Series VQ Base Mounted Metal Seal/Rubber Seal

(Including the mounted valves. ) 1.10-148 Manifold optionsSV5Q11OP, #1 to #3 VQ 1000/2000 Plug-in Unit Base Mounted EXH block base assembly VVQ1000-19A-(C3, C4, C6, M5) F P L Manifold block ass'y Electrical entry F1 F2 F3 P1 P2 P3 L0 For F kit (2 to 12 stations)/Double wiring For F kit (13 to 24 stations)/Double wiring For F kit (2 to 24 stations)/Single wiring For P, G, T, S kit (2 to 12

90

3 ON Vacuum pressure decreased (P3) OFF Vacuum pressure (P1) reached again 4 OFF Vacuum maintained 5 OFF Release of workpiece after adsorption and transfer() 6 OFF Pressure at which adsorption completed reached (P2) Check valve ( Release valve ON) Features 1 All in One Vacuum Unit Series ZK2 reduced!!

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

Compact Manifold Regulator Series ARM5

O-ring 12 1 13636A 13646A 13636B (Except O-ring) 13646B (Except O-ring) assembly Diaphragm assembly Weather resistant NBR 3 2 Bracket A 1349161A 131515A Bracket Bracket 2 1 set Valve assembly Brass, HNBR 4 Bracket B 13639A 13649A 13 Hex. socket head cap screw Valve spring Stainless steel 5 136310 136410 2 Valve O-ring NBR 6 11.5 x 8.5 x 1.5 14.5 x 10.5 x 2 12 1 O-ring O-ring NBR 7 JISB2401 P3

Series VS

4 TERMINAL STRIP 22 POSITION TERMINAL STRIP 22 POSITION TERM P7=OUT 6 TERM P7=OUT 6 TERM P1=OUT 0 TERM P1=OUT 0 TERM P13=OUT 12 TERM P13=OUT 12 TERM P19=PE TERM P19=PE TERM P20=ITV +24 TERM P20=ITV +24 TERM P8=OUT 7 TERM P8=OUT 7 TERM P14=OUT 13 TERM P14=OUT 13 TERM P2=OUT 1 TERM P2=OUT 1 TERM P21=ITV_IN0 TERM P21=ITV_IN0 TERM P9=OUT 8 TERM P9=OUT 8 TERM P15=OUT 14 TERM P15=OUT 14 TERM P3

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.