Vacuum Ejector Series ZM

Description 7 8 9 10 11 12 Material Polyethylene Part no.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Pressure Control Equipment O-ring Cross recessed round head screws (with SW) (M3) End block Tie-rod For common supply blocks, reversible and double-sided mounting is available. Common supply tie-rod Industrial Filters Cross recessed round head screws (with SW) (M3) Tightening torque: 0.32 0.03 Nm 451 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 4 4.

Directional Control Driver for Electric Cylinder

Applicable mounting screw: M3 (2 pcs.)

VQ5000

How to Calculate the Flow Rate SOL.A VQZ100-47-A For obtaining the flow rate, refer to pages 2-1-8 to 2-1-11.

80

/Single Unit Body material Brass 2 x 3.4 Mounting hole W Y Grommet X U 300 Q F D Full wave rectifier (AC type) C R [mm] 1 E G Mounting method Model Port size P B B1 C D E F J K M 2 x P Port size B B1 VDW1 M5 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 22 11 51.7 20 8 13.5 M3 5 15 Mounting bracket dimensions (XD) Electrical entry M Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17

Air cylinder

(Refer to Page 11, 2-6.

SJ3A6

Component Parts Note Filter guide Plug 11 PS port with plug M-5P 1 m White 12 Filter assembly SJ3000-110-1A After tightening the plug (M-5P) with a tightening torque of 1 Nm, or manually tightening, use the tightening tool and tighten it by 1/4 turn. 1 m White , 5 pcs. included 13 Filter SJ3000-107-1A !3!5 Filter (5 pcs. included) !2!

IDX-OM-U010

Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD .

4-channel Flow Monitor (Remote type monitor unit)

Channel scan function 31 Peak/Bottom value display 31 Key-lock function 32 Maintenance 33 Troubleshooting 34 Cross-reference for troubleshooting 34 Error indication 36 Specification 37 Specifications 37 Dimensions 41 -1No.PF-OMH0003-F Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Digital Gap Checker

Lead wire colour Description 1 Brown DC(+) 2 White N.C. 3 Blue DC(-) 4 Black OUT1 ZS-31-B (Lead wire with connector) ZS-31-C (Lead wire with connector) -35No.PS-OMR0002-K 3 Installation ISA-19(Centralized lead wire) Pin layout ISA-19-2/3 (5 cores) ISA-19-4/5/6 (8 cores) Caution The electrical entry of centralized lead wire for M12 connector is on the right side.

155

29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115 74.2 1/2 63 49.6 29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115 74.2 3/4 80 59 35 17.5 112 120.5 165 35 31 62 5.5 48 30 31 124.2 80.1 1 90 74 44 22 135.9 144.5 189 40 36 72 6.5 60 35 39.5 148.2 91.1 382 Coolant Valve Series SGC Dimensions External pilot solenoid type (DIN terminal) PP J Pilot port 2 x 1/8" (Back side PE: Filter

COQ2BP

L L N'm J MJ in3 in3 Energy em3 (ee) 0.0610 m3 35.320 0.0283 28.329 1t3 N'm 0.7375 11 Ib 1t3 J 0.7375 It Ib L 0.0353 Power It IbiS hp 9al(U.S.) 3.785 gal (U.S.)

Water-cooledThermo-chiller

Cooled substance total volume V Cooling time h Cooling temperature difference T Facility water temperature Circulating fluid : 60 L : 15 min : 20C (20 K) (70C 50C 20C) : 20C (293.15 K) : Fluorinated fluid Density : 1.74 x 103 kg/m3 Example of conventional measurement units (Reference) 0.06 m3 0.25 h 20C 20C Fluorinated fluid Density : 1.74 x 103 kg/m3 Specific heat C: 1.05 x 103 J/(kgK)

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

SMC Electronic Switch Series Variations

Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)

Mist Separator

P A B C D G J M N Q R S T U V B AM50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AM60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Micro Mist Separator

P A B C D G J M N Q R S T U V B AMD50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AMD60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Micro Mist Separator

Bowl Assembly Specifications 11-18 7. Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-26 10-1. Bowl Assembly Replacement 23-24 10-2. Element Replacement 25-26 11. Disassembly Drawing 27 12.

Digital Pressure Switch ( compatible)

No.PS-OMX0002-A PRODUCT NAME Digital Pressure Switch ( compatible) MODEL / Series / Product Number ZSE20C(F)-L ISE20C(H)-L Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 11 Definition and terminology 13 Mounting and Installation 17 Installation 17 Piping 20 Wiring 22 Outline of Settings [Measurement mode] 24 Pressure Setting 25 3 Step

MICRO MIST SEPARATOR

SPECIFICATIONS OF BOWL ASSEMBLY 11-18 10. REPLACEMENT PROCEDURE 19-22 11. DISASSEMBLY DRAWING 23 12. DIMENSIONS 24 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.