3 Without arm Q R M MK MK 20 MK2T 8 19 CK1 17 0.1 0.2 Q (mm) CLK2 Q (mm) Rod state Clamp stroke 10 mm Model Q 10 mm 20 mm Clamp stroke CLKG Rod state Bore size 50 mm 20 mm 30 mm 50 mm Retracted 146.5 175.5 166.5 205.5 186.5 235.5 226.5 295.5 R M Q 82 82 83 83 91.5 91.5 85 85 96.5 96.5 100 100 R 33.5 63 35.5 65 50 85 57.5 92.5 65.5 104.5 65 104 M Q 126.5 126.5 130 130 R 95.5 164.5 95 164 M MK63
30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40
Metric size Inch size Model Port size Pilot port 6 8 10 12 1/4" 5/16" 3/8" 1/2" ASP330F-01 ASP430F-02 ASP530F-03 ASP630F-04 ASP430F-F02 ASP530F-F03 ASP630F-F04 ASP330F-N01 ASP430F-N02 ASP530F-N03 ASP630F-N04 R 1/8 M5 x 0.8 R 1/4 Rc 1/8 R 3/8 Rc 1/8 R 1/2 Rc 1/4 R 1/4 G 1/8 R 3/8 G 1/8 R 1/2 G 1/4 NPT 1/8 10-32 UNF NPT 1/4 NPT 1/8 NPT 3/8 NPT 1/8 AS NPT 1/2 NPT 1/4 Note
L2 W L3 A3 Graph (1) Load Weight: W Mr Static moment Dynamic moment MXY6 W My W L3 A3 0.6 A2 L2 Rubber stopper screw MX Load weight W kg Mr 0.5 L1 A1 Metal stopper screw Mp 0.4 W MTS My W 0.3 W MY 0.2 Mey Mep 0.1 We CY We 0.0 A2 L3 A3 L2 Collision speed V mm/s 0 100 200 300 400 500 280 560 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office
T1 = V/a1 = 1000/2500 = 0.4 [s], T1 T2 T3 T4 11LEJS T3 = V/a2 = 1000/2500 = 0.4 [s] L: Stroke [mm](Operating condition) V: Speed [mm/s](Operating condition) a1: Acceleration [mm/s2](Operating condition) a2: Deceleration [mm/s2](Operating condition) T = T1 + T2 + T3 + T4 [s] L 0.5V(T1 + T3) V 25AT2 = T1: Acceleration time and T3: Deceleration time can be obtained by the following equation
MX MTS MY Centralized piping on right CY MG CX R R L DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.
MX MTS MY Centralized piping on right CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX L R R DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4.
9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.
3 o r !4 u Component Parts Component Parts Note No. Description Note No.
Amount of Overhang: Ln [mm], Correction Value for the Distances to the Moment Center: An [mm] Correction Value for the Distances to the Moment Center: An [mm] Fig. 1 Table 1 Mp: Pitching Mounting orientation My: Yawing Mr: Rolling Model A1 A2 22.5 L2 A2 LAT3m-10 LAT3m-20 LAT3m-30 2.2 L1 A1 32.5 2.2 42.5 2.2 Mr L1 A1 Horizontal W Mp My L3 W W Mr W L2 A2 L3 Vertical Mp My W W Allowable Load
22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and
MXY6 MXY8 MXY12 Model A1 0.6 A2 A3 1 MXY6 MXY8 MXY12 2 580 16 15 MXY6 MXY8 MXY12 14 980 20 19 15.5 The above value represents the maximum value for each allowable load mass.
Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.
PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.
2) Option R is not available with the MXS6 series.
Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !
22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
For details, refer to 6.13 P r o d u c t I n f o r m a t i o n Display. (2) Related Parameter Set the following parameter to use backlash compensation. Backlash Compensation Direction Set the direction in which to apply backlash compensation. Parameter Function When Enabled Classification n. 0 [Factory setting] Compensates with a reference in the forward direction.
For details, refer to 6.13 P r o d u c t I n f o r m a t i o n Display. (2) Related Parameter Set the following parameter to use backlash compensation. Backlash Compensation Direction Set the direction in which to apply backlash compensation. Parameter Function When Enabled Classification n. 0 [Factory setting] Compensates with a reference in the forward direction.
LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !