Precision Regulator

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. in minor or moderate injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Precision Regulator

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

VM

Piping options: Side piping, Bottom piping A variety of actuator types.

PSxx-OML0002CN

(A-B)/4 n_1=B+(A-B)/4 A= H_1=(A-B)/2 H_1=(A-B)/2 B= OUT2P_1n_1H_1P_2n_2H_2 1 -33No.PS-OML0002CN-G [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] -34No.PS-OML0002CN-G [F 7] 30 <> [F 7] [F 7] 30 () (ON) ON OFF ON -35No.PS-OML0002CN-G [F 8] <> [F 8] [F 8] 0 45 -36No.PS-OML0002CN-G [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 38 -37No.PS-OML0002CN-G 1 2 OUT1 3 OUT1 4 OUT1

PSxx-OMG0005CN

NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) ripple -8No.PS-OMG0005CN-E 20 mm A PSE56 PSE56-28 1 (DC+) (LINE(+)) 2 3 (DC-) 4 (IN15 V) (LINE(-)) A A PSE200/PSE300 (ZS-28-C) 3M 37104

IR30-OM00013

2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

IR10-OM00007

N m (A) / N ( B) /N () m 2 ( A) m 2 N -5- 1 SUP OUT 2 %F.S. 3 , 4 R B(P36201023) G 2 3 Rc,F N IR1000G33-2-01 G33-P2-N01-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

adapter + Front protective cover M5 female thread/Rear ported D Note 3) M5R Piping port R1/8/Side ported 01 DIN rail adapter Note 5) R1/8 Piping adapter R Note 4) NPT1/8/Side ported N01 Note 3) Not available for piping specifications of 01 and N01.

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

This is a legacy product, and replaced byZH05DSA-N01-N01-N01, VACUUM EJECTOR, 1/8 SUP, VACUUM SERIES, ZH VACUUM EJECTOR, AD, ZH NOZZLE SIZE 0.5, .10582 lb

Compact Manifold Regulator Series ARM5

Note) A standard model is equipped with a backflow function.

Digital Pressure Switch

Normal output Reversed output P_1 = A-(A-B)/4 n_1 = B+(A-B)/4 A = Max. pressure H_1 = (A-B)/2 H_1 = (A-B)/2 B = Min. pressure The set values of OUT2 become as follows "_", i.e. "P_2", "n_2" and "H_2".

100

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Pressure Sensor

-100 kPa 100 kPa For positive pressure -0 to 1 MPa 0 1 MPa -0.1 MPa -13No.PS-OMG0004-D Dimensions PSE54(A)M3 M5 PSE54(A)-M3 PSE54(A)-M5 A 10.8 11.5 B 3 3.5 PSE54(A)01 N01 PSE54(A)R04 R06 PSE54(A)-R04 PSE54(A)-R06 A 4 6 B 18 20 PSE54(A)-IM5 PSE54(A)-IM5H -14No.PS-OMG0004-D Revision history A: For B: Complete revision C: Limited warranty and Disclaimer and measurement laws are added.