1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

Speed Controller with Uni One-touch Fitting AS Series

Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 Control type 5 32" 04 06 08 10 12 03 05 07 09 11 13 3 16" AS-FG Meter-out Meter-in 0 1 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630. Use 1/8" tube.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Speed Controller with One-touch Fittings

Made to Order Body size 100 200 205 300 400 M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 Metric size 02 23 04 06 08 10 12 Inch size 01 03 07 09 11 13 Lock nut option 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

LEC-OM069xx

1 1 Outline 1.

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

JXCx-OMX0009

0 0 0 0 16 10 0 0 0 1 0 0 0 1 17 11 0 0 0 1 1 1 1 0 30 1E 0 0 0 1 1 1 1 1 31 1F 0 0 1 0 0 0 0 0 32 20 0 0 1 0 0 0 0 1 33 21 0 0 1 1 1 1 1 0 62 3E 0 0 1 1 1 1 1 1 63 3F 0 1 0 0 0 0 0 0 64 40 0 1 0 0 0 0 0 1 65 41 0 1 1 1 1 1 1 0 126 7E 0 1 1 1 1 1 1 1 127 7F 1 0 0 0 0 0 0 0 128 80 1 0 0 0 0 0 0 1 129 81 1 1 1 1 1 1 1 0 254 FE 1 1 1 1 1 1 1 1 255 FF 122 - 23.3 Installation 1 byte data Please

JXCx-OMT0062

0 1 0 0 0 0 16 10 0 0 0 1 0 0 0 1 17 11 0 0 0 1 1 1 1 0 30 1E 0 0 0 1 1 1 1 1 31 1F 0 0 1 0 0 0 0 0 32 20 0 0 1 0 0 0 0 1 33 21 0 0 1 1 1 1 1 0 62 3E 0 0 1 1 1 1 1 1 63 3F 0 1 0 0 0 0 0 0 64 40 0 1 0 0 0 0 0 1 65 41 0 1 1 1 1 1 1 0 126 7E 0 1 1 1 1 1 1 1 127 7F 1 0 0 0 0 0 0 0 128 80 1 0 0 0 0 0 0 1 129 81 1 1 1 1 1 1 1 0 254 FE 1 1 1 1 1 1 1 1 255 FF 110 - 22.3 Installation Remote register

JXCx-OMT0061CN

) 2 2 3 3 4 READY 4 5 ALARM 5 6 6 7 7 0 0 8 8 9 9 A A () B B C C D D 1 E E 2 F F 0 1 F0 1 71 () F8 2 F0 2 F0 (1 )*2 (2 ) *1 3 F0 3 F0 ()*2 *1 RWw0,bit4F: 12 *2 RWw0,bit4F: 93 - (2)[IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP

Vacuum Unit Ejector / Vacuum Pump System

KQ2P 06 Model and Dimensions Symbol Applicable size d A L D Weight (g) Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4 18 35 8.5 1 Orange 09 5/16 20.5 39 10 2 Orange -40No. ZK2-OM00201 8. Maintenance 8.1.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LQ 2 U 03 Tubing size Tubing O.D. 1/8", 3 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Body class Applicable fitting Symbol 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 19 25 Type of fitting Applicable fitting LQ2 LQ1 Symbol Nil 1 2 Body class Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Applicable fitting 3 LQ2 LQ2 4 LQ1 Type of part Symbol U B N Type of

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Note 1) Body size AS-F AS-F With indicator Metric size Inch size 2 1/8, 1/4 3 3/8 4 1/2 Type Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" TMH 2 Elbow 04 4 06 6 08 8 10 10 12 12 16 16 ASD Control type Note) AS 0 Meter-out 1 Meter-in Indicator window direction AS-FE Note) Meter-out and meter-in types can be visually identified by color of the knob

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

Quick Exhaust Valve Series AQ

-07 AQ240F-07-00 13.7 15.4 6.2 40.7 8 10.0 1/4" 1/4" 12 6 12 40.7 6.2 15.1 27.3 13.7 13.7 AQ340F-07-07 AQ340F-07-00 16.8 20.3 7.1 52.2 13 11.8 1/4" 1/4" 13.2 11 13.2 52.2 7.1 20.0 33.1 16.8 13.7 557

Quick Exhaust Valve Series AQ 1

-00 AQ240F-07-07 13.7 13.7 15.4 6.2 13.7 27.3 40.7 8 10.0 15.1 6.2 1/4" 12 6 1/4" 12 40.7 AQ340F-07-00 AQ340F-07-07 16.8 20.3 13.7 16.8 7.1 52.2 33.1 20.0 13 11.8 1/4" 13.2 11 1/4" 13.2 7.1 22.2 15-12-4

LEC-OM02704CN

1][2]) [1][2] [0][0] 8 [0][1] [4][0] [6][0] [6][1] [8][0] [8][1] [C][O] 14 11 14 (4) ([3][3]) [3][3] [1][0] 4 [1][1] 1 [1][2] 2 [1][3] 3 [1][4] 4 [1][5] 5 [2][0] 8 [2][1] 1 [2][2] 2 [2][3] 3 [2][4] 4 [2][5] 5 (5) ([0][2][3][5]) [0][2] [0][0] 4 14 12 14 [3][5] 00 16 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 1 0F ABS 10 11 80 12 81 82 83 84 85 86 87 88 89 8A 8B

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

One-touch Fittings Series KQ2

Weight (g) D L A M 5 32 3 16 1 4 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 KQ2R01-03 KQ2R01-05 KQ2R01-07 KQ2R03-05 KQ2R03-07 KQ2R05-07 KQ2R05-09 KQ2R07-09 KQ2R07-11 KQ2R09-11 KQ2R09-13 KQ2R11-13 7 32 32 24 19 17 14 4 9 8 9 7 2 9.6 34.5 18.5 17.5 17 1 8 15.5 2.5 9.2 34 10 34 34.5 34.5 36.5 37 39 40 41 42.5 5 32 16 17.5 3 10.4 11.4 10.7 18.5 18 18.5 18 3 16 16.5 3.5 1 4 12.5 17 4.6 5 16 14 18.5