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150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved 09-E548 D-DN Vinyl Chloride Air Operated Valve Series LVP Piping from 4 directions are possible.

D-DN This catalog is printed on recycled paper with concern for the global environment.

D-DN This catalog is printed on recycled paper with concern for the global environment.

D-DN This catalog is printed on recycled paper with concern for the global environment.

D-DN This catalog is printed on recycled paper with concern for the global environment.

Information Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved 06-E533 Issued: June, 2006 D-DNP P-120 (DN) Stainless Steel Speed Controller (Elbow Type) Series ASG Flow Rate and Effective Area Material: Stainless steel 316 Model ASG22F-M5 Tubing O.D.

33.6 34.5 34.6 35.5 32.6 38.3 39.1 40.3 51 52.4 5.2 6.2 7.1 6.2 7.1 8.1 7.4 8.2 9.5 10.3 11.6 12.3 15.5 15.5 20.6 20.6 27.6 11.3 Note 1) Reference dimensions 27.6 Note 1) Reference dimensions 550 Information Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved 06-E533 Issued: June, 2006 D-DNP P-120 (DN

D-DN This catalog is printed on recycled paper with concern for the global environment.

D-DN This catalog is printed on recycled paper with concern for the global environment.

D-DN This catalog is printed on recycled paper with concern for the global environment.

D-DN This catalog is printed on recycled paper with concern for the global environment.

D-DN This catalog is printed on recycled paper with concern for the global environment.

D-DN Vacuum Pad 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16 New RoHS Overall length is shortened. In the case of Flat type (Pad diameter: 2) Max. Max. 0.35 inch shortened (9 m m) 0.43 inch shortened (1 1 m m) Pad unit With adapter Actual size Actual size 19.5 mm 12 mm 3 mm 8.5 mm ZP3 New New ZP3 New ZP(Conventional model) ZP(Conventional model) New Space-saving 2 piping reduces working space!

D-DN Vacuum Pad 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16 New RoHS Overall length is shortened. In the case of Flat type (Pad diameter: 2) Max. Max. 0.35 inch shortened (9 m m) 0.43 inch shortened (1 1 m m) Pad unit With adapter Actual size Actual size 19.5 mm 12 mm 3 mm 8.5 mm ZP3 New New ZP3 New ZP(Conventional model) ZP(Conventional model) New Space-saving 2 piping reduces working space!

D-DN Vacuum Pad 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16 New RoHS Overall length is shortened. In the case of Flat type (Pad diameter: 2) Max. Max. 0.35 inch shortened (9 m m) 0.43 inch shortened (1 1 m m) Pad unit With adapter Actual size Actual size 19.5 mm 12 mm 3 mm 8.5 mm ZP3 New New ZP3 New ZP(Conventional model) ZP(Conventional model) New Space-saving 2 piping reduces working space!

D-DN This catalog is printed on recycled paper with concern for the global environment.