5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 34 7.5 13 2-M4 clamp screw 9 EXH outlet Release for switching connector direction Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) D side U side Stations 1 2 3 4 5 6 7 8 n 9 C8: 3(R) port C8: 1(P) port For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 P 1 2 2 2 2 2 2 2 29.5 13 P = 11.5 58 43.5 2n-C3



.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2n-M5 x 0.8 Mounting hole P=31 Pressure gauge (Option) R(3) port: Rc 1/8, For 6 manifold stations or more, exhaust from the both sides.

Table of Contents

The lead wire entry is on D side (LD) in this case. 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Note) 3 position types need two stations.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with strain relief L3 U side D side Connector entry direction switch 6.6 (3.2) 101.2 (conforms to MIL-C-83503) 3.1 8 36.3 5.5 5.3 LOCK FREE Triangle mark 35 18 28.8 A B A B 47.6 A A A 58.2 DIN rail 6 Triangle mark position 7.9 Manual override 22 36.1 In case of locking type, turn

5 Port Solenoid Valve

1 2 3 n (22.5) 0.5 DIN rail clamping screw 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting assembly C4: 4 one-touch fitting assembly C6: 6 one-touch fitting assembly M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting assembly C4: 4 one-touch fitting assembly C6: 6 one-touch fitting assembly M5: M5 thread (43) 2.5 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum

Compact

1 1 2N q w e r t y u i o !

5 Port Solenoid Valve Series VQZ1000/2000/3000

29.5 VQC (17.5) 38 U side D side Stations 1 2 3 n (43) 2.5 (22.5) 0.5 VQZ 2n x M5 x 0.8 2n x one-touch fitting assembly (A, B port) Applicable tubing O.D.: 3.2, 4, 6 2n x M5 x 0.8 2n x one-touch fitting assembly (A, B port) Applicable tubing O.D.: 3.2, 4, 6 45.5 2.5 SQ 10.5 (5) Formula L1 = 11n + 20 n: Station (Maximum 24 stations) 21.5 Dimensions VFS L n 1 7.5 2 3 4 5 6 7 8 11 9 10 12 29

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

)1-(port size) 2.58(65.5) 1.73 t 1.73 (49.5) 1.95 (14.5)0.57 1(44) (44)\ J"i"i":;;:;: 3: 0.~)~9)~ 0.59(15) V4,3faNPTF 2n ports Pilot operator ma:::.

5 Port Solenoid Valve

2 B 2 B 2 B 2 B 2 B 2 77.3 11.5 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 11.5 12 1/8" External pilot port 15.7 27.9 33.5 1/8" PE. port 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 37.5 45.2

Bottom ported 34.5 47.7 P 1 R 3 3 R X 12 P = 25 65.5 U side n PE B 2 A 4 3 SMC A B B 2 A 4 2 SMC A B A 4 B 2 1 SMC A B Stations PE D side P 1 12 X 2n

VZS

.: 6 C6 3-7-19 20 Series VZS2000 Plug-in type, Non plug-in type Manifold with Control Unit Plug-in base type: VV5ZS2-51FStation 1Port size Classification of control unit Example for manifold Individual EXH spacer 2n-Rc 1/8, C4, C6 (Mounting hole) Double check spacer U side (n) Individual SUP spacer (Manual override) (1) (2) Control unit Stations Pressure unit Air release valve Air filter

E-P HYREG ® Series VY1 1

Individual external pilot port: P1 M5 (VY1B01-00 only) 2-5.5 Mounting hole Blanking plate Common external pilot port: See Note for P1. 2-M5 (VVEXB-2-2n-01 only) R port: 2-Rc 1/8 Exhaust from the both sides for 6 stations or more. P port: 2-Rc 1/8 Pressurize from the both sides for 6 stations or more.

