FGD-E

FGD-KT002 FGDE Nut kit FGD-KT003 FGDT FGD-KT004 FGDF FGD-CV005-03 FGDT,F-03 FGD-CV005-04 FGDT,F-04 FGD-CV005-06 FGDT,F-06 Replacement cover (5) FGD-CV006-03 FGDC,E-03 FGD-CV006-04 FGDC,E-04 FGD-CV006-06 FGDC,E-06 Joint FGD-OP001 FGDB (10) KT-FGDC FGDC Each of (2)(4)(6)(13) and (16) are provided as a kit.

Precision Regulator

Setting spring Setting knob Flapper Diaphragm C Nozzle Diaphragm A Fixed orifice Diaphragm C SUP.side passage BLEED Exhaust valve SUP OUT Main valve Valve guide Exhaust F i x ed ori f i ce S UP F or ce N F o rce N Nozzle flapper MPa/ m Diaph.(C) m 2 Main valve MPa/ m (S) 1 1 Setting spring N/m Displ Press Press.

Fieldbus Device Handheld Terminal

Explanation of screen a) Error log number b) Manifold number/Unit number (Refer to page 16) c) Channel number d) Displayed unit symbol (Refer to page 52) e) The next error log is displayed with the and buttons. f) h: hour, m: minute, s: second The time elapsed from when the power supply was applied until the time when error was generated is displayed.

ATX-OM-F004E

HAA7 to HAA22 HAA37 Dustproof filter Tapping screw 6-nominal 4 Rear panel Rear panel Dustproof filter Tapping screw 6-nominal 4 Dustproof filter replacement part number Applicable model HAA7 HAA15 HAA22 HAA37 Dustproof filter number HAA7-F HAA15-F HAA22-F HAA37-F HAA Series 14 9 4)Dustproof filter Assembly Procedure (Option Symbol: F) ATX-OM-F004E Air-Cooled Aftercooler 10.

CEx-OMP0016

Place where atmosphere containing con-ductive powder such as dust and iron chips, oil mist, salt, or organic solvent, or splashing cutting chips, dust and cutting oil (water , liquid) over the products. f. Place where the products are exposed to direct sunlight or radiated heat. g.

Vacuum Unit Ejector / Vacuum Pump System

Is E or F: For pressure switch for vacuum ,lead wire with connector (Length 2m) for pressure switch for vacuum G When 1.

Vacuum Unit Ejector / Vacuum Pump System

Note 7) Select F or H for (1) System/Body Type for the single unit model. -13No. ZK2-OM00201 (4) Wiring Note 8) Symbol Type L Individual wiring Note 9) F D-sub connector (25 pins) Note 10) P Flat ribbon cable connector (26 pins) Note 10) N No wiring (No valve) Note 8) Common wiring is available only solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MY1 3.4-11 End Lock Cylinder Series CBA1 40, 50, 63, 80, 100 How to Order L 50 150 H N CBA1 Standard L 50 150 A53 H N CDBA1 With auto switch Number of auto switches Air cylinder with auto switch 2 1 n S n Mounting Basic Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Style Auto switch Lube Non-lube Steel tube N F Without auto switch Refer

CG1

B6, D-B59W Refer to p.5.4-1 for made to order products of series CG1 D-H7, D-H7W, D-H7F D-H7BAL, D-H7C, D-G5/K5 D-G5W/K59W, D-G59F, D-G5NTL Solid state switch 1.6-1 Standard: Double Acting Single Rod Series CG1 20, 25, 32, 40, 50, 63, 80, 100 How to Order 100 L 25 N CG1 Standard N 25 B53 L 100 CDG1 With auto switch Number of auto switches S n With auto switch (magnet) 2 1 n Mounting B L F

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

CJP Rear trunnion Integrated clevis Boss-cut basic Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion T E BZ B L F G C D U CJ2 F Low friction direction Boss-cut front flange FZ CM2 Side at pressure When pressurized on head side Boss-cut front trunnion B Side at pressure When pressurized on rod side UZ C85 CG1 L 40 150 CM2Q F Standard MB C95 CDM2Q L F 40 C73

2–4

-RA Both ends tapped (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33 7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

Dedicated Controller

F H L 6mm 10mm 20mm Note) The following options are necessary for operating and setting the controller. LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Air Fittings & Tubing

F (inch) Part No.

3 Port Solenoid Valve Rubber Seal Series SY100 1

1 2 M plug connector (M): SY1 3(A)-M-PM3(-F) 1 2 + (Light/Surge voltage suppressor) 18.4 32 300 (Lead wire length) 22.4 (for DC) 39.1 (For DC) 300 (Lead wire length) 23.7 (for AC) (Light/Surge voltage suppressor) + 45.6 (For AC) 15.6 A A Other dimensions are same as grommet type.

2/3 Port Valve for Various

#5 " 0"8 1 E F 4 " 4 % " 4 4 4 4 7 %1 % 3 VXA212-00 VXA213-00 VXA223-00 VXA224-00 = < .G < < * 4.5 . >< * < * 6 < * $ /H"3 % .''< " % " Operating Fluid and Ambient Temperature % " ?# ! ?# " 4 4 * )< > )< > > )< )< " $ 8 @ )

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

How to Order G 3 0 01 06 AS 2 F S With seal Speed controller In the case of M5, seal is inapplicable to the product. Conforms to Food Sanitation Laws (Material of the component parts meets the apparatus and container packaging standards.)

Compact Cylinder/Guide Rod Type Series CQM

2 x RA 2 x 2 x OA CQS Both ends tapped (CQMA) CQ2 RQ (mm) CQM Without auto switch With auto switch Bore size (mm) Stroke range (mm) P P EA EB EC MU A B F Q A B F Q TN TF TN TF 5 5.5 11.5 M5 x 0.8 40 23 32 10 to 50 50 33 7.5 10.5 45 43 34.4 Rc 1/8 NPT 1/8 G 1/8 7.5 10.5 G 1/8 Rc 1/8 NPT 1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc 1/8 NPT 1/8 G 1/8 8 11 G 1/8 56.5 39.5 8 11 52 50 41.4 Rc

T

(mm) Fitting size D 3.2 4 Weight g A B C E F Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Component Parts Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 15-6-29 6 Miniature Tubing and Miniature Fittings Specific Product Precautions

Electro-pneumatic Proportional Valve Series VEF/VEP 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.03 s or less 0.03 s or less 0.05 s or less 0.05 s or less Response time Hysteresis 3% F .S. IR Repeatability 3% F .S. VEX Sensitivity 0.5% F .S.