5 Port Solenoid Valve, Series VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

7 60 64 76 7 6H9 (+0.030 0 ) depth 66 6H9 (+0.030 0 ) depth 66 11 Motor mounting position: Right side parallel 153 G 70 60 64 *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 ZZ 148.5 148.5 148.5 158.5 182.5 207.5 246.5 299.5 324.5 13-/22-MXQ2510 13-/22

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

CM2

H2 I B D K MM N NA NN P S Bore size (mm) 0 0.033 20 41 8 75 60 4 7 18 13 37 34 8 62 15.5 13 26 30 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 116 20 0 0.033 25 45 8 75 60 4 7 22 13 41 40 10 62 19.5 17 32 37 6 8 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 120 1/8 26 0 0.033 32 45 8 75 60 4 7 22 13 41 40 12 64 19.5 17 32 37 6 8 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 122 1/8 26 0 0.039 40 50 11 82 36 66

MG

st to 100 st 68 78 93 98.5 Bore size (mm) FB B Over 100 st 117 117.5 30 st or less 56 62 76 82.5 18 18 19 19 55 59 66 66.5 12 16 20 25 2.

Sensor Monitor

(Refer to page 66)) (3) Change the set value with UP or DOWN button, and press the SET button to set the value. Then, the setting moves to the delay time of the switch output. (The snap shot function can be used. (Refer to page 66)) (4) Press the UP or DOWN button, the delay time of the switch output can be selected.

PFxx-OMX0002

(Refer to page 66) Press the S button to set. Move on to setting of hysteresis. Setting of Hysteresis Set the flow based on the setting method on page 35. The snap shot function can be used. (Refer to page 66) Press the S button to set. Move on to setting of delay time. Setting of delay time Set delay time. Press the S button to set. Move on to select display colour.

Multi-channel Digital Sensor Monitor

(Refer to page 66) Press the SET button to set. Move on to hysteresis setting. -37No.PS-OMW0005-C Hysteresis setting Set the pressure referring to the setting method on page 25. Hysteresis mode: [H_1] Window comparator mode: [WH1] The snap shot function can be used. (Refer to page 66) Press the SET button to set. Move on to delay time setting.

Vacuum Pad

M6 x 1 Width across flat 8 (Hexagon) 3 3 26 A Width across flat 8 (Hexagon) Width across flat 7 (Hexagon) B 7 7.5 5 9 2.5 3.5 Dimensions 4.9 7.9 A B Model ZPT1-B4 ZPT1-B5 M4 x 0.7 M5 x 0.8 4 5 72 Series ZP Refer to page 66 for applicable pad part no. ZPT2-B5/B6 Adapter part no. ZPT3-B8/B01/N01/T01 Adapter part no.

Vacuum Pad

M6 x 1 Width across flat 8 (Hexagon) 3 3 26 A Width across flat 8 (Hexagon) Width across flat 7 (Hexagon) B 7 7.5 5 9 2.5 3.5 Dimensions 4.9 7.9 A B Model ZPT1-B4 ZPT1-B5 M4 x 0.7 M5 x 0.8 4 5 72 Series ZP Refer to page 66 for applicable pad part no. ZPT2-B5/B6 Adapter part no. ZPT3-B8/B01/N01/T01 Adapter part no.

SY

Manifold spec. sheets Order made Dimension L 66 67 68 69 70 71 923 935.5 948 960.5 973 985.5 No.

2/3 Port Valve

Symbol Solenoid Specifications OUT Apparent power VA Inrush Holding Power consumption W (Holding) Temp rise C (Rated voltage) 8 55 6.5 45 8 50 11 60 9.5 50 11.5 55 Frequency Hz 50 66(60) 20 60 57(51) 15 50 93 25 60 79 20 Model Power supply IN AC VXZ22 DC AC VXZ23 DC Note) O The return voltage is 20% or more of the rated voltage for AC and 5% or more for DC.

Title not found

M 1 8 X 1 . 5 [418X1.5 M22X1.5 1,I26X1.5 7 t 2 O 27 n 20 45 153 a 22 85 tiz 1 1 7 162 209 43 1 . 2 59 170 t. 16 30 46 1 0 50 168 0 22 95 74 127 58 1 8 1 232 52 '|.2 66 189 3l 48.5 60 142 0 rE ;ij;5 28 1 0 90 144 58 1 9 1 244 52 1 . 2 66 199 37 55 1 5 23 70 204 0 34 140 1 0 192 71 ?

Vacuum Pad

M6 x 1 Width across flat 8 (Hexagon) 3 3 26 A Width across flat 8 (Hexagon) Width across flat 7 (Hexagon) B 7 7.5 5 9 2.5 3.5 Dimensions 4.9 7.9 A B Model ZPT1-B4 ZPT1-B5 M4 x 0.7 M5 x 0.8 4 5 72 Series ZP Refer to page 66 for applicable pad part no. ZPT2-B5/B6 Adapter part no. ZPT3-B8/B01/N01/T01 Adapter part no.

Vacuum Pad

M6 x 1 Width across flat 8 (Hexagon) 3 3 26 A Width across flat 8 (Hexagon) Width across flat 7 (Hexagon) B 7 7.5 5 9 2.5 3.5 Dimensions 4.9 7.9 A B Model ZPT1-B4 ZPT1-B5 M4 x 0.7 M5 x 0.8 4 5 72 Series ZP Refer to page 66 for applicable pad part no. ZPT2-B5/B6 Adapter part no. ZPT3-B8/B01/N01/T01 Adapter part no.

0.

.: 3.2, 1/8" 4, 5/32" 6, 1/4" C6: 44.1 N7: 47.9 (3.2) 15 1/8 [1(P), 3(R) port] 8 L4 L3 M5 x 0.8 [2(A) port] 2 x 4.3 (For mounting) L5 6.5 13.4 16.3 (8) 19.3 21.6 41.2 46.5 A 2 A 2 A 2 A 2 A 2 1 P R 3 59.3 43.9 35 1 P R 3 (5.5) (66) (35) + + + + + (4.5) Manual override (DIN rail) Approx. 300 44.9 5.5 5.5 (Lead wire length) (Pitch) P = 10.5 M5 x 0.8 (PE: Pilot EXH port) 16.5 (DIN rail clamp

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

4.83 6.03 2.33 1.98 Long stroke 56 137 171 66 4.83 6.03 2.33 1.98 Rear flange (including bolt) 34 92 127 40 Double clevis (including pin, retainer, bolt) 3.25 4.48 1.14 1.20 Note 1) Values are the same for all models except where indicated.

Air Cylinder CLA Series Fine Lock Model

M14X1.5 M 1 8 X 1 . 5 [418X1.5 M22X1.5 1,I26X1.5 7 t 2 O 27 n 20 45 153 a 22 85 tiz 1 1 7 162 209 43 1 . 2 59 170 t. 16 30 46 1 0 50 168 0 22 95 74 127 58 1 8 1 232 52 '|.2 66 189 3l 48.5 60 142 0 rE ;ij;5 28 1 0 90 144 58 1 9 1 244 52 1 . 2 66 199 37 55 1 5 23 70 204 0 34 140 1 0 192 71 ?