IDX-OM-W029

-6 11-3 IDU Series 10-3 10 2 IDX-OM-W029 11 T 11 T T 11-2, 11-3 11-1 1. 2. 3.

JXCx-OMU0024

Setting Software Functions . 11 4.1 Various windows . 11 (1) Main window . 11 (2) Status window . 20 (3) Teaching window . 23 (4) Parameter window . 26 (5) Step Data window . 27 (6) Alarm window . 28 (7) Test Drive window . 30 4.2.

IDX-OM-W095

-TIDFC70-23-T IDFC80-23-TIDFC90-23-T M3.5 8.5mm M4.0 9.5mm [3.2.5 ] IDFC60/70/80/90 Series 11-3 IDX-OM-W095 T 11.5 IDFC60/70-23-T A B AC 230V50Hz CM OLR FM MC MC2 PRS ILS THR C01 C11 TB CN TDR GFCI EDV PE BK WH IDFC80/90-20-T GR SY A B AC 230V50Hz BU BR YE OR G/Y / IDFC60/70/80/90 Series 11-4 IDX-OM-W095 V 12 V V 12.1 0 () 12.2 ( 10m) (12mm) IDF-S0534

SFOD-OMT0011CN

Result area (LER ) ) LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 ) LEY16RA-75LEY16RALEY16RA-100 LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 29 No.SFOD-OMT0011CN-A c) Execute Execute b) c) (Apply) d), d) download e) 30 No.SFOD-OMT0011CN-A (2) a View(V) 4.1 (1-1-2) View (V) b c) download e) 31 No.SFOD-OMT0011CN-A

2 PORT SOLENOID VALVE FOR DUST COLLECTOR

(A,C) Note.5) VXF-26AA VXF-26AC 24.529.5 29.434.3 VXF(A)26A(B,D) Note.5) VXF-26AB VXF-26AD VXF(A)25B(A,B,C,D) VXF-25AA VXF-25AC 12.515 1517.5 VXF(A)26B(A,C) Note.5) VXF-26BA VXF-26BC VXF(A)26B(B,D) Note.5) VXF-26BB VXF-26BD VXF(A)26C(A,C) Note.5) VXF-26CA VXF-26CC VXF(A)26C(B,D) Note.5) VXF-26CB VXF-26CD 24.529.5 29.434.3 VXF(A)26D(A,C) Note.5,6) VXF-26CA VXF-26CC VXF(A)26D(B,D) Note.5,6)

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

PSE200

B Released SET Work 1 Work 2 Work n Atmosphere Max. A: Maximum pressure value when work piece is adsorbed. A B 4 ON = A A B 4 SET OFF = B + Min. B: Minimum pressure value when work piece is not adsorbed. OUT1 auto preset For adsorption verification: In this mode, repeat the adsorption and release of the work piece for a few times. The optimum values will be set automatically.

VEX-OMT0003

Wiring 1) Pass the cable (7) through the cable gland (4), plain washer (5) and rubber seal (6) in this order, and then insert them into the housing (2). 2) Loosen the screw (11) attached to the terminal block (3). Then, pass the lead wire (10) through the terminal block (3) and tighten the screw (11) again. Note 1) Tighten within the tightening torque of 0.5 Nm 15%.

LFE-OMZ0012

Doc.No.LFE*-OMZ0012 Product Name Electromagnetic Digital Flow Switch Remote Type Model/ Series/ Product Number LFE#(Z) SMC Corporation Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definition and Terminology 14 Mounting and Installation 15 Installation 17 Piping Method 18 Wiring 20 Maintenance and Inspection 22 Troubleshooting 23 Specifications

HAW

Visible outlet air temperature Outlet air temperature is easily checked by thermometer, resulting in easy maintenance. 1.5 2 to 50 AME Proof pressure (MPa) 3B JIS 10K FF flange Rc 11/4 Rc 1 32 67 78 Rc 1/2 Rc 11/2 Rc 2 Air side Port size Rc 3/4 AMF Rc 1/2 Rc 1/2 Rc 3/4 Rc 1 Cooling water side Drain side Rc 3/4 SF Mass (kg) Coating color 9.7 11.5 59 95 Rc 1/2 Silver SFD Accessory Drain valve

Standby Regulator

How to Order 11 5. Structural Drawing and Replacement Parts 12 6. Operation and Adjustment 13-14 7. Trouble Shooting 15 8. How to Replace the Components 16-19 8-1. Diaphragm Assembly Replacement 16 8-2. Valve Guide Assembly and Valve Assembly Replacement 17 8-3. Square Embedded Type Pressure Gauge Replacement 18 8-4. Blanking Plate Assembly Replacement 19 9.

Hydraulic Filters

-24 FHIA-28 FHIA-32 22.2 90 72 116 154 38 60 11 M8 x 25 56 260 1.8 27.7 110 80 133 177 44 70 11 M8 x 25 70 290 2.7 34.5 43.2 128 95 185 234 49 86 15 M10 x 30 86 340 4.6 49.1 61.1 152 110 214 268.5 54.5 100 15 M12 x 35 102 370 6.1 77.1 9.5 176 125 220 290.5 70.5 120 15 M12 x 35 130 410 90.0 8.0 102.6 14.0 224 155 280 364.5 84.5 150 15 M16 x 40 166 490 115.4 13.5 501

SYJ Series

On B side SY3000-37-80A-7 On A side 1 to 8stations SY3000-37-80A-3 On B side SY3000-37-80A-10 On A side 9 to 12stations SY3000-37-80A-6 On B side SS5YJ7-21,41SA SY3000-37-80A-12 On A side 13to16stations SY3000-37-80A-9 On B side Note 1) The above is for station addition or maintenance.

Low Differential Pressure Sensor

DC() IN (1 to 5 V) Analog output or auto shift input Gray 2 DC(-) Blue 1 20 2 m 20 With bracket A 30 20 46 4.2 10 15 40 31.5 26.5 1.6 7.2 22 35 41 A View ZS-28-B Bracket With panel mount adapter With panel mount adapter + Front protective cover 42.4 34.5 24 7 34.5 24 11 Panel thickness 0.5 to 6 ZS-27-D Panel mount adapter + Front protective cover 8.75 ZS-27-C Panel mount adapter 6 Series

155

26 52 4.5 44.5 25 26.3 115 79.9 VCC 1/2 63 49.6 29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115 79.9 3/4 80 59 35 17.5 112 120.5 165 35 31 62 5.5 48 30 31 124.2 85.8 1 90 74 44 22 135.9 144.5 189 40 36 72 6.5 60 35 39.5 148.2 96.8 383 Series SGC How to Fix an Auto Switch Auto Switch Proper Mounting Position (mm) D-M9l Model A B A B A B A B A B A B A B A B A B 5 SGC(A)2lll-05l10, 15

EX510-GDN1.eng

For dual power supply use B.

5 Port Solenoid Valve SY Series

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage. Response Time Note) Based on dynamic performance test, JIS B 8375-1981.

Low Maintenance Filter Series FN1

135 180 4-11 225 (266) (60) AIR VENT G 1/4 q q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

Membrane Air Dryer

200 25 50 11 22 Outlet air atmospheric pressure dew point oC -15 -20 *Note2 Inlet air flow rate L/min(ANR) Outlet air flow rate L/min(ANR) Standard Performance conditions Purge air flow rate L/min(ANR) Inlet air pressure MPa *Note3 0.7 25 Inlet air temperature oC Inlet air saturation temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure

Clean Room Rodless Cylinder Series CYP ø15, ø32

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder