2

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

Table of Contents

VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ1000-1A-2 Note No.

Vacuum System Peripherals:

Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-1A Individual SUP spacer assembly: SY3000-38-3A SUP/EXH block assembly (for R): SX3000-51-6A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-3A SUP/EXH block assembly (for S): SX3000-51-7A SUP/EXH block assembly (for RS): SX3000-51-8A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH

Hydraulic Filters

AL-196H 04 06 08 10 12 16 20 24 28 32 04 06 08 10 12 16 20 24 28 32 JIS B2401-1A-G70 JIS B2401-1A-G35 AL-197H JIS B2401-1A-G90 JIS B2401-1A-G45 JIS B2401-1A-G50 JIS B2401-1A-G105 JIS B2401-1A-G55 AL-198H JIS B2401-1A-G65 Petroleum, Emulsion, Water-glycol FHIA N W JIS B2401-1A-G125 JIS B2401-1A-G70 AL-199H JIS B2401-1A-G80 JIS B2401-1A-G145 JIS B2401-1A-G95 AL-200H JIS B2401-1A-G100 JIS B2401

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

"S" option is not available.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.68 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P T I O N P A R T S A S S E M B L Y FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 2.69 SOLENOID

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01

VFS

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components VS4 System Solenoid valve Speed controller Silencer Tube bore x Length VQ7 Series VFS2000 AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) A T0604 x 1 m 1 8 Rc EVS Series VFS2000 AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) VFN B T1075 x 1 m 1 4 Rc Double Check Spacer/Specifications Can hold an intermediate cylinder

AC Servo Motor Driver (Pulse input type/Positioning type ）

) No alarm (ON) ALM (Malfunction) 2.5 s to 3.5 s 3 16 3.

VFR

How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) T0425

0.55

Applicable manifold base model VP300-25-1A VV3P3 Blanking plate assembly (With a gasket and two mounting bolts) VP500-25-1A VV3P5 VP700-25-1A VV3P7 VV3P3-41-051-02 VV3P5-42-053-03 How to Order Manifold Assembly (Example) Ordering example (VV3P3-41) VP344-5GZ1-B VP344-5GZ1-A VP300-25-1A Stations 3 2 1 D side U side VV3P3-41-051-02 1 set (Type 41, 5-station manifold base part no.)

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

C S S Motor Type S AC Servo motor Cable Content AC Cable Length (L) [m] SSCNET Cable S 0.15m L 0.3m K 0.5m J 1m 1 3m 3 c I/O Connector (For LECSS-S/LECSS2-T)-CS Driver Type LECSS S *LE-CSNS is 10126-3000PE (Connector)/ 10320-52F0-008 Shell kit of Sumitomo 3M Limited or equivalent goods.

New

VXD40S-3A-1A VXD40S-3A-1A VXD40S-3A-1A VXD40S-3A-1A VXD40S-3A-1A Air operated type VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A Solenoid valve type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 Air operated type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 VXF(A)25BA(B) VXF(A)26BA(B) VXF(A)26CA(B) VXF(A)26DA(B) VXF(A)27BA(B) VXF(A)28BA(B) Note) Spring

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note Description No. 02 C8 C10 SY760-1 Valve Includes 3pcs. of bushing assembly (SY7000-70-1A) U side Ports P, R: With 12 One-touch fitting Includes 3pcs. of bushing assembly (SY7000-70-1A) SY7000-75-1A 2 Supply/Exhaust block assembly Common for U & D sides (bushing assembly: SY7000-70-1A not included) SY7000-56-1A 3 End block assembly SY7000-70-1A 4 Bushing assembly Refer to page 7.

SZ3000

Supply/exhaust block assembly (6): SZ3000-50-1A-C6 External pilot block assembly (6): SZ3000-54-1A-C6 External pilot block assembly (4): SZ3000-54-1A-C4 [Note] SUP blocking disk: SZ3000-114-4A EXH blocking disk: SZ3000-114-4A (2pcs.

LEC-OM07605CN

PA23] STO IEC/EN 61800-5-2STO ON/OFF (MR Configurator2) SSCNET/H (MR Configurator2) (MR Configurator2) 1 8 1. 1.6 (1) LECS S 2 T5 S SSCNET/H ACT5, T6 T5 50W,100W ACT7 200W T7 ACT8 400W T8 (2) a) ACT9 T9* 750W * AC200VAC240V 50/60Hz 2 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R 1 9 1. bSSCNET (LECSS-S/LECSS2-T) LE-CSS-MR-J3BUSM cI/O (LECSS-S/LECSS2-T) 1 LE C S

o

ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

o

ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !