1

5 9.5 8 7 8 6 CXS15 +0.016 +0.001 6 5.2 1.5 C0.5 5.5 25 0.1 M6 x 1.0 M5 x 0.8 5 3 +0.3 0 0 0.2 +0.2 0 +0.2 0 CXS20 10 10 9.5 2 7 11 10 8 9.5 8 0.05 0.15 +0.016 +0.001 8 6.2 2 C0.5 6.6 28 0.1 M8 x 1.25 M6 x 1.0 6 +0.2 0 +0.2 0 CXS25 0 0.2 12 12 11.5 2 7 11 12 8.5 9.5 10 0.05 0.15 +0.3 0 +0.019 +0.001 10 6.2 2 C0.7 6.6 35 0.1 M8 x 1.25 M6 x 1.0 6 +0.4 0 CXS32 +0.2 0 +0.2 0 +0.019 +0.001 0 0.2

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112

CXS

7 2-M3 x 0.5 with depth 5 M3 x 0.5 x 10 46 17 44 15 7.5 2-M4 x 0.7 35 20 4 8 20 6 33.6 8.5 7 30 M5 x 0.8 x 5 CXS10 2-4.3 through 2-8 counterbore with depth 4.4 4-M4 x 0.7 with depth 5 M5 x 0.8 x 10 2-M4 x 0.7 with depth 6 2-M5 x 0.8 with depth 8 38.5 58 20 56 18 9 2-M5 x 0.8 45 25 5 10 30 8 48 10 10 M6 x 1.0 x 5 CXS15 Strokes Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70,

CA2

(n 2) n = 2, 4, 6, 8 Different sides D-A44 n Same side 80 90 80 90 100 100 10 20 100 1 Different sides 2 Same side D-A3C D-G39C D-K39C 20 + 35(n 2) n = 2, 3, 4 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 Different sides n 100 + 100(n 2) n = 2, 3, 4 Same side 100 + 100 (n2), n = 2, 4, 6, 8 80 90 80 90 80 90 10 20 55 1 Different sides 2 Same side 20 + 35(n 2) n = 2, 3,

MHZ

M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 3 2 4 2.5 5 3.3 6.5 3.5 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 MHZ2-10-X51 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. 12-2-58 58 12-2-59 59 Parallel Style Air Gripper Long Stroke Type Series MHZL2 Size: 10, 16, 20, 25 How

MHZ

Weight (g) Model End boss type (Symbol) M K E W MHZ2-10 65 66 65 64 MHZ2-16 147 148 148 147 MHZ2-20 277 277 277 277 MHZ2-25 494 496 495 495 12-2-41 41 Parallel Style Air Gripper With Dust Cover Series MHZJ2 Size: 6, 10, 16, 20, 25 How to Order MHZJ2 16 F9BW D Number of auto switches Number of fingers Nil S 2 pcs. 1 pc. 2 2 fingers Bore size Auto switch Action 6 10 16 20 25 6 mm 10 mm 16 mm

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

2 to 20 stations D side: 2 to 10 stations U side: 2 to 10 stations M Mixed Nil Standard length (Specify a longer rail than the standard length.)

VFR

stations 1 2 1 2 1 Side 2 Bottom 10 10 stations M Mixed Common Common For bottom ported: Rc 3/8 only.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Usable range 10 CX 10 Usable range 5 5 D-X 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 20Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Data CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Usable range 10 5

Applicable Auto Switch Model

D-E8lA 2 wire 3 wire D-J7 11 50 11 55 3 wire 2 wire 13 57 9 49 D-Z7 D-Z8 Solid state switch D-F7 4 wire 3 wire 13 56 10 55 2 wire 1 D-J79C 13 52 9 50 3 wire color 10 53 D-Yl 2 wire 2 11 54 3 wire color 11 54 2 wire 14 53 D-M5 Solid state switch 3 wire 16 60 D-Y7BA 54 1 2 wire 6 31 color 3 wire 7 37 D-F9l 2 2 wire 7 32 color 3 wire 7 34 D-F9BA 37 5.3-75

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

14 8 173 162.5 143.5 15 9 185.5 175 154 16 10 198 187.5 164.5 17 L1 L2 L3 L4 L1 L2 L3 L4 396 Cassette Type Manifold 10-SZ3000 Dimensions: 10-SZ3000 for Non Plug-in Stations 10-SS5Z3-60D [With External Pilot Specifications] One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8, 5/16" 25 13.3 13.3 25 (Pitch) P = 10.5 16.2 16.2 17 36.7 34 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE

V

(ii) 2-10 Station Type 20 Mmanifold for use with the Body Ported Valve (Type 20). (iii) 2-10 Station Type 40 Side Entry Manifold for use with the Base Mounted Valve (Type 40). (iv) 2 10 Station Type 40 Bottom Entry Manifold for use with the Base Mounted Valve (Type 40).

VFS

Stations 2 stations 02 Symbol Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 Porting specifications (A, B) Passage EA, EB P 10 10 stations Symbol Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations 1 Side 2 Bottom Common Common Please indicate manifold base type, corresponding valve, and option parts.

MGP

b a X 0.02 c d X 6H7 e 7 (mm) e 22.5 30 Bore size (mm) 80 100 d 8 10 c 12 13.5 b 20.3 23.3 a 13.3 15.3 6H7 5 10 Section XX Section XX detail WB WA Z Section XX 4-MM depth ML Bottom view HA: T-slot for hexagon bolt 4-OA through L Z WA 4-NN through 4-OB depth of counter bore 8 Section XX X 0.02 X 0.02 DA VB VA R H U T X PW DB 6H7 depth 10 GC 6H7 depth 10 2-Rc 3/8 PB GB GA 2-Rc 3/8 Q 10 (Plug

C85

Same side Different sides Different sides 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-C7 D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7 50 15 10 50 + 45(n 2) D-C80 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF ) 10 + 35 (n = 2, 4...) ( n2 2 15 + 45 (n = 2, 4...) ( n 2 ) 2 10 5 65 15 10 65 + 50(n 2) D-F7V D-J79 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-J79C D-A79W 60 + 55(n 2) 60 15 10 D-F7W D-J79W ) 15 + 35 (n

REA/REB

50 30 20 20 Usable range 10 10 10 Usable range Usable range 5 5 5 1 0 1 2 3 4 5 6 10 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 1 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 80 REAR40 50 40 30 REAR32 REAR25 20 Load weight

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

B1 S + Stroke ZZ + Stroke Bore size (mm) Stroke range (mm) A B1 D E F AL C GA GB H KA NA P TA TC ZZ H1 MM S TB I J 20 25 32 40 50 63 12 14 18 25 30 32 18 22 22 30 35 35 15.5 13 17 17 19 27 27 14 9.2 2 2 2 2 2 2 Up to 200 Up to 300 Up to 300 12 12 12 13 14 14 10 10 10 10(13) 12(14) 12(14) 35 40 40 50 58 58 8 10 10 14 18 18 1/8 1/8 1/8 1/8 1/4 1/4 11 11 11 12 13 13 M5 x 0.8 M6 x 0.75 M8 x

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 1 5 1 0 1 10 CE compliant Series D-sub connector kit with cable (3 m) VQ1000 VQ2000 1 2 CE compliant Nil Q 10-VV5Q11-09C6FU2 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 2 setsValve part no. (Stations 7 to 8) 1 setBlanking plate part no.