Symbol: 11 (Body Ported), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Bracket: 1 (Bracket)
Symbol: 11 (Body Ported), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Bracket: 1 (Bracket)
Symbol: 11 (Body Ported), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Bracket: 1 (Bracket)
Symbol: 11 (Body Ported), Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Bracket: 1 (Bracket)
Symbol: 11 (Body Ported), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Bracket: 1 (Bracket)
Flange Size: 100, Flange Type: D [K(DN)], Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy)
Cable Length for Handheld Terminal: 1m
Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Unit Specification: w/Unit Conversion Function, Stations: 1
Rated Distance Range: G (0.02 to 0.15mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Unit Specification: w/Unit Conversion Function, Stations: 1
Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Unit Specification: w/Unit Conversion Function, Stations: 1
Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy)
Flange Size: 100, Flange Type: D [K(DN)], Port Direction: Flange Side, Temperature: H0 (5 to 150°C, No Heater), Version: 1 (Legacy)
Flange Size: 160, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy)
Flange Size: 100, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy)
Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: 1
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 4 (Cassette Type Full MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)