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(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU15-D 5 0.004 0.012 0 0.043 1.5 18 21.2 25 3.2 34 48 36 29 3 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 12 CRBU2WU20-D 0.004 0.012 0 0.043 1.5 20 25 34.5 4 42 59 44 36 4 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 2 22 29 47.5 4.5 50 69 52 42 4.5 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8

AC

VBA200: Qb = 500 [l/min(ANR)] VBA400: Qb = 1100 [l/min(ANR)] Avoid pulsation Max. 0.05MPa NO VBA400 NO Judgement of flow rate Qb < Q YES VBA200 YES Can not get necessary pressure. L W Tc[s] = Select tank from table below.

Table of Contents

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 25 25 M5 x 0.8 depth 16 5.5 depth A port B port 11.5 10 g6 -0.005 -0.014 2 20 0 -0.030 4 6.5 10 30 45 Body B (mm) (90) h Keyway dimensions b l Body A l h (h9) b (h9) Series CRB2BW400 0.030 4 20 0 0.030 4 15 2-M5 x 0.8 Connection

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ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU15-D 5 0.004 0.012 0 0.043 1.5 18 21.2 25 3.2 34 48 36 29 3 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 12 CRBU2WU20-D 0.004 0.012 0 0.043 1.5 20 25 34.5 4 42 59 44 36 4 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 2 22 29 47.5 4.5 50 69 52 42 4.5 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8

Mechanically Jointed Rodless Cylinder Series MY1

MY1C16/20 Stroke (LL) L 4 x MM depth M 2 x 2 x B counterbore depth C LD through-hole PA LW QW NW PB PG Q + Stroke W M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) 1 NE LH PP QQ PP QQ RR SS RR SS H NH NC TT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) GA GA 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) Cushion needle (Hexagon socket head plug) G G GB M5 x 0.8 (Hexagon socket

0.4

C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 31 42 75 53 86 64 97 108 119 130 141 152 50 62.5 100 75 112.5 87.5 125 125 137.5 150 162.5 175 60.5

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

12.7 11 3 28.1 [35.1] P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4 5 DIN terminal (D, Y): 10-SYJ5 23-M5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 3 4 5 D Y Approx. 300 (Lead wire length) Applicable

5 Port Solenoid Valve Series VQZ1000/2000/3000

S0700 Electrical entry LO MO L-type plug connector without connector VQ M-type plug connector without connector Note) With light/surge voltage suppressor VQ4 Seal type 0 1 Metal seal A, B port size VQ5 Rubber seal Thread piping VQC Port size VQZ1000 VQZ2000 VQZ3000 Symbol M5 02 Function M5 x 0.8 VQZ Symbol Specifications DC 1/4 (0.35 W) Standard One-touch fitting (Metric size) Nil SQ (0.9

Air Cylinder

With air cushion GA WA GB WB 2 x P (Rc, NPT, G) Cushion valve, Width across flats WH W 10 With rod boot 8 8 8 IJ IJ e e JH f f l l JW ZZ + l + Stroke ZZ + l + Stroke h + l h + l 80, 100 (mm) Bore size Stroke range Rc, NPT port G port A AL B B1 C D E F FD FT FX H H1 I J K Standard Long stroke GA GB P GA GB P 20 Up to 200 201 to 1500 12 10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 40 13 14 8 12

5 Port Solenoid Valve

fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Max. 24 stations) 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 108 125 135.5 97 125 135.5 152 175 185.5 119 137.5 148 141 162.5 173 130 150 160.5 86 112.5 123 75 100 110.5 64 87.5 98 53

Air Cylinder

Material: Polyacetal One-touch Connecting Pin for Double Clevis Rod End Cap Material: Stainless steel Round type/CJ-CR Flat type/CJ-CF L Dd9 W2 W1 W H [mm] Part no. Applicable bore size A D L MM N R W Flat type Round type CJ-CF006 CJ-CR006 6 6 8 11 M3 x 0.5 5 8 6 [mm] CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

SQ1000/2000

L RUN SERIAL UNIT L ERR.

Electric Actuators

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

0.4

Note 2) L kit: Nil F P PC J Nil S F kit P kit (26P) P kit (20P) J kit (20P) L kit S kit q w Note) L kit: Nil F e r kit SE SSQ1000 No.

MY1

head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1CG MY1CG (mm) LH A B C G GA GB H K J LD L LL LW M MM N NC Model A B C G GA GB H K J LD L LL LW M MM N NC LH 6 16.2 6 M4 x 0.7 MY1C16 22.5 80 3.5 13.5 8.5 40 10 M5 x 0.8 3.6 80 40 54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100 50 58 M5 x 0.8 25 17 (mm) NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW MY1C16 MY1C20 NE NW PA

CRBU

The L dimension (maximum) is, as a rule, twice the size of the bolt. (Example: For M5 bolt: L max. = 10mm.) Applicable shaft configuration shaft J Size 10 is not manufacturable. The L dimension (maximum) is, as a rule, twice the size of the bolt. (Example: For M5 bolt: L max. = 10mm.) However, for the short end of shaft T: For M5 bolt: L max. = 7.5mm.

Smooth Cylinder/Low Speed Cylinder

CDQSXB20-30D CDQSXB12-5D 60 CQ-M5 x 60 L 30 CQ-M3 x 30 L 35D 10D 65 x 65 L 35 x 35 L 40D 15D 70 x 70 L 40 x 40 L 6.5 Example) CQ-M3x30 L 4 pcs. 6.5 45D 20D 75 x 75 L 45 x 45 L REA 50D 25D 80 x 80 L 50 x 50 L CDQSXB25-5D 30D Mounting bolt 40 55 x 55 L CQ-M5 x 40 L REB 10D CDQSXB16-5D 45 30 x 45 L CQ-M3 x 30 L 15D 10D 50 35 x 50 L x 35 L REC 20D 15D 55 40 x 55 L x 40 L 6.5 CY 25D 20D 60 45