SQ1000/2000

BS+ BDH BSFG 24V 0V COMM BDL (108.5) Approx. 10 101 68 34 10 4.6 A A B A B A A 2.PUSH 2.PUSH 1.TURN 1.TURN B 28 5.5 35 74.5 ADDRESS No. 13 2-M4 clamp screw EXH outlet Approx. 9 1.5 D side U side Stations 1 2 3 4 5 6 7 8 n Approx. 9 C8: EXH port For top ported C8: SUP port 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 81.5 67 2n-C3, C4, C6, M5 (A, B port) C3:

AW

Example) AW30-03BG-2N-X425 For high pressure Symbol Body size Description 20 30 40 60 Nil N F Thread type Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 2) H Mounting a Without mounting option With bracket With set nut (for panel fitting) Note 1) Semi-standard Option + Without pressure gauge Round type pressure gauge (with limit indicator) Nil G Note 3) Pressure

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Then, supply air and confirm that there is no air leakage before operating. 23 Series SZ3000 Dimensions/SZ3000: Non-plug-in Stations SS5Z3-60 U Scale: 37% [With external pilot] 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 24 13.3 (Pitch) P = 10.5 13.3 24 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE 2 B 2 B 2 B 2 R 3 R 3 P 1 P 1 A 4 A 4 A 4 A 4 A 4 A

Gun Type Ionizer

Modularized digital flow switch, regulator, ON/OFF valve, restrictor, and filter SFD Series LLB Series LLB4 LLB3 * Please contact SMC for clean room compatible ionizers. Related Products Polyurethane Coil Tubing S Couplers Finger Valve Flexible Max. operating pressure: 0.8 MPa (at 20C) For moving applications * Colors other than black are available as made-to-order specifications.

E-P HYREG ® Series VY1

Individual external pilot port: P1 M5 (VY1B01-00 only) 2-5.5 Mounting hole Blanking plate Common external pilot port: See Note for P1. 2-M5 (VVEXB-2-2n-01 only) R port: 2-Rc 1/8 Exhaust from the both sides for 6 stations or more. P port: 2-Rc 1/8 Pressurize from the both sides for 6 stations or more.

Intrinsically Safe Valve

85.5 (E-type) Stations 37 (Lead wire length) 19.1 L 180.8 M5 x 0.8 (Pilot EXH port) Manual override 4 x 4.5 (Mounting hole) 125.6 42.2 EB P EA A A A A X PE 26.6 26 21 21 1.9 79.6 21 73 42 B B B B 11.1 31.5 6 x 1/4" {P(1), EA(5), EB(3) port} 55.2 M5 x 0.8 (External pilot port) 21 (Pitch) P = 19 Stations 1 n 2 81.5 56.2 52.8 A A 9.4 41 28.9 B B 7 2n

SZ3000

Then, supply air and confirm that there is no air leakage before operating. 19 Series SZ3000 Dimensions/SZ3000: Non-plug-in Stations SS5Z3-60 U Scale: 37% [With external pilot] 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 24 13.3 (Pitch) P= 10.5 13.3 24 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE 2 B 2 B 2 B 2 R 3 R 3 P 1 P 1 A 4 A 4 A 4 A 4 A 4 A 4

Valve Single Unit

(Mounting hole) SV SZ SY SYJ SX (Pitch) 2-M5 x 0.8 (External pilot port) 6-Rc 1/4 (P , EA, EB port) Stations (1) (2) (n) Rc 1/4 2n One-touch fittings (Pitch) (Pitch) (A, B port) Applicable tubing O.D.: 10 (A, B port) L plug connector (L) M plug connector (M) (Lead wire length) 300 300 (Lead wire length) 141.1 (3 position) 128.6 (3 position) 2 stations 61 49 20 stations 403 391 3 80 68 4

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

= 46 x n + 89 L2 = 46 x n + 59 2 181 151 3 227 197 4 273 243 5 319 289 6 365 335 7 411 381 8 457 427 9 503 473 10 549 519 L L1 L2 1445 VT317 Series Dimensions: Individual Exhaust Without mounting bracket/VV317-02-3-02 2 x 7 mounting hole Manual override (Non-locking) (Station 1) (Station n) Conduit (C) DIN terminal facing upward (136.6) Conduit terminal (T) Grommet (G) DIN terminal (D) 2n