Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Stations 141.5 L n 1 Formula 2 3 4 5 6 7 8 9 10 121 5 1 12 14 PA PB 107 L1 = 43n + 64 150 193 236 279 322 365 408 451 494 L1 4-1/8 12, 14 port 3 R 65 119 L2 = 43n + 76 162 205 248 291 334 377 420 463 506 L2 54 R 39 21 R2 R1 17 17 6-3/8 1, 3, 5 port 26.5 26.5 3-11-7 8 Series EVS7Dimensions EVS7-8-FG-S-M0 174.5 103 174.5 49 (64) 49(64) 103 71.5 31 (42) 31 (42) 2-8 mounting hole 56 56 1 3 5

VFM300

Green Thread VA Y Yellow G(PF) Rc(PT) F T N NPTF NPT SA Body option Internal pilot style 1 0 External pilot style VA Construction VM/VR VH Non-actuated Actuated Component Parts !

MXU

Expression of Calculation of Allowable Fp, Fy, Fr Pitch moment Yaw moment Roll moment Fp = Lp x Cp x (St/12) (N) Fy = Lr x Cy (N) Fy = Ly x Cy x (St/12) (N) Lp: Distance between table and loading point (mm) Cp: Correction value of moment center position distance (mm) St: Stroke (mm) Ly: Distance between table and loading point (mm) Cy: Correction value of moment center position distance (

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Micro Mist Separator Series AFD20/30/40

Drain M5 x 0.8 AFD30/40 Maintenance Float type auto-drain Warning 1. Replace the element every 2 years or when the pressure drops becomes 0.1 MPa, whichever comes first, to prevent damage to the element. OUT IN N.C. N.O. q r w Design Caution 1. Design the system so that the mist separator is installed in a pulsation-free location.

Mist Separator Series AFM20/30/40

Note 3) When N is specified in the end of part number of auto-drain, applicable tubeing O.D should be 3/8". 14-2-40 Mist Separator Series AFM20/30/40 Flow Characteristics (Representative values) : When saturated with oil : Initial state AFM20 AFM30 AFM40 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) F.R.L.

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

S 1 pc. n n pcs. Bore size 12 12 mm 40 40 mm 16 16 mm 50 50 mm 20 20 mm 63 63 mm 25 25 mm 80 80 mm 32 32 mm 100 100 mm Auto switch Nil Without auto switch (Built-in magnet) *: For applicable auto switches, refer to the table below.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

"n" pcs. Nil S n Nil Without auto switch (with built-in magnet) Microspeed cylinder Select auto switch model number from the table below. Auto switches are not mounted, but rather packaged together with the cylinder for shipment.

Compact Hydraulic Cylinder Series CH
KGB

Compact Hydraulic Cylinder Series CHKGB 20, 25, 32, 40, 50, 63, 80, 100 16MPa How to Order CHKGB 32 30 32 30 Z73 CHDKGB With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc. "n" pcs.

1

30 30 66 30 11 20 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5 48.5 52.5 99.5 50.5 68.5 XSA2-2P(N) 36 36 79 35 14 22 10 1/4 24 29.5 68.5 32.5 55 50 62.5 25.5 68.5 67 60.5 55 102 62.5 71 XSA3-3P(N) 40 40 88 40 16.5 24.5 3/8 29 32 77.5 35 64 52.5 71.5 28 77.5 69.5 69.5 57.5 104.5 71.5 73.5 6 XSA Series Special Option/Replacement Parts Special Option Special Electrical Entry Direction 2 1

CUJ

Without Auto Switch With Auto Switch Proper tightening torque (Nm) 0.54 Bolt M2.5 x 0.45 CUJB4 C(D)UJB6 C(D)UJB8 C(D)UJB10 10 0.5 1.06 M3 x 0.5 10 0.4 0.4 Allowable lateral load W (N) Allowable lateral load W (N) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 0.3

KB

X 0.8 M6 X 1 M5 X 0.8 M6 X 1 H (Hex.)

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

: M5 x 0.8 0XY: M6 x 1.0 771

Low torque Metal seal type Rotary joint Series MQR

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Model Selection 1

M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

A 24 M5 thread, depth 8 With or without insert depending on base material. 32 A' Coding stud M5 x 10 DIN913-45H 12 2 8 M5 Drive flange face G1/4 DIN/ISO228/1 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 1.5 IP 3 IW 1301 AW The solenoid valve can be attached with 2 mounting bolts.

Process Pump (Diaphragm Pump) Body Wetted Parts: Polypropylene/Stainless Steel Built-in Solenoid Valve/Air Operated (External switching type) PB1000A Series

Symbol Nil N F Option Option Symbol Applicable actuation Built-in solenoid valve Air Operated PB1013A Air operated Port size Port size 1/8 Nil B N None With foot With silencer Symbol 01 When option is more than one, suffix in alphabetical order.

Series CXS 10-/11-/12- ø6, ø10, ø15, ø20, ø25, ø32 21-/22- Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series Relief type Vacuum suction type Relief type (with specially treated sliding parts) CXSM, CXSL CXSM, CXSL CXSL 10 11 12 Dual rod cylinder 10 CXS M 15 30 Y59A 21 CXS L 15 30 Y59A Number of auto switches Bearing type Ball bushing bearing Slide bearing Nil S n L M 2 pcs. 1 pc. n pcs.

ZB-OM00301

M5 Q1 +COM N.C.