Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

ZB-OM00301

U / PVPD ZZB-SM5 ZB0030-K1L(O)E F D U 36 - No.ZB-OM00301 ZB1/2-K1 46 ZB3-K11 40 g ZB1-PS-A 5 ZB1-ZS-A Assy 14 1 2 3 4 5 6 7 8 9 10 11 12 g 16 22 28 34 41 47 53 60 66 72 79 85 ++ 5 40g 5 + 5g 5 + 41g 266g 37 - No.ZB-OM00301 0.3 N.C. / ZB03-K1/J1 (0.35MPa ) [L/min(ANR)] [L/min(ANR)] [KPa] [KPa] [L/min(ANR)] [MPa] 0.4 N.C. / ZB04-K1/J1 (0.35MPa ) [L/min(ANR)]

IDX-OM-Y002

IDF60/70/80/90 Series 5.2 Regular maintenance 5-7 IDX-OM-Y002 Chapter 5 Checks, Maintenance and Adjustment (D) Replacement of the main valve (discharge valve) Purchase the replacement kit of the main valve and replace it referring to the attached Replacement Procedure. Replacement requires a specific tool.

IDX-OM-W023

Q Guige Guige G C Guige Guige [AC200V] [AC200V] Guige Guige F 10 (10) (820) J H K P L N M 4x13 [AC200V] 17) [AC200V] [AC100V] [AC100V] Guige 17 Guige mm A B C D E F G H J K L M N P Q 859 IDU8E Rc3/4 270 485 31 902 365 1302 230 42 3002 80 3001 328 15 IDU11E Rc3/4 909 14 IDU15E1 Rc1 300 620 960 79 54 425 93 258 43 330 66 470 358 16 IDU Series 6-3 6 4 IDX-OM-W023 6 6-4 IDU8E

Actuation: 1 (2 Position Single), Piping/EXH: 43 (Base Mounted), Coil Specifications: Standard, Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal, w/Connector), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: D (Push-turn Locking Slotted Type), Port Size: 01 (1/8 w/Sub-plate), Thread: N (NPT)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: 43 [4 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: 43 [4 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: 43 [4 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 8 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: 43 [4 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 5 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)

SI Unit: QW (DeviceNet), Input Block Stations: 43 (4 Stations/M8: 4 Inputs 3 Pins), Input Block COM: N (-COM), Stations: 6 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: None, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: 43 (4 Stations/M8: 4 Inputs 3 Pins), Input Block COM: N (-COM), Stations: 8 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting)

SI Unit: QW (DeviceNet), Input Block Stations: 43 [4 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: Direct Mounting, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 43 [4 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 8 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 43 [4 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: N (-COM), Stations: 6 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 43 [4 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 8 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: Direct Mounting, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 43 [4 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 9 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: Direct Mounting, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 43 [4 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: Direct Mounting, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 43 [4 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: Direct Mounting, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: 43 [4 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)