Body Size: 1 (M5 Basis), Style: 3 (Universal), Control Method: 1 (Meter-in), Port Size: 10-32UNF, Applicable Tube OD: 05 (3/16"), Sealant: None

Body Size: 1 (M5 Basis), Style: 3 (Universal), Control Method: 0 (Meter-out), Port Size: 10-32UNF, Applicable Tube OD: 05 (3/16"), Sealant: None

Body Size: 1 (M5 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Port Size: 10-32UNF, Applicable Tube OD: 05 (3/16"), Sealant: None

Body Size: 1 (M5 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Port Size: 10-32UNF, Applicable Tube OD: 05 (3/16"), Sealant: None

Body Size: 100 (M5 Basis), Applicable Tubing: 05 (3/16")

Body Size: 100 (M5 Basis), Applicable Tubing: 05 (3/16")

Stations: 05, Port: M5 x 0.8

DOC1001322

usage time of dustproof filter .5-26 5.4.6 Software version screen .5-27 5.4.7 Setting screen .5-27 Temperature rise/drop alarm (AL10/AL11).5-28 TEMP READY alarm (AL12) of TEMP READY function .5-30 Offset (TEMP OFFSET) function .5-33 Pump operation mode .5-36 Discharge pressure alarm (AL18/AL19/AL20) .5-37 Electric conductivity and alarm setting (AL28) .5-39 5.4.8 Function setting screen .5-41

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114