ZPT/ZPX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Replacement Parts/Mounting Nut How to Order Dimensions d ZPNA M16 Mounting thread (mm) Model A 19 SN-015A d M14 x 1 22 ZPNA-M16 25.4 M16 x 1.5 B 21.9 H 5 6 9 8 M22 x 1.5 M16 M16 x 1.5 B M18 M18 x 1.5 M22 M22 x 1.5 27
For manifold type 31, S31, 32, S32 Body option 5 port 0: Pilot valve individual exhaust for the pilot valve 3: Common exhaust type for main and pilot valve (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 R port P, E port R port P, E port Electrical entry 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24, 12, 6,
Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series
. 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDF60/70/80/90 Series IDX-OM-W093 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-6 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 10.4 . 10-2 11 R .11-1
Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not
A Input/output specifications 22 30 62 70 NPN open collector 2 output + Analog output Bracket D NPN open collector 2 output + Auto shift input Refer to the dimensions for the difference between brackets A and D. D PNP open collector 2 output + Analog output PNP open collector 2 output + Auto shift input Optional Note) Auto shift input is used for the auto shift function.
After removing the cause of the alarm or warning, the alarm or warning can be deactivated in any of the methods marked in the alarm / warning deactivation column. "6" of the figure, "B" of the alphabet, and "D" are displayed as follows. 6 B D 7.1 Alarms List This section provides list of alarms.
For manifold type 31, S31, 32, S32 Body option 5 port 0: Pilot valve individual exhaust for the pilot valve 3: Common exhaust type for main and pilot valve (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 R port P, E port R port P, E port Electrical entry 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24, 12, 6,
Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.
BIT 2 5 Program designation <1> BIT 3 Pro-no. bit2 5 18 STP-NO BIT 1 Pro-no. bit3 18 6 BIT 2 Stp-no. bit1 6 19 BIT 3 Stp-no. bit2 19 7 BIT 4 20 Stp-no. bit3 7 The terminal that designates the step to be executed. Used when executing steps (position movement). (Set by the binary system.)
CCVS02-*G-* SCCS, #4 CCVS11/12/13-*G-* SCCS, #5 CCVS21/22/23-*G-* SCCS, #5 CCVS31/32/33-*G-* SCCS, #5 CCVS10-* SCCS, #6 CCVS20-* SCCS, #6 CCVS30-* SCCS, #6 CCVL02-*G-* SCC, #3 CCVL11/12/13-*G-* SCC, #4 CCVL21/22/23-*G-* SCC, #4 CCVL10-* SCC, #5 CCVL20-* SCC, #5 4.12-11 Series CC Cylinder Max.
234 6 255 272 7 293 310 Electrical entry position: Manifold block 2-G1, 1 1/4 Type SU Formula/Stations L1 = 38n + 27 L2 = 38n + 44 Formula for manifold weight M = 0.325n + 0.39 (kg) 2 103 120 3 141 158 4 179 196 5 217 234 6 255 272 7 293 310 ( ) Electrical entry position: Valve body ( ): DC 3-9-6
E F [2016 7 ] G [2019 6 ] H [2019 11 ] I [2022 6 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2022 SMC Corporation All Rights Reserved No.EX-OMP0004CN-I
D-DN This catalog is printed on recycled paper with concern for the global environment.
198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series
ZS-26-E (4 pcs. per set) Connector 16-3-6 6 Series PSE200 Multi-channel Controller Specifications Model PSE200 NPN open collector PSE201 PNP open collector Output specification 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) Power supply voltage 55 mA or less (Current consumption for sensor is not included.)
Push-locking slotted type [D] Disconnection To remove the socket from the connector, pull out lead wire while depressing the hook of the socket with a fine screwdriver. If the socket is to be re-used, reposition the hook again. Caution Gently operate locking manual override types B, D using a small screw driver.
Incorrect internal data processing of the product (Er0, 4, 6, 8, 40) Check if there is a noise source nearby.
5-3 IDX-OM-W095 6 6.1 OFF ON OFF OFF T 600mm 1 6.2 10% 600mm 1 OFF ON 10% 3 3 IDFC60/70/80/90 Series 6-1 IDX-OM-W095 600mm 1 2 INOUT IN OUT O IDFC60/70/80/90 Series 6-2 IDX-OM-W095 O O O () O O 8mm5m S )DUPONT KRYTOX GPL207 IDFC60/70/80/90 Series 6-3 IDX-OM-W095 6.2 2-1 6.1 OFF OFF ON OFF ON T ON IDFC60/70/80/90 Series 6-4 IDX-OM-W095 7 7.1 IDFC60-23 IDFC70-23