pa

Type) Dimensions: Air Operated Type PA3000 115 68 85 VC VDW 105 4-7 7.5 VQ FLUID OUT Rc 3/8 5.5 VX2 AIR SUP(P1) Rc 1/4 VX FLUID OUT PROCESS PUMP VX3 P1 2 VXA 90 74.5 FLUID I N VN P2 44.5 3 32 Rc 1/4 AIR SUP(P2) LVC 100 130 LVA FLUID IN Rc 3/8 LVH LVD PA5000 179 4-9 LVQ LQ LVN 90 90 TI/ TIL PA FLUID OUT Rc1/2, 3/4 AIR SUP(P1) Rc 1/4 112 PAX 56 165 56 PB RESET FLUID OUT PROCESS PUMP 167 P1

VQ7-6/7-8

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

3

= 1 MPa P1 = 0.8 MPa P1 = 0.6 MPa 30 30 Example 2 20 20 P1 = 0.5 MPa P1 = 0.4 MPa Example 1 10 10 P1 = 0.3 MPa P1 = 0.2 MPa 4 5 5 4 P1 = 0.1 MPa 3 3 2 2 1 1 0.001 0.01 0.1 0.002 0.003 0.02 0.03 0.04 0.004 Pressure differential P [MPa] Graph (2) Flow rate characteristics Example 1) Obtain the pressure difference when water [15 L/min] runs through the solenoid valve with a Kv = 1.5 m3/h.

SMC Basic Pneumatics

v=l t P"p1 + 147 Where V = capacity of rceiver Q = compressor outpul (clm) Pa = atmosphric plsssurc P1 = compressor outsul pressure V = (600'14.7y(10O+14.7) =77lf as a minimum number, a prudent suggestion might begin with 120 ft".

CEx-OMQ0013

P1 No.

Title not found

P1, L1 C2 S/S. P1, L1 C3 S/S. P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S . P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S . P2, L5 RT1-3-1 S/S . P2, L5 X1 S/S . P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No.

IR1000/2000/3000

Note 2) Replacement part numbers correspond to the item numbers in the figures. 14-5-18 18 Precision Regulator Series IR1000/2000/3000 Dimensions IRV1000-01 IRV2000-02 53 55 16.5 2.3 30 22 2.3 41 (R) F.R.L.

Compact Vacuum Unit

Table 3 Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs. Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs. !3 Pressure sensor assembly Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs.

Pin Clamp Cylinder Series CKQ/CLKQ

Clamp arm 0.05 MPa or less Lock at extended direction (unclamp direction) 1.0 MPa Round, Diamond Guide pin shape Locking direction Refer to Selection in page 22 regarding detailed specifications of the clamping force, etc.

Micro Mechanical Valve Series VM1000

32 16 30 25 2 x 1/4 2 x 5.5 mounting hole 40 * 0.5 MPa supply F .O.F .* 52 N T.T. 5.8 mm 22 Series VM100/200 Specific Product Precautions 1 Be sure to read before handling.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

VQC

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area [mm] P: Pressure drop rate (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

I

ISE When the values of P1 and P2 are the same or when P1>P2 within three digits, the hysteresis will be automatically three digits for the set value of P1. Window comparator mode: ZSE The hysteresis is two digits, so separate P1 from P2 by five digits or more and set them.

Coolant Valve

32 22 32 28 40 28 40 33 50 33 50 45 65 56 80 3 8 0.7 0.5 1 2 3 4 0.8 1.0 1.2 1.4 1 1 4 1 2.2 2.4 5.0 5.2 32 1 2 1 3.6 3.8 Symbol 6.8 7.0 40 Valve type Operation N.C.

5 Port Solenoid Valve Series VQZ1000/2000/3000

-04 KQ2P-06 KQ2P-08 KQ2P-10 L A Dimensions (mm) Applicable fitting size d Model A L D D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 Silencer (for manifold EXH port) Silencer is installed in the manifold EXH port. 63 38 22 13 Silencer part no.

HRX-OM-X010

Connect the communication cables with P1 and P2.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Series VS

POSITION TERMINAL STRIP 22 POSITION TERM P7=OUT 6 TERM P7=OUT 6 TERM P1=OUT 0 TERM P1=OUT 0 TERM P13=OUT 12 TERM P13=OUT 12 TERM P19=PE TERM P19=PE TERM P20=ITV +24 TERM P20=ITV +24 TERM P8=OUT 7 TERM P8=OUT 7 TERM P14=OUT 13 TERM P14=OUT 13 TERM P2=OUT 1 TERM P2=OUT 1 TERM P21=ITV_IN0 TERM P21=ITV_IN0 TERM P9=OUT 8 TERM P9=OUT 8 TERM P15=OUT 14 TERM P15=OUT 14 TERM P3=OUT 2 TERM P3=OUT

ZSE3/ISE3

Note 3) Hysteresis mode: When the values of P1 and P2 are the same or when |P1| > |P2| within 3 digits, the hysteresis will be automatically 3 digits for the set value of P1. Window comparator mode: The hysteresis is 3 digits, so separate P1 from P2 by 7 digits or more and set them. 1 digit is the minimum pressure display unit. (See the table above.)

SZ3000

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min(ANR)] S: Effective sectional area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures