CL

CLS CLQ Bore (mm) Z Y ZZ M8 x 1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41

C95

10 12 12 16 16 20 9.5 12 12 16 16 20 6.6 6.6 9 9 11 11 6.5 6.5 8.5 8.5 11 12 48 56 64 75 95 115 45 52 60 70 90 110 26 28 32 40 50 60 32 40 50 63 80 100 C85 C76 CG1 Rear Sngle Clevis DS MB MB1 Bore (mm) E B1 H B2 B3 L3 L1 TG1 T d1 FL d2 d3 CN XD 45 55 65 75 95 115 14 16 21 21 25 25 5 5 5 5 5 5 11.5 12 14 14 16 16 3 4 4 4 4 4 10 12 16 16 20 20 30 35 40 45 45 55 34 40 45 51 65 75 3.3 4.3 4.3

Basic type / Direct mount type Series CY3B/CY3R

Refer to front matters 54 and 55 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Operation Handling Caution Caution 1. The maximum operating pressure for the clean rodless cylinder is 0.3 MPa.

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

ZP

62.5 10.3 10.9 10.3 10.9 12.3 13.4 12.3 13.4 36.5 44 55 62.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Clamp Cylinder with Lock

M12 x 1.5 M4 x 7 86 51.5 5 12.5 114 226 50 64 64 20 55 78.5 58 17 58 M16 x 1.5 M4 x 7 87.5 52.5 5.5 14 118.5 230.5 63 74 74 20 69 82 72 17 58 M16 x 1.5 M5 x 7 91 53.5 5.5 19 122 234 Note) Refer to page 14 and 15 for Accessories.

4/5 Port Solenoid Valve

) 84 (58) 0.36 0.12 0.46 0.35 0.12 0.46 2 position 5 port Base mounted 0.33 0.39 0.12 0.10 0.47 0.59 [0.40] 0.46 0.31 0.12 0.47 0.36 0.58 [0.32] M5 x 0.8 M5 x 0.8 (with sub-plate) 0.43 [0.33] 0.32 0.16 [0.11] 0.11 82 (56) 92 (66) 3 position 0.42 [0.33] 0.16 [0.080] 36 53 41 63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63 37 55 Note 1) 4 Port Base

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

It is over 55 C. Lower the ambient temperature. LECSS 2-T the driver has exceeded 55 C. It is less than 55 C. Check (2). (2) The close mounting is Check the specifications of close mounting. It is out of specifications. Use within the range of specifications. out of specifications.

CJ2

D-A7 D-A80 D-A73C D-A80C 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 CP95 Symbol Specifications D-C7 D-C80 NCM -XA Change of rod end shape D-A7H D-A80H Band mounting style (6, 10, 16) -XB6 Heat resistant cylinder (150C) Not available with switch & with air cushion NCA -XB7 Not available

CM2

20 18 8 40 4 25 40 62 15.5 13 26 5 8 28 5 6.8 102 3.2 M8 x 1.25 15 24 M20 x 1.5 1/8 131 25 45 25 8 8 13 55 20 22 10 47 4 28 40 62 19.5 17 32 6 8 33.5 5.5 6.8 102 3.2 M10 x 1.25 15 30 M26 x 1.5 135 1/8 -X 32 45 25 8 8 13 55 20 22 12 47 4 28 40 64 19.5 17 32 6 8 37.5 5.5 6.8 104 3.2 M10 x 1.25 15 34.5 M26 x 1.5 137 1/8 40 50 27 11 10 16 75 23 24 14 54 4 30 55 88 21 22 41 8 10 46.5 7 7 134

IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

21

X 20 Y 8 Z ZZ 114 LT 3.2 Bore size 20 25 32 40 55 M8 x 1.25 11 40 30 M26 x 1.5 M5 x 0.8 56 20 8 118 3.2 55 M10 x 1.25 14 40 34.5 M26 x 1.5 Rc1/8 62 20 8 124 3.2 55 M10 x 1.25 14 55 42.5 M32 x 2 Rc1/8 67 23 10 142 3.2 75 M14 x 1.5 19 Use a thin wrench when tightening the piston rod.

Compact Cylinder

In that case, please order it separately. 21 ISO Standards [ISO/21287] Compact Cylinder (ATEX directive category 2) 20,25,32,40,50,63,80,100 Series 55-C55 How to Order B 20 10 C D 55 55 ATEX directive category 2 Rod end thread Rod end female thread Rod end male thread Nil M Compliant with ATEX directive category 2 55 Magnet Cylinder stroke (mm) Refer to page 2 for standard and intermediate

10

) 51.5 (59.5) 55 1 2 52.5 55 57.5 57.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 47.5 50 52.5 52.5 36 (41.5) 47 (55) 51.5 (59.5) 55 3 ( ): Denotes the Normally Open (N.O.) dimensions.

Digital Flow Switches

Note) Accumulated flow rate is reset when the power supply turns OFF. 46 Series PF2D How to Order 4-channel Flow Monitor Remote Type Display Unit PF2D20 M Output specification Option 2 (Refer to page 55.) 0 1 NPN4 outputs PNP4 outputs Accessory / Power supply output cable (2 m) Nil 4C None Sensor connector (4 pc.) Unit specification Option 1 (Refer to page 55.)

Refrigerated Air Dryers

[C] Correction factor 5 to 30 1.41 35 1.21 40 1 45 0.92 50 0.75 55 0.63 60 0.53 Inlet air temp. [C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp.

MY1

322 QW 30 36 42 51 59 Z 160 200 220 280 340 NW 37 45 53 64 75 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

D H11 FB TG 0.2 E R MF TF UF L4 Screw size L4 32 F5032 30 7 32.5 50 32 10 64 79 5 M6 x 20L 40 F5040 35 9 38 55 36 10 72 90 5 M6 x 20L 50 F5050 40 9 46.5 70 45 12 90 110 6.5 M8 x 20L 63 F5063 45 9 56.5 80 50 12 100 120 6.5 M8 x 20L 80 F5080 45 12 72 100 63 16 126 153 9 M10 x 25L 100 F5100 55 14 89 120 75 16 150 178 9 M10 x 25L D TG R E FB * Supplied with 4 mounting screws.

Vacuum System Peripherals:

PSE200 PSE201 Model NPN open collector PNP open collector Output specifications 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polariry protection) Power supply voltage 55 mA or less (Current consumption for sensor is not included.) Current consumption [Power supply voltage] 1.5 V 40 mA maximum (100 mA maximum for the total power supply current when 4 sensors are input.)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Section XX XA H9 depth XA 4 x M OA thread depth OB XB 2 x NA thread depth NC XA H9 XA K X [mm] LEYGlM (Sliding bearing) [mm] LEYGlL (Ball bushing bearing) Size Stroke range (mm) L DB Size Stroke range [mm] L DB (0.5) Section XX 25 15 to 55 67.5 12 60 to 185 100.5 190 to 300 138 25 15 to 110 91 10 115 to 190 115 195 to 300 133 Z WB WA WC + Stroke 32 20 to 55 74 16 60 to 185 107 190 to 300