Fieldbus Device Handheld Terminal

Example of unit number -16No.EX-OML0011-C 2.

FQ1

flow rate (l/min) EJ101S-004 4 70 x 250 EJ101S-006 6 2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

Pressure Sensor for General Fluids

The warranty period of the product is 1 year in service or 1.5 years after the product is delivered,whichever is first.2) Also, the product may have specified durability, running distance or replacement parts. Please consult your nearest sales branch. 2.

Stainless Steel Heat

Note 2) Refer to page 7 for further information of options.

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

/N.C., 1st Selection Vacuum V Port: Vacuum, V Port: Ø6, 1st Selection Quantity: 2, /: /, 2nd Nominal Nozzle Size: ø1.0, 2nd Selection Supply Valve and Release Valve: N.C.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

2 !

Antistatic One-touch Fittings Series KA

M P D L A Part No.

Digital Flow Switch Series PFMB7 2-Color Display ® (200 L type only)

Option 1 W Nil DIN Rail Mounting Bracket (Order Separately) With lead wire with connector (2 m) Connector cover (Silicone rubber) ZS 33 R With lead wire with connector (2 m) ZS-33-F S Stations ZS-33-D ZS-33-D S 1 2 3 4 5 1 station 2 stations 3 stations 4 stations 5 stations IN IN N Note) If an accessory is required, order separately using ZS part numbers.

PSxx-OMV0008CN

50-A) A M4X6L B(ZS-50-B) B M4X6L -15No.PS-OMV0008CN-E 1.50.1 Nm (ZS-48-A) -16No.PS-OMV0008CN-E -02-N02 8~12 Nm -F02 4~5 Nm 24 () -17No.PS-OMV0008CN-E ()336 336 -18No.PS-OMV0008CN-E FG M12 M12 (Port Class A) 1 DC(+) DC1224 V 2 OUT2 2 3 DC(-) 0 V 4 OUT1 1 IO-Link 1 L+ DC1830 V 2 DO 2 3 L0 V 4 C/Q (IO-Link)/1(SIO) -19No.PS-OMV0008CN-E NPN 2 DC(+) OUT1 OUT2 DC(-) PNP 2 DC(+) OUT1

IR1000-A/2000-A/3000-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

In-line Air Filter

ZFC1 ZFC3 ZFC5 ZFC7 1 2 V 2 3.2 V V 3 4 V V 4 6 V V 5 8 V 6 10 V 7 12 V Option Nil None B With bracket Inch size A 1/8" V V B 5/32" V V D 1/4" V V E 5/16" V F 3/8" V Max. Operating Pressure and Operating Temperature Specifications Model ZFC1l ZFC3l ZFC5l ZFC7l Max. operating pressure [MPa] 1.0 Port size (Applicable tubing O.D.)

HRX-OM-X010

HRZ Series 5.3 Operation Screen 5-5 5-5 HRX-OM-X010 Chapter 5 System Operation 5.3.3 Status screen 2 POWER ON 2 1 3 4 Figure 5-5 Status screen 2 Table 5-4 Status screen 2 No.

Flow Control Equipment

How to Order 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 3/8 1/2 Sealant Applicable tube O.D.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Dimensions LLHAStations 4 x Mounting hole for W Y K A D E L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 U 3/8 Pitch = B 2 x P port n x A port (mm) Dimensions (mm) A G D E C U Y W V N K H2 H1 B Model LLH2A LLH3A LLH4A Station 5 4 3 2 Model 10 67 19 65 19 5.5 M4 34 27 18 87 85.5 31 46.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 19 76 27.5 94.5 27.5 6.5 M5 47

•

': Switch specifications Model Outp ut ~pecific.atL oQ~ Analog output ZSE6B-D-26L ZSE6B-D -27,=NPN open collector 30V, BOmA Switch . 2 output ZSE6B-D-67L PNP open collector BOmA ISE6B-0-26L Analog output 1SV(S%F,S,) ISE6B-0-27L SWlich . 2 outpu! NPN open collector 30V, BOmA ISE6B-0-67L PNP open collector SOmA Standard S speciTIcarIons '.

IDUS/IDFS

Operation time: 2 sec./min.

Multistage Ejector (N)ZL Series

(N)ZL112-G V Exhaust with silencer Vacuum adapter1/8 2-5.4 Mounting hole 7 P With vacuum adapter (N)ZL112-GN V 61 2-5.4 Mounting hole Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch (N)ZL112-E P V RESET SET Approx. 500 (L: Approx. 2900) Section A Pressure supply port One-touch fitting Vacuum port One-touch fitting 2-5.4 Mounting hole Label MULTISTAGE EJECTOR

OMS0020

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D