Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-11-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.

Valve Single Unit

Triangle mark position Stations n 11 stations 12 13 14 15 16 17 18 19 20 stations 310.5 323 235.5 248 248 260.5 273 285.5 298 310.5 L1 L2 L3 L4 (Rail mounting hole pitch 12.5) 300 312.5 225 237.5 237.5 250 262.5 27.5 287.5 300 286.5 297 202.5 213 223.5 234 244.5 255 265.5 276 12 13 16.5 17.5 12 13 14 15 16 17 1-6-96 Base Mounted Series SX3000/5000 SS5X3-45PDStations U(26 pins) C4 C6 (Pitch

Sine Rodless Cylinder Series REA/REB

Select a bore size from Lo and Fn in Data (A). 50 40 20 30 40 50 20 30 Usable range Usable range Load Workpiece 10 10 5 5 Fn Alignment deflection absorbing mechanism 1 0 1 2 3 4 5 6 8 9 10 11 13 7 12 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Lo Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) 40 50 Selection Example 500 1000 Given a load drive resisting

Valve Single Unit

17.5 15.5 14 12 16.5 15 13 12 13 14 15 16 stations Stations n 11 stations 335.5 DIN rail 348 360.5 373 398 410.5 L1 L2 L3 L4 325 337.5 350 362.5 387.5 400 262 278 294 310 326 342 Manual override (Press and turn for the locking type.)

C85

5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 32 11 62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case of air cushion.

Basic type / Direct mount type Series CY3B/CY3R

1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400 50 300 30 200 100 10 20 30 40 50 Usable range 5 Usable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

Programless Controller Series LECP1

MNPN MPNP CN4 24 VDC for I/O signal 24 VDC for I/O signal CN4 1 Step Motor (Servo/24 VDC) Specific Product 1 COM+ COM+ 2 2 COM COM 3 3 IN0 IN0 4 4 IN1 IN1 5 5 IN2 IN2 6 6 IN3 IN3 7 7 RESET RESET 8 8 STOP STOP Load Load 9 9 OUT0 OUT0 10 10 OUT1 OUT1 11 11 OUT2 OUT2 12 12 OUT3 OUT3 13 13 BUSY BUSY 14 14 ALARM ALARM Input Signal Output Signal Name Contents Name Contents COM+ Turns on when the

VS 8-2/VS 8-4

Insulation resistance M/km, 20C 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 5 or more Note) The minimum bending radius of the D-sub connector cables is 20 mm.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

5.5 5.5 11 H (NN 1) x H G Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6L-10 13-/22-MXS6L-20 13-/22-MXS6L-30 13-/22-MXS6L-40 13-/22-MXS6L-50 782 MXS 1322Air

15

42 M2.5 x 10 1.0 M3 x 8 0.63 8 7.5 NY M3 x 0.5 5.5 45 30 5 11 42 M2.5 x 10 1.0 M3 x 8 0.63 8 7.5 NX M4 x 0.7 7 46 30 3.7 11 42 M2.5 x 10 1.0 M3 x 8 0.63 8 4.5 NM2 3.4 7 31 30 3.7 8.5 42 M2.5 x 10 1.0 M3 x 8 0.63 6 4.8 25 NZ M5 x 0.8 8.5 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 14 4.5 NY M4 x 0.7 7 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 11 4.5 NW M5 x 0.8 8.5 70 50 4.6 13 60 M4 x 12 2.5 M4

C85

5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 62 32 11 126 6 115 13 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 65 32 11 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case of air cushion.

CRB2/CRBU2/CRB1

Note) These items (No. 11, 13, and 14) consist of auto switch unit and angle adjuster. Refer to pages 84 and 85 for detailed specifications.

Vacuum System Peripherals:

ZSE30/ZSE40/ZSE5B 13-14-9 2. ZSE6B/ZSE3/ZSE1/ZSE2 13-14-10 3. PS1100/ZSP1/PSE200/530 13-14-11 Misc. Pressure gauge for vacuum: GZ46 13-14-12 Pressure Gauge for Vacuum Related Products: Air Line Equipment/Modular Type 1. Air filter: Series AF 13-14-13 2. Regulator: Series AR 13-14-13 3. Filter regulator: Series AW 13-14-13 4.

MNB

19.5 12 13 54 32 to 500 22 17 6 1/8 8.5 10 46 97 45.5 12 32.5 83 13 13 30 27 16 13 63 40 to 500 30 22 8 1/8 10 14 52 104 52.5 12 38 91 14 16.5 35 32 20 14 75 50 to 600 35 27 11 1/4 12.5 18 65 120.5 58.5 15 46.5 104.5 15.5 19 40 32 20 14 90 63 to 600 35 27 11 1/4 17.5 18 75 134.5 68 12 56.5 119.5 16.5 23 45 37 25 20 102 80 to 750 40 32 13 1/4 22 22 95 169 81 18 72 150 19 33 45 37 30 20 116

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock. 576 Programless Controller LECP1 Series Controller Details e r No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 9 SOL.B 22 SOL.A 10 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 Positive COM spec. Negative COM spec. 1021-VV5Q21 The total number of stations is tabulated starting from station one on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 9 SOL.B 22 SOL.A 10 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 Positive COM spec. Negative COM spec. 1021-VV5Q21 The total number of stations is tabulated starting from station one on the D-side.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Valves are numbered from the D side according up to the number of stations. 939 Series VQZ1000/2000/3000 Dimensions: VQZ3000-SA: EX510 Gateway System Serial Transmission System U side D side L4 L3 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" 65.5 11 L5 (For 1/4) Manual override Output no. 16.5 + + 11.5 13 11 + + 1/4 [4(A), 2(B) port] 9 7 1/4 [1(P)

Table of Contents

9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

One-touch Fittings

3/8 KQ2T06-03GS1 17 10.4 9.7 12 10 15.5 24.1 24.2 13.3 13.9 11 4.5 27.4 D2 D1 1/8 KQ2T08-01GS 10 13.2 13 10 16.4 18.7 22.2 14.2 14 14 4.5 7.9 H 1/8 3 KQ2T08-01GQS 12 13.2 13 12 17.2 23.5 27 14.2 26.3 18.2 6 11 8 1/4 KQ2T08-02GS 14 13.2 13 12 17.2 25.4 27.3 14.2 26.3 18.2 6 19.4 3/8 KQ2T08-03GS 17 13.2 13 12 17.2 25.5 27 14.2 26.3 18.2 6 26.5 Connection thread (With sealant) 1/8 KQ2T10