Valve Single Unit

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

l

2 !3 !4 !5 !6 !7 !8 !

Air Cylinder Series CS2 ø125, ø140, ø160

Reed switch 3-wire (NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire (NPN) 3-wire IC circuit Terminal conduit 5 V, 12 V 12 V Relay, PLC Yes IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 24 V 12 V Grommet IC circuit 5 V, 12 V Water resistant (2-color indication) IC circuit 12 V 5 V, 12 V Diagnostic indication (2-color indication) A96

2

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 2 S G 1F M5 1 0 06 AS Body size 1 S Body size 2/3/4 2 2 0 S G 01 06 AS 1F With indicator Body size 2 1/8, 1/4 3 3/8 4 1/2 Made to Order Refer to page 512 for details. Type Seal method 2 Elbow Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.

0.55

N.C. 3.2 4 6 8 10 12 16 1P, 2A, 3R 1/8, 1/4 VP(A)300 X M5 1P, 2A, 3R 1/4, 3/8 VP(A)500 X 1/8 N.O. 1P, 2A, 3R 3/8, 1/2 VP(A)700 1. Remove the body from the sub-plate and reset the H mark on the body corresponding to the N.O. mark on the sub-plate as shown in the figure above. 2.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

After 0.8 s After 0.8 s Status Alarm No. Blank After 0.2 s Status Axis No. (2 digits) Alarm No. Alarm detail (1 digit) (2 digits) (1 digit) "n": Indicates that an alarm is occurring. 4 11 4.

LEC-OM07605CN

PL17] 27.2 (1) ON (2) (2) ( ) [Pr. PL09] 27.3 (1) OFF ON OFF 27.4 [AL. 27.1] 27.5 27.6 27.7 8 22 8. 28 2 28.1 (1) LECSS2-T (2) (2) 2A 1 () 2A.1 (1) LECSS2-T 1-1 (2) (2) (3) (3) () 2A.2 [AL. 2A.1] 1-2 2A.3 1-3 2A.4 1-4 2A.5 1-5 2A.6 1-6 2A.7 1-7 2A.8 1-8 . 8 23 8. 2B 2B.1 (1) LECSS2-T 1 (2) (2) (3) (3) 2B.2 [AL. 2B.1] 2 30 30.1 (1) () ()[Pr.

SYJ300/500/700

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Not required Mounting orientation Unrestricted Shock/Vibration resistance m/s 2 Note 2) 150/30 Dustproof ( M8 connector conforms to IP65.)

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination

45

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

3 Port Solenoid Valve

2 t JIS symbol 2a 2a (N.C.) 3 1 2a (N.O.) 1 3 Double r w u e y q i !0 !1 r w u e y q i !0 !1 o o !2 !3 !2 !3 JIS symbol 2a 2b t t 2a SOL.b SOL.a (N.C.) 1 3 2b 2a 2b SOL.a SOL.b (N.O.) 3 1 Replacement Parts One-touch Fitting (Metric Size) Description No. Material Component Parts Port Port size Part no. No.

0.4

Note 2) S kit: 24 VDC only N (2) R (3) Note 1) D is specified for 2 position double. Note 2) Negative common specifications are not available for the S kit. Note 3) Except dual 3 port valves.

SQ1000/2000

2 Fitting assemblies> (For cylinder port) VVQ1000 50A C3 (For F, P, J, S kit) SSQ1000 2A 3 1 Bore size (For L kit) SSQ1000 2A 3 2 C3 C4 C6 M5 N1 N3 N7 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting M5 threads 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting Manifold mounting Nil E DIN rail mount type Direct mount type

7.5

S, R, RS) 1 2 Stations [External pilot spec.]

Air Cylinder: Standard Type Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube: ø180, ø200, ø250, ø300 Air-hydro: ø125, ø140, ø160

style Mounting CM2 Note) Item corresponding to Class 2 Pressure Vessel Act is 1.46 MPa.

45

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

AC Servo Motor Driver (Pulse input type/Positioning type ）

SIGNALS AND WIRING (Note 2) I/O signals in control modes Related parameter P P/S S S/T T T/P Pin No.