XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

REA/REB

Dynamic moment We = 5 x 10-3WgU = 5 x 10-319.8300 = 15 [N ] Me3 = 1/3We(L2-A) = 1/3150.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 Me3 Guide central axis We W L2 Review Me3.

MY1

F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

L3 Common SUP, Individual EXH/Top Ported Type 21 Manifold Grommet: G DIN terminal: D Manual override (Non-locking) 2-Rc 1/8 1(P) port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

VCW

(mm) n (stations) Dimensions Model 2 3 4 5 6 7 8 9 10 L1 69 103.5 138 172.5 207 241.5 276 310.5 345 L2 VV2CW2 81 115.5 150 184.5 219 253.5 288 322.5 357 L3 93 127.5 162 196.5 231 265.5 300 334.5 369 L1 77 115.5 154 192.5 231 269.5 308 346.5 385 L2 VV2CW3 89 127.5 166 204.5 243 281.5 320 358.5 397 L3 101 139.5 178 216.5 255 293.5 332 370.5 409 L1 83 124.5 166 207.5 249 290.5 332 373.5 415

VCW

196.5 300 369 L1 77 115.5 154 231 346.5 269.5 192.5 308 385 VV2CW3 L2 89 127.5 166 243 358.5 281.5 204.5 320 397 L3 101 139.5 178 255 370.5 293.5 216.5 332 409 L1 83 124.5 166 249 373.5 290.5 207.5 332 415 VV2CW4 L2 95 136.5 178 261 385.5 302.5 219.5 344 427 L3 107 148.5 190 273 397.5 314.5 231.5 356 439 Manifold composition 2stns. x 1 3stns. x 1 2stns. x 2 3stns. x 2 3stns. x 3 2stns. x

VKF300

Direct Operated Poppet Series VKF300 Dimensions/Manifolds Body Ported Type Common SUP, Common EXH/Top Ported Type 20 Manifold Grommet: G DIN terminal: D 4-Rc(PT) 1/8 (ports P, R) Manual override (non-locking) Applicable cord O.D. 4 to 6.5 Max .10 71.5 78.5 71 Light (DZ type only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2

VQ

VQZ Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L3 L4 2.10-14 VQZ100/200/300 Body Ported Dimensions: VQZ200 Station VV3QZ22C (5.5) (35) 2-4.5 Mounting holes (11) 26 Grommet (G) n-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (7.5) DIN rail clamp screw 18 0.5 U side n 5 Manual override Manual override SY A SMC SMC SMC SMC 4 (L4) (L3) L1 SYJ 2 L2 A 3 2 A VK 2 P=16 2 A 1 VZ 2 19 Stations VT 5.5 D side

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4) P=10.5 13.5 (L3) 3 L2

REA/REB

Dynamic moment RB Me3 Guide central axis J L2 We W Examine Me3.

VCW

162 231 334.5 265.5 196.5 300 369 L1 77 115.5 154 231 346.5 269.5 192.5 308 385 VV2CW3 L2 89 127.5 166 243 358.5 281.5 204.5 320 397 L3 101 139.5 178 255 370.5 293.5 216.5 332 409 L1 83 124.5 166 249 373.5 290.5 207.5 332 415 VV2CW4 L2 95 136.5 178 261 385.5 302.5 219.5 344 427 L3 107 148.5 190 273 397.5 314.5 231.5 356 439 Manifold composition 2stns. x 1 3stns. x 1 2stns. x 2 3stns. x 2

KR

Spatter Cover 2: KR (Applicable tube: FR soft nylon, FR double layer) Applicable fitting size Model Installed L1 L2 D KR-08C1 KR-06C1 6 12.8 15 18 20 KR-10C1 KR-12C1 18 13.7 20 15.7 22 17.2 22 17.2 8 10 12 One-touch fitting How to install One-touch fitting Construction of spatter cover Install with matching A and B parts. 15-3-5

KB

Removal is complete. 15-2-112 Piping Module Series KB Air Output Port 1 Elbow Module: KBV Applicable tubing O.D. 4 Weight (g) D1 D2 D3 L1 L2 A M L3 L4 Model KBV1-04 KBV1-06 KBV2-06 KBV2-08 KBV3-08 KBV3-10 KBV3-12 KBV4-12 KBV4-16 16.8 22.0 24.0 25.0 28.5 29.5 31.5 34.0 35.0 39.0 4.3 4.9 7.3 8.3 15.0 17.5 19.3 20.2 36.4 10.4 13.6 16.0 19.5 33.0 10.4 13.0 6 12.8 17.0 17.6 22.5 36.0 10.1 15.5

Sine Rodless Cylinder Series REA/REB

Dynamic moment Me3 Guide central axis L2 We W Examine Me3.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Direct Operated Poppet Series VKF300 Dimensions/Manifolds Body Ported Type Common SUP, Common EXH/Top Ported Type 20 Manifold Grommet: G DIN terminal: D 4-Rc(PT) 1/8 (ports P, R) Manual override (non-locking) Applicable cord O.D. 4 to 6.5 Max .10 71.5 78.5 71 Light (DZ type only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2

Residual Pressure Release Valve

pressure release push button (Red) VCHC D With One-touch fitting without a push button guard Release button (Blue) Release button (Blue) ASR ASQ D L1 Q B A D 8 4.2 Applicable tubing W (mm) M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M KEB06 KEB08 KEB10 KEB12 12.8 15.2 18.5 20.9 25 27 27.7 29 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

L3 L4 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Max.