Series 10-SV ® EX500 Decentralized Serial Wiring

1/4 Rc 3/8 G 1/4 G 3/8 Mixed 8 One-touch fitting 5/16" One-touch fitting 10-SV1000 10-SV1000 10 One-touch fitting 3/8" One-touch fitting 10-SV2000 10-SV2000 12 One-touch fitting 3/8" One-touch fitting 10-SV3000 10-SV3000 3/8" One-touch fitting 12 One-touch fitting 10-SV4000 NPT 3/8 10-SV4000 Rc 3/8 NPTF 3/8 G 3/8 For mixed specifications (M), indicate separately on the manifold specification

Miniature Regulator ARJ310 Series

(kg) Model Port size IN Model OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R1/8, M5 x 0.8 NPT1/8, M5 x 0.8 Rc 1/8 Symbol NPT 1/8 4 One-touch fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

ASP

Metric size Inch size 06 08 10 12 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Universal Port size Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

(Example) CDLQL32-30D-B Nil TN TF Rc,M (20, 25) NPT G Cylinder stroke (mm) For Standard strokes and Manufacture of Intermediate of Stroke, refer to page 817. Applicable Auto Switch/Refer to pages 1719 to 1827 for detailed specifications of auto switches.

Thermo-chiller

Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series How to Order HRL A 20 100 Power supply Cooling capacity CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Cooling method A Air-cooled refrigeration Specications

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specications Model HRS090-Al-20-l HRS090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.15 Control method PID control Ambient temperature1 C

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series RoHS How to Order 100 A 20 HRS Option Cooling capacity 100 10 kW 150 15 kW Cooling method Nil None A With caster adjuster-foot B With earth leakage breaker B1 With earth leakage breaker with handle K Note) With uid ll port A Air-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT

Process Pump: Automatically Operated Type (Internal Switching Type) Air Operated Type (External Switching Type) PAF3000 Series

LQ3 13 1319 1913 19 4 Symbol 4 5 5 4 Thread type Note 2) AIR SUP FLUID OUT 5 Symbol Nil N F Type Rc NPT G Refer to page 600 for the compatible fittings. AIR EXH FLUID IN Automatically operated type Note 1) The port size of the pilot port is as follows. Automatically operated type is 1/4"; Air operated type is 1/8".

Process Pump (Diaphragm Pump) Body Wetted Parts: Polypropylene/Stainless Steel Built-in Solenoid Valve/Air Operated (External switching type) PB1000A Series

None Liquid contact seals SF7000 With bracket which is interchangeable with previous type Thread type Type Rc NPT G Only PB1013A, air-operated type is available to be made to order.

Thermo-chiller

Power supply Nil Rc F G (With Rc-G conversion tting) N NPT (With Rc-NPT conversion tting) 46 3-phase 460 VAC (60 Hz) Specications 1 When the ambient temperature or circulating fluid temperature is 10C or below, refer to "Operation at low ambient temperature or low circulating uid temperature" (page 14). 2 Use uid in condition below as the circulating uid.

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) When multiple options are combined, indicate symbols in alphabetical order.

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) When multiple options are combined, indicate symbols in alphabetical order.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

MXW Non-rotating accuracy Rc 1/8 M5 x 0.8 Rc 1/8 M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 MXJ Symbol Specifications Piping port size NPT 1/8 NPT 1/8 XC8 Adjustable stroke cylinder/Adjustable extention type G 1/8 G 1/8 MXP XC38 Vacuum (Rod through-hole) Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

RLQ

None (Emergency stop) Port thread type Rc NPT G Nil TN TF Cylinder stroke (mm) Refer to Standard Stroke on page 845. Body option Nil M Standard (Rod end female thread) Rod end male thread Built-in Magnet Cylinder Model The right and left indicate the piping directions viewed from the front.

Clean Regulator/Fluororesin Type SRF Series

Applicable model SRF10 SRF30 SRF50 Tubing size 1/4" 3/8" 3/4" Symbol 07 11 19 Pilot port thread type Nil N Rc 1/8 NPT 1/8 878

Electro-Pneumatic Proportional Valve Series VEF/VEP

Model Flow type Pressure type VEF2141 VEF3141 VEF2131 VEP3121 VEP3141 VEF2121 VEF3121 Item 4 1 8 3 , 4 1 8 3 , 4 1 , 8 3 2 1 8 3 , 2 1 4 3 , 8 3 , 2 1 4 3 , Port size Rc , Air Fluid 1.0 MPa 0 to 50C (With no condensation) Maximum operating pressure Ambient and fluid temperature 0.03 s or less 0.03 s or less 0.05 s or less Response time 0.05 s or less Hysteresis 3% F .S. 3% F .S.

VXH

1/4 Rc 3/8 Rc 1/2 With light/surge voltage suppressor Z Refer to the table (1) given below for availability.

6/Rc 1 8?6/Rc 1 8?6/Rc 1 8

6/Rc 1 8?6/Rc 1 8?6/Rc 1 8

6/Rc 1 8?6/Rc 1 8?6/Rc 1 8