REA/REB

Speed 600 mm/s (mm) Model A HP MM HT J LW LL L M HG HC HB HA H EB EA REAH15 REAH20 REAH25 42 8 19 M5 x 0.8 71.5 44 106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97 50 8 23.5 M5 x 0.8 75.5 48.5 108 M5 x 0.8 16 53 41.5 42.5 54 22 26.5 102.5 58.5 10 28 M6 x 1.0 86 56 138 M6 x 1.0 25 61.5 46 46 63 24 29 125 Model N TW S ZZ Z XB W PP PB PA P NT NL REAH15 REAH20 REAH25 65 161 17.5 194 88.5 21 62 50

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

0.55

M-type plug connector (M): VF1220-;M;;1; M5 01 Conduit terminal (T): VF1220-;T ;;1; M5 01 (Lead wire length) 142.9 Max. 10 Approx. 300 Applicable cable O.D. 4.5 to 7 120.3 (Indicator light) 110.1 Pg9 88.7 [78.7] 78.7 [68.7] 55.5 5EA 5EA 3EB 3EB [ ]: Without indicator light Unless otherwise indicated, dimensions are the same as Grommet (G).

Modular/F.R.L. Units Series AC

L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.

Air Slide Table

MXQ 8C-mm5 With buffer, axial piping (8) Pilot port M5 x 0.8 (OUT) 24.3 9.8 2 Pilot port M5 x 0.8 (IN) 13 6.3 Pilot port M5 x 0.8 (IN) 24.3 9.8 33.4 21 Symmetric type 28.5 6.3 2 x M3 x 0.5 thread depth 5 M Dimensions [mm] Pilot port M5 x 0.8 (OUT) 17 2.3 17.4 Model Standard type Shorter total length type ZZ M M MXQ8C-10Zl5 85 76.5 77.5 MXQ8C-20Zl5 95 86.5 87.5 MXQ8C-30Zl5 105 96.5 97.5 MXQ8C

Aluminum High Vacuum Angle Valve

flange surface Symbol S K L S L M K L M Pilot port direction Solid state auto switch D-M9P(M)(L)(Z) Left flange surface D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 1 Reed auto switch Right flange surface Without auto switch (with built-in magnet) 2 When the seal material is not being changed, there is no need to select a symbol.

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M M5 6 1 / 3 8 / 1 S 1 0 5 0 L 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 8 3 0 4 5 . 6 1 5 . 3 9 1 4 / 1 S 2 0 5 0 L 2 Q K 4 1 4 4 5 . 3 4 1 4 8 / 1 S 1 0 7 0 L 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 0 4 3 4 7 1 6 . 4 0 2 4 / 1 4 / 1 S 2 0 7 0 L 2 Q K 4 1 5 . 6 4 7 4 5 4 8 / 3

e

Auto switch is shipped together with the cylinder (not assembled). 1098 Series E-MY2B e-Rodless Actuator Basic Type Basic Specifications E-MY2B Model Low Medium Standard 10 to 1000 mm/s 50 to 1000 mm/s 100 to 1000 mm/s Heavy load 0.25 to 2.45 m/s 2 Transfer speed set range Standard load 0.49 to 4.90 m/s 2 Medium load 0.98 to 9.80 m/s 2 Light load 1.96 to 19.6 m/s 2 Transfer speed acceleration

Dual Rod Cylinder Series CXSJ/CXS

Graph (2) V = 400 (mm/s) 20 10 32 25 1 20 32 Mass m (kg) Mass m (kg) Mass m (kg) 25 15 1 20 15 10 0.1 10 0.1 6 6 0.03 0.02 5 10 20 30 40 50 100 5 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 (mm/s) (V = 700 mm/s for 15, 20) CXSJM CXSJL Graph (3) V = 600 (mm/s) CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 10 Mass m (kg) 10 0.1 CX2 0.1 CXW 6 6 CXT CXSJ 0.02 0.02 10 20 30

2 Phase Stepper Motor/Without Motor Brake Series LXS

0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 252 2 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section

Sine Rodless Cylinder Series REA/REB

speed (mm/s) Linear guide type (Double axis) CY1HT REAHT 926 Sine rodless cylinder Series REA/REB Maximum speed (300 mm/s) sensitive workpieces Maximum speed (600 mm/s) m/s 2 or less (REA) or 15 m/s 2 or less (REB) Cushion seal Linear guide type: REAHT (Double axis) REBHT (Double axis) Linear guide type: REAH (Single axis) REBH (Single axis) High Linear guide (Double axis) installed in the

Compact 5-Port Solenoid Valve

2 1.5 m 3 3 m SI unit output polarity, End plate type (S6m) Refer to page 63.

CJ2

6) B L F D Action S T Single acting/Spring return Single acting/Spring extend Standard CJ2 L S 16 45 R CDJ2 L S 16 45 C73 With auto switch R Number of switches With auto switch 2 1 n S n Built-in magnet Auto switch Port location on head cover Refer to the table below for selecting applicable auto switches.

Table of Contents

VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

Modular Design with Uniform Body Style

N S J M U Bracket (Option) D R C B V Q IN OUT 2 x P (Port size) A Clearance for maintenance G S N T U D M J AL30-D to AL40-06-D R C V Q IN OUT 2 x P (Port size) B A E Clearance for maintenance G AL50-D to AL60-D T N S J M D U Bracket (Option) R V Q C B IN OUT 2 x P (Port size) A Clearance for maintenance G 91 Lubricator AL20-D to AL60-D Series Semi-standard PC/PA bowl Metal bowl Metal bowl

7.5

maintenance Selectable between T-branch and straight type of communication connector EX510 Gateway system Serial transmission system M Max. 128 points (Input 64 points/Output 64 points) M All wires can be plugged into the connector units.

Electric Actuator with Integrated Guide

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 M Model 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Controller Connectors

S Couplers Series KK/KKH/KK13

3 Gasket M-5G2 T Electroless nickel plated KK3/4/6 i q u !3 !7 !1 r !6 t y !2 e !4 !5 !4 !5 !

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(For type 20 manifold) 10 M 1 SYJ3 2 5 M M3 Body ported 10 M SYJ3 4 5 M 1 Base mounted CE-compliant Clean series Port size Nil Q CE-compliant 3 port Nil: Without sub-plate M5: M5 port With sub-plate Note) CE-compliant: For DC only. Coil type Nil Standard With power saving circuit (24, 12 VDC only) T Power saving circuit is not available for W type.

MGP

M5 X 0.8 4.3 5.6 5.6 M5 X 0.8 Rc1/8 Rc1/8 40 16 18 26 8 10 12 64 83 93 8 9.5 9.5 10 8 10 10 M4 M5 M5 4.5 5.5 5.5 19 5 6 6 15 18 21 30 36 42 15 18 21 22 24 30 16 20 25 78 62 10.5 M5 X 0.8 M5 X 0.8 37.5 10.5 25 25, 50, 75, 100, 125, 150, 175, 200 78.5 62.5 11.5 M6 X 1.0 M6 X 1.0 37.5 13.5 28.5 WA WB Bore (mm) Standard stroke (mm) R S T U VA VB X XA XB YY YL Z 100 to 175st 100 to 175st 75st