Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
SI Unit: E (EtherNet/IPâ„¢), End Plate: 4 (M12 power supply connector, IN/OUT, A-coded, Pin arrangement 1), I/O Unit Stations: None, Electro-pneumatic regulator stations: 2 (2 Stations), P, E Port Entry: F (Both Sides, Built-in Silencers)
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit). The series may be used as either a selector valve, or a divider valve. It is vacuum applicable up to –101.2kPa. Series VP3145/3165/3185 is a large size, 3 port solenoid valve with a rubber seal. It is possible to use the series in vacuum
SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit). The series may be used as either a selector valve, or a divider valve. It is vacuum applicable up to –101.2kPa. Series VP3145/3165/3185 is a large size, 3 port solenoid valve with a rubber seal. It is possible to use the series in vacuum
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
Function: 1 (2 Position Single), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Base Mounted w/Sub-plate 1/4, Body Ported 1/4), Thread: T (NPTF)
Function: 3 (3 Position Closed Center), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Base Mounted w/Sub-plate 1/4, Body Ported 1/4), Thread: T (NPTF)
Function: 1 (2 Position Single), Body Style: 0 (Base Mounted Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 03 (Sub-plate Plug-in 1/8, Non Plug-in 3/8, Direct Ported P,A,B Ports 3)
Function: 4 (3 Position Exhaust Center), Body Style: 0 (Base Mounted Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 03 (Sub-plate Plug-in 1/8, Non Plug-in 3/8, Direct Ported P,A,B Ports 3), Thread: T (NPTF
Function: 1 (2 Position Single), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal 1/2, Non Plug-in Standard 1/2), Thread
Function: 3 (3 Position Closed Center), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 03 (Sub-plate Plug-in Terminal 3/8, Non-plug-in Standard 3/
Function: 1 (2 Position Single), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: 02 (Base Mounted w/Sub-plate 1/4 Side Piping)
Function: 1 (2 Position Single), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: 02 (Base Mounted w/Sub-plate 1/4 Side Piping), Thread: T (NPTF)
Series: 7000 (SY7000), Port Size: 2 (SY7000 3/8 inch, SY9000 1/2 inch), Thread Type: F (G)
Series: 9000 (SY9000), Port Size: 2 (SY7000 3/8 inch, SY9000 1/2 inch), Thread Type: F (G)
This is a legacy product. Please contact us for the latest version.sales@ocaire.com