Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: -, Air Supply Port One-Touch Fitting Size: -, Application: Manifolds, Operating Pressure Range(MPa): 0.2～0.5, Operating Temperature Range(°C): 5

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Fitting Elbow, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: One-Touch Fitting Elbow, Air Supply Port One-Touch Fitting Size: Ø4, Application: Individual Item, Operating Pressure Range(MPa): 0.2～0.5, Operating

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: -, Air Supply Port One-Touch Fitting Size: -, Application: Manifolds, Operating Pressure Range(MPa): 0.2～0.5, Operating Temperature Range(°C): 5

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Fitting Elbow, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: -, Air Supply Port One-Touch Fitting Size: -, Application: Manifolds, Operating Pressure Range(MPa): 0.2～0.5, Operating Temperature Range(°C

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Fitting Elbow, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: One-Touch Fitting Elbow, Air Supply Port One-Touch Fitting Size: Ø4, Application: Individual Item, Operating Pressure Range(MPa): 0.2～0.5, Operating

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: -, Air Supply Port One-Touch Fitting Size: -, Application: Manifolds, Operating Pressure Range(MPa): 0.2～0.5, Operating Temperature Range(°C): 5

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Fitting Elbow, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: One-Touch Fitting Elbow, Air Supply Port One-Touch Fitting Size: Ø4, Application: Individual Item, Operating Pressure Range(MPa): 0.2～0.5, Operating

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: -, Air Supply Port One-Touch Fitting Size: -, Application: Manifolds, Operating Pressure Range(MPa): 0.2～0.5, Operating Temperature Range(°C): 5

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: -, Air Supply Port One-Touch Fitting Size: -, Application: Manifolds, Operating Pressure Range(MPa): 0.2～0.5, Operating Temperature Range(°C): 5

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -78, Air Consumption Flow Rate(l/min): 28, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø4, Application: Individual Item, Operating Pressure Range(MPa): 0.2～0.5, Operating

HRX-OM-T004

(Response): 01030200EE0C [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address

HRX-OM-R028

(Response): 01030200EE0C [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address

-fl Seies

O-ring O, @, O Non plug-in type ME263LR-o2-1 Plug-in type Conneclor lead wires With terminal block. o @ End plate (kit) asJY ME272LR-02-1 End Plate (U) lD, End plate (D) (D ,Clamp O ' O o-rins G), O, O, O. Non plug-in type 1!

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Metal Seal/Rubber Seal Series VQ Body Ported

C6 C8 One-touch fitting for 6 One-touch fitting for 6 01 02 C6 C8 Name plate N Note) When two or more symbols are specified, indicate them alphabetically.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

O-ring O, @, O Non plug-in type ME263LR-o2-1 Plug-in type Conneclor lead wires With terminal block. o @ End plate (kit) asJY ME272LR-02-1 End Plate (U) lD, End plate (D) (D ,Clamp O ' O o-rins G), O, O, O. Non plug-in type 1!

HRX-OM-M091

(Response): 01030200EE0C [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address

HRX-OM-Q033

(Response): 01030200EE0C [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address

HRX-OM-S010

(Response): 01030200EE0C [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.