VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

VQC

B 10B () (+) Station 10 (+) () COM Positive COM Negative COM 17 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 (L3) (L4) Indicator light L2 103 L1 Manual override P = 10.5 ( 12) 13 28 7 1.5 1.5 (5.5) 93.5 126 (35) 66 75 80 Approx. 2 2-G3/4 Conduit port Mounting hole for 4-M4 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-C8 3(R) port DIN rail clamp screw 77.7 18.7 7.7 40.5 25 9.5 2n-C3,

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Effective area (Cv) Max. operating frequency 0.8MPa 0.15MPa 5 to 50C 2.7mm2 (0.15) 180 c.p.m To CYL port SUP side pressure (P1) (1) Note 1) As per JISB8375-1981 (Supply pressure: 0.5MPa) Dimensions 21.5 (5) Valve Manifold 18 29 10.5 2n-C4, C6 C4: One-touch fitting ass'y for 4 2n-C4, C6 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 L1 L2 L3 C6: One-touch fitting ass'y

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Cable (Length) 0 1 2 3 Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) Connector entry direction U S Top entry Side entry 2-4-78 Body Ported Series VQ1000 Plug Lead Unit: Cassette Type 43.5 (M plug connector AC, Latching) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Side entry connector [-PS] 38.5

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 34 7.5 13 2-M4 clamp screw 9 EXH outlet Release for switching connector direction Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) D side U side Stations 1 2 3 4 5 6 7 8 n 9 C8: 3(R) port C8: 1(P) port For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 P 1 2 2 2 2 2 2 2 29.5 13 P = 11.5 58 43.5 2n-C3



.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2n-M5 x 0.8 Mounting hole P=31 Pressure gauge (Option) R(3) port: Rc 1/8, For 6 manifold stations or more, exhaust from the both sides.

Table of Contents

The lead wire entry is on D side (LD) in this case. 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Note) 3 position types need two stations.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with strain relief L3 U side D side Connector entry direction switch 6.6 (3.2) 101.2 (conforms to MIL-C-83503) 3.1 8 36.3 5.5 5.3 LOCK FREE Triangle mark 35 18 28.8 A B A B 47.6 A A A 58.2 DIN rail 6 Triangle mark position 7.9 Manual override 22 36.1 In case of locking type, turn

5 Port Solenoid Valve

1 2 3 n (22.5) 0.5 DIN rail clamping screw 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting assembly C4: 4 one-touch fitting assembly C6: 6 one-touch fitting assembly M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting assembly C4: 4 one-touch fitting assembly C6: 6 one-touch fitting assembly M5: M5 thread (43) 2.5 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum

Compact

1 1 2N q w e r t y u i o !

5 Port Solenoid Valve Series VQZ1000/2000/3000

29.5 VQC (17.5) 38 U side D side Stations 1 2 3 n (43) 2.5 (22.5) 0.5 VQZ 2n x M5 x 0.8 2n x one-touch fitting assembly (A, B port) Applicable tubing O.D.: 3.2, 4, 6 2n x M5 x 0.8 2n x one-touch fitting assembly (A, B port) Applicable tubing O.D.: 3.2, 4, 6 45.5 2.5 SQ 10.5 (5) Formula L1 = 11n + 20 n: Station (Maximum 24 stations) 21.5 Dimensions VFS L n 1 7.5 2 3 4 5 6 7 8 11 9 10 12 29

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

)1-(port size) 2.58(65.5) 1.73 t 1.73 (49.5) 1.95 (14.5)0.57 1(44) (44)\ J"i"i":;;:;: 3: 0.~)~9)~ 0.59(15) V4,3faNPTF 2n ports Pilot operator ma:::.

5 Port Solenoid Valve

2 B 2 B 2 B 2 B 2 B 2 77.3 11.5 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 11.5 12 1/8" External pilot port 15.7 27.9 33.5 1/8" PE. port 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 37.5 45.2

Bottom ported 34.5 47.7 P 1 R 3 3 R X 12 P = 25 65.5 U side n PE B 2 A 4 3 SMC A B B 2 A 4 2 SMC A B A 4 B 2 1 SMC A B Stations PE D side P 1 12 X 2n

VZS

.: 6 C6 3-7-19 20 Series VZS2000 Plug-in type, Non plug-in type Manifold with Control Unit Plug-in base type: VV5ZS2-51FStation 1Port size Classification of control unit Example for manifold Individual EXH spacer 2n-Rc 1/8, C4, C6 (Mounting hole) Double check spacer U side (n) Individual SUP spacer (Manual override) (1) (2) Control unit Stations Pressure unit Air release valve Air filter

E-P HYREG ® Series VY1 1

Individual external pilot port: P1 M5 (VY1B01-00 only) 2-5.5 Mounting hole Blanking plate Common external pilot port: See Note for P1. 2-M5 (VVEXB-2-2n-01 only) R port: 2-Rc 1/8 Exhaust from the both sides for 6 stations or more. P port: 2-Rc 1/8 Pressurize from the both sides for 6 stations or more.

SQ1000/2000

BS+ BDH BSFG 24V 0V COMM BDL (108.5) Approx. 10 101 68 34 10 4.6 A A B A B A A 2.PUSH 2.PUSH 1.TURN 1.TURN B 28 5.5 35 74.5 ADDRESS No. 13 2-M4 clamp screw EXH outlet Approx. 9 1.5 D side U side Stations 1 2 3 4 5 6 7 8 n Approx. 9 C8: EXH port For top ported C8: SUP port 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 81.5 67 2n-C3, C4, C6, M5 (A, B port) C3:

AW

Example) AW30-03BG-2N-X425 For high pressure Symbol Body size Description 20 30 40 60 Nil N F Thread type Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 2) H Mounting a Without mounting option With bracket With set nut (for panel fitting) Note 1) Semi-standard Option + Without pressure gauge Round type pressure gauge (with limit indicator) Nil G Note 3) Pressure

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Then, supply air and confirm that there is no air leakage before operating. 23 Series SZ3000 Dimensions/SZ3000: Non-plug-in Stations SS5Z3-60 U Scale: 37% [With external pilot] 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 24 13.3 (Pitch) P = 10.5 13.3 24 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE 2 B 2 B 2 B 2 R 3 R 3 P 1 P 1 A 4 A 4 A 4 A 4 A 4 A

Gun Type Ionizer

Modularized digital flow switch, regulator, ON/OFF valve, restrictor, and filter SFD Series LLB Series LLB4 LLB3 * Please contact SMC for clean room compatible ionizers. Related Products Polyurethane Coil Tubing S Couplers Finger Valve Flexible Max. operating pressure: 0.8 MPa (at 20C) For moving applications * Colors other than black are available as made-to-order specifications.

E-P HYREG ® Series VY1

Individual external pilot port: P1 M5 (VY1B01-00 only) 2-5.5 Mounting hole Blanking plate Common external pilot port: See Note for P1. 2-M5 (VVEXB-2-2n-01 only) R port: 2-Rc 1/8 Exhaust from the both sides for 6 stations or more. P port: 2-Rc 1/8 Pressurize from the both sides for 6 stations or more.