ZP

(58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K HS Plug G G Q + Stroke HR CR Z + Stroke CY3R25/32/40 CY3R15/20 (mm) A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66

CM2

Z H MM ND +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 9 10 14 18 25 66 41 M8 X 1.25 9 M10 X 1.25 9 10 14 22 25 69 45 9 M14 X 1.5 16 13 25 24 49.7 92 50 12 Double Knuckle Joint (mm) Applicable bore size A1 Applicable pin part No.

A

IS1000E-402 14 33 87 66 17.5 IS1000E-403 38 AC4000 IS1000E-404 12 IS1000E-406 34 50 87 66 17.5 H O W T O O R D E R P R E S S U R E S W I T C H *Without Yoke Clip.

VQZ1000/2000/3000

Pg.7 Indicator light 3.5 to 7 Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 35.5 M plug connector (M): VQZ3120 1(R)-M-C6/C8/C10/02 Cover diameter 1.5 Cross section 0.23 mm2 77 (Lead wire length) 300 102.5 66 114 Indicator light 37 <42> < >: AC 2-7-15 Body Ported 16 16 Series VQZ1000/2000/3000 Dimensions: VQZ3000 2 position double Grommet (G): VQZ3220 1(R)-G-C6/C8/C10/02 300

Vacuum Module Series ZX

(mm) Stations Symbol 7 180 192 197 8 5 138 150 155 6 159 171 176 3 96 108 113 4 117 129 134 1 54 66 71 2 75 87 92 L1 33 45 50 L2 L3 900 Ejector System Series ZX Vacuum Module: ZA Circuit diagram ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ + + + + AMV AEP Vacuum port (V) M5 (or M6) HEP Related Equipment 10.7 V V 22.5 21 4.2 901 Vacuum Module: Vacuum Pump System Series ZX [Option] How

VQC

BF 9 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 S Kit (Serial Transmission Kit: EX250) (L3) (L4) L2 5.5 111 L1 21 63 P = 10.5 28 65 (12) 13 1.5 1.5 Indicator light Manual override (5.5) 93.5 (35) 66 75 37.5 Approx. 2 Approx. 4 Input block Mounting hole for 6-M4 SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-C8 3(R) port DIN rail clamp screw 0 BUS 62.5 1 60 (12) 40.5 2 PWR 25

NCG/CG1

50.5 75.5 41 66 100.5 91 16 25 25 116 116 25.5 50.5 75.5 41 66 50.5 75.5 41 66 30 30 100.5 91 16 125.5 125.5 D-G5NTL D-G59F D-G5NTL D-G59F 32 32 117 117 26.5 33.5 33.5 51.5 76.5 42 67 51.5 76.5 42 67 101.5 92 17 126.5 126.5 40 40 119 119 31 38 38 56 81 44 69 56 81 44 69 106 94 19 131 131 20 20 27 27.5 27.5 52 77 42.5 67.5 52 77 42.5 67.5 102 92.5 17.5 25 25 27 30 30 52 77 42.5 67.5 52 77

CG1

66 16 25.5 91 27.5 27.5 100.5 D-G5 D-G5 50.5 50.5 75.5 75.5 41 41 66 66 16 25.5 91 30 30 100.5 125.5 125.5 116 116 D-K5 D-K5 51.5 51.5 76.5 76.5 42 42 67 67 17 26.5 92 33.5 33.5 101.5 126.5 126.5 117 117 D-G5NT D-G5NT 56 56 81 81 44.5 44.5 69.5 69.5 19.5 31 94.5 38 38 106 131 131 119.5 119.5 52 52 77 77 42.5 42.5 67.5 67.5 17.5 27 92.5 27.5 27.5 102 52 52 77 77 42.5 42.5 67.5 67.5 17.5 27

Basic type / Direct mount type Series CY3B/CY3R

5.5 7.5 7.5 8 11 14 14 B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 H 13.5 12.5 13 20 20.5 22 29 33 33 CC 32 38 I 28 34 40 50 58 72 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 J 4.5 4.5 6 6 8 8 10 12 12 E 4 1.5 2 2 2 2 3 8 8 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 V T C 8 14 14 26 32 32 41 F 8 9 10 13 13 16 16 2 2 L 35 38 57 66

Air Slide Table Series MXQ

90 100 150 205 230 I 16 16 16 16 16 31 20 18 18 NN 2 2 2 2 2 3 4 4 4 H 55 55 55 65 80 44 66 66 G 23 23 23 23 32 44 31 56 N 4 4 4 4 4 6 8 8 8 HA 55 55 55 65 80 65 88 132 132 Model F 55 46 55 65 75 60 48 60 65 GA 23 23 23 23 32 72 88 97 122 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 MXQ25L10 MXQ25L20 MXQ25L30 MXQ25L40 MXQ25L50 MXQ25L75 MXQ25L-100 MXQ25L-125 MXQ25L-150 Note) Note) Note) Refer to

LEC-OM02704CN

6.1.8 66 6.1.9 69 6.1.10 6-10 6.1.11 6-11 6.1.12 6-11 6.1.13 6-12 6.2 (PB) 6-14 6.2.1 6-14 6.2.2 6-15 6.3 (PC) 6-21 6.3.1 6-21 6.3.2 6-22 6.3.3 S 6-28 6.3.4 6-28 6.3.5 6-28 6.3.6 6-29 6.4 (PD) 6-30 6.4.1 6-30 6.4.2 6-31 6.4.3 (LSP)(LSN) 6-39 6.4.4 6-40 7 MR Configurator 717-27 7.1 72 7.2 73 7.3 75 7.4 76 7.5 78 7.6 7-10 7.7 7-14 7.7.1 JOG

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

246 17 50 25 9 73 53 20 50 28 17 17 M10 x 1.5 20 16 22 M16 x 1.5 30 3/8 43 116 11 10 9 73 262 19 63 28 8 80 60 22.4 55 30 17 17 M10 x 1.5 22 16 25 M18 x 1.5 30 3/8 47 120 11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5

5 Port Solenoid Valve, Series VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

7 60 64 76 7 6H9 (+0.030 0 ) depth 66 6H9 (+0.030 0 ) depth 66 11 Motor mounting position: Right side parallel 153 G 70 60 64 *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 ZZ 148.5 148.5 148.5 158.5 182.5 207.5 246.5 299.5 324.5 13-/22-MXQ2510 13-/22

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

CM2

H2 I B D K MM N NA NN P S Bore size (mm) 0 0.033 20 41 8 75 60 4 7 18 13 37 34 8 62 15.5 13 26 30 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 116 20 0 0.033 25 45 8 75 60 4 7 22 13 41 40 10 62 19.5 17 32 37 6 8 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 120 1/8 26 0 0.033 32 45 8 75 60 4 7 22 13 41 40 12 64 19.5 17 32 37 6 8 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 122 1/8 26 0 0.039 40 50 11 82 36 66

MG

st to 100 st 68 78 93 98.5 Bore size (mm) FB B Over 100 st 117 117.5 30 st or less 56 62 76 82.5 18 18 19 19 55 59 66 66.5 12 16 20 25 2.