Vacuum

50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirens , Pad Diameters @2 . s4 .

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Profile Design ISO/VDMA Air Cylinder Series CP95

KK SW G BG I8 VD VA WA WB WH ZZ ZY E R I2 I9 32 22 30 12 G1/8 13 M6 6 M10x1.25 10 27 16 94 40 24 35 16 G1/4 14 M6 6.5 M12x1.25 13 27 16 105 50 32 40 20 G1/4 15.5 M8 8 M16x1.5 16 31.5 16 106 63 32 45 20 G3/8 16.5 M8 8 M16x1.5 16 31.5 16 121 80 40 45 25 G3/8 19 M10 10 M20x1.5 21 38 16 128 100 40 55 30 G1/2 19 M10 10 M20x1.5 21 38 16 138 4 4 4 6.5 26 146 190 46 32.5 15 4 4 4 4 9 30 163 213 52

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

NCA1

Proper use is the users responsibilty. 52 Series NCA1 Actuator Precautions 3 Be sure to read before handling. Mounting Cushion Caution Caution 1. Be certain to align the rod axis with the load and direction of movement when connecting.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

54 67 78 FH 13 16 17.5 FW 66 80 91 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

54 67 78 FH 13 16 17.5 FW 66 80 91 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 6 6 7 12 12 15 15 7 10 12 14 17 20 26 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-

17

(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

High Power Cylinder Series RHC

A NF Width across flats KA C S + Stroke H B ZZ + Stroke (mm) A AL B C D EA FA FB GA H E Bore size (mm) 50 0 70 53 20 50 0.062 62 23 10 16 80 35 32 63 0 55 0.074 20 58 80 60 10 16 80 23 35 32 80 0 75 25 61 95 65 0.074 90 23 10 20 37 40 100 0 63 116 90 30 80 0.074 20 95 25 10 40 37 H1 J JC K KA MM NE NF S P WH ZZ Bore size (mm) 50 M10 x 1.5 thread depth 20 M18 x 1.5 1/2 6.8 to 11.3 305 25

High Power Cylinder Series RHC

A NF C H S + Stroke B ZZ + Stroke (mm) H GA 80 FB 16 FA 10 EA 23 D 62 C 20 B 53 A E 0 Bore size (mm) Stroke range (mm) Effective thread length 50 70 35 32 250 to 1000 50-0.042 0 80 16 10 23 58 20 60 80 35 32 250 to 1000 63 55-0.074 0 90 20 10 23 61 25 75 95 40 37 250 to 1000 80 65-0.074 0 95 20 10 25 63 30 90 116 40 37 250 to 1000 100 80-0.074 J ZZ P 6.8 to 11.3 WH 305 S 1/2 H1 58 NF 215

RHC

252 1/4 192 15.0 13 M22 x 1.5 30 26 M8 x 1.25 33.5 22 5 30.5 43 20 5.8 to 8.8 257 1/4 193 19.6 17 M24 x 1.5 36.9 32 M10 x 1.25 37 27 5.5 25.5 39 25 265 3/8 195 19.6 17 M30 x 1.5 43.9 38 M10 x 1.25 43.5 27 5.5 28.5 36 32 6.8 to 11.3 277 3/8 201.5 25.4 22 M33 x 2.0 47.3 41 M14 x 1.5 52.5 30 7.5 23 32 40 50 to 100 Rc P EA Rc P EA GA NE 8-J GA WH ND H1 MM I D E E Effective thread K FA JC JC FB

HRX-OM-T004

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-R028

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Vacuum pressure[kPa] Suction flow [L/min(ANR)] 52 - Doc. no. ZB-OM00201-B Flow Characteristics Curve How to read the flow characteristics curves of ejector/vacuum pump system The flow characteristics curve shows the relationship between the vacuum pressure and the suction flow of the ejector/vacuum pump system.

Metal Seal/Rubber Seal Series VQ Body Ported

Tightening torque VQ1000-FPG-FB 0.22 to 0.25 Nm 2-4-89 Body Ported Series VQ1000 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 2-9-2. Light/Surge Voltage Suppressor Manual Override Caution Warning The standard model is equipped with an indicator light and surge voltage suppressor.

HRX-OM-M091

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-Q033

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-S010

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Symbol 02 Stations Note 2 stations Double wiring Note 1) w SI unit specifications 16 02 16 stations y SUP/EXH block assembly 2 stations Symbol Communication connector Number of outputs Specified layout Note 2) (Available up to 32 solenoids) Protocol Nil R Internal pilot External pilot 20 0 QA QB NA NB NC ND VA VB DA DB FA FB

Transfer

FC Shock absorber Cushion needle EC FH EY h 3.5 4.5 4.5 EA 10 12 15 EB 20 25 31 EC 6.5 8.5 9.5 ED 60 74 94 EY 53.5 67 81.5 FA 46.7 67.3 67.3 FB 33 43 43 FC 13 17 17 FF 6 6 6 FH 12 16 16 TA 7 12 12 TT Max. 16.5 Max. 20 Max. 25 Applicable cylinder ML2B25 ML2B32 ML2B40 D-X 717 ML2B Series Dimensions Side support A MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B