PA3000/5000/PAX1000

to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature

VVXA21/22

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

Series PF2W Digital Flow Switch For Water

Nil C Thread type Nil N F Rc NPT G The cable and connector are shipped unassembled. Lead wire (Refer to page 322.)

( C)(MPa)(A)(kg)HRZ010-W2SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water, Deionozed water10 to 609(at 20 C)2.5 (at 20 C)?

( C)(MPa)(A)(kg)HRZ010-W2SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water, Deionozed water10 to 609(at 20 C)2.5 (at 20 C)?

Compact Cylinder/Standard Type: Double Acting, Single Rod Series CQ2

For installation and removal, use an appropriate pair of pliers (tool for installing a C retaining ring). 2. Even if a proper plier (tool for installing a C retaining ring) is used, it is likely to inflict damage to a human body or peripheral equipment, as a retaining ring may be flown out of the tip of a plier (tool for installing a C retaining ring).

( C)(MPa)(A)(kg)HRZ010-W2SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water, Deionozed water10 to 609(at 20 C)2.5 (at 20 C)?

HT20020 to 908.0 (at 20 C)3.0 (at 20 C)?0.10.45/0.65 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.713/14Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

HT20020 to 908.0 (at 20 C)3.0 (at 20 C)?0.10.45/0.65 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.713/14Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

20 to 9010(at 20 C)4.5 (at 20 C)?

20 to 9010(at 20 C)4.5 (at 20 C)?

( C)(MPa)(A)(kg)HRZ010-W2SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water, Deionozed water10 to 609(at 20 C)2.5 (at 20 C)?

( C)(MPa)(A)(kg)HRZ010-W2SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water, Deionozed water10 to 609(at 20 C)2.5 (at 20 C)?

range ( C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ008-H1Water-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHAqueous solution of 60% ethylene glycol20 to 908.0 (at 20 C)3.0 (at 20 C)?

20 to 908.0 (at 20 C)3.3 (at 20 C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.713/14Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10 C)2.5(at ?10 C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.75/5Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10 C)2.9(at ?10 C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

20 to 908.0 (at 20 C)3.3 (at 20 C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.713/14Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

20 to 9010(at 20 C)4.5 (at 20 C)?

20 to 9010(at 20 C)4.5 (at 20 C)?