IDX-OM-Z004

K 1.6MPa 1.2.4 P 1.2.5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1.2.6 V ON 1.5 OFF 0.5 1.2.7 5 4 1.2 IDF100150F-W 1 2 IDX-OM-Z004 1 1.3 A ( 4) ( 4) Y 3 A 1.3 IDF100150F-W 1 3 IDX-OM-Z004 1 ( 5) ( B 5) Y V IDF100F V IDF125F V IDF150F B 1.3 IDF100150F-W 1 4 IDX-OM-Z004 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3

Compact and Lightweight

Vacuum (V) and exhaust (E) port should not be sealed simultaneously.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Model Uni thread size Metric size Inch size Elbow type 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Gasket AS22l1FSl-U01 1/8 V V V V V V V V V AS22l1FSl-U02 1/4 V V V V V V V V V V Female thread AS32l1FSl-U02 1/4 V V V V V V V Rc, G NPT, NPTF Uni thread AS32l1FSl-U03 3/8 V V V V V V V AS42l1FSl-U04 1/2 V V V V V Shape of Uni thread ridge Use of the chamfered surface of the female thread

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Applicable load Type Load voltage Auto switch model Band mounting DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Lead wire length (m) Wiring (Output) Electrical entry Indicator light M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 2) Auto switches marked with are produced upon receipt of order.

VK3000

S070 VQD VQD-V Plug position B port N. C. A port N. O.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Nil None R8 8*2 R1 1.5 RA 10*2 R3 3 RB 15*2 R5 5 RC 20*2 Nil Without option B With lock Size Stroke 100 200 300 400 500 600 25 V V V V V 32 V V V V V 40 V V V V V 11 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS Series Battery-less Absolute (Step Motor 24 VDC) i Controller Nil Without controller Cm1mm With controller 1 D T 7 C Communication

Serial Transmission System Series EX250 Series EX500

Seal 0 1 Metal seal Rubber seal 12 SI unit Serial Unit (SI Unit) Dimensions/EX250 DeviceNet PROFIBUS-DP CC-Link SI SI SI PW PW(V) RUN PWR(V) MOD/NET PWR(V) PWR STATION NO.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

/Female Thread) ZPT 20/25/32 F J/K 10-B01-A14 (With Buffer/Female Thread) Rc(PT)1/8 Width across flats 13 Width across flats 8 M5 x 0.8 5 M10 x 1 M14 x 1 6.2 Width across flats 14 3 3 Width across flats 19 I 5 5 D C J H F I M5 x 0.8 Width across flats 8 J H F Width across flats 10 Width across flats 2 Width across flats 12 M8 x 1.25 Y D C Width across flats12 Width across flats 3 2 A B 3

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Range(MPa): 0.1～1, Connection port location: Standard type, Switch: Without auto switch (built-in magnet), Lead wire(m): None, Number Of Switches: None, Port types: M5, Connector Type: None, Specification: Standard type

Range(MPa): 0.1～1, Connection port location: Standard type, Switch: M9B, Lead wire(m): 0.5, Number Of Switches: 2 pcs., Port types: M5, Connector Type: None, Specification: Standard type

Range(MPa): 0.1～1, Connection port location: Standard type, Switch: M9NW, Lead wire(m): 0.5, Number Of Switches: 2 pcs., Port types: M5, Connector Type: None, Specification: Standard type

Range(MPa): 0.1～1, Connection port location: Standard type, Switch: M9NW, Lead wire(m): 3, Number Of Switches: 2 pcs., Port types: M5, Connector Type: None, Specification: Standard type

Range(MPa): 0.1～1, Connection port location: Standard type, Switch: M9P, Lead wire(m): 0.5, Number Of Switches: 2 pcs., Port types: M5, Connector Type: None, Specification: Standard type

Range(MPa): 0.1～1, Connection port location: Standard type, Switch: M9P, Lead wire(m): 3, Number Of Switches: 2 pcs., Port types: M5, Connector Type: None, Specification: Standard type

Range(MPa): 0.1～1, Connection port location: Standard type, Switch: M9PW, Lead wire(m): 0.5, Number Of Switches: 2 pcs., Port types: M5, Connector Type: None, Specification: Standard type

Range(MPa): 0.1～1, Connection port location: Standard type, Switch: Without auto switch (built-in magnet), Lead wire(m): None, Number Of Switches: None, Port types: M5, Connector Type: None, Specification: Made to order specifications

Range(MPa): 0.1～1, Connection port location: Standard type, Switch: Without auto switch (built-in magnet), Lead wire(m): None, Number Of Switches: None, Port types: M5, Connector Type: None, Specification: Standard type

Range(MPa): 0.1～1, Connection port location: Standard type, Switch: A93, Lead wire(m): 3, Number Of Switches: 2 pcs., Port types: M5, Connector Type: None, Specification: Standard type