SY

SS5Y34, #1 (#1 + #5 + #6 + #7 + #17) SS5Y3-45FU-B .

Table of Contents

1 Non plug-in type VVF4000-3A-1 Plug-in type End plate (D side) assembly !

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Table of Contents

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

New

Operation sequence diagram 4 output points Two-time hitting only for CH2 ON for 1 sec. OFF for 2 sec. Stop signal ONt For CH1 OFFt CH2 OFFt CH3 Power supply ON time CH4 2 sec. tA tA 1 sec. 1 sec. OFFt 2 sec. 2 sec. 2 sec. 2 sec. 1 sec. 1 sec. 1 sec. 1 sec. 2 sec. Two-time hitting 1 sec. 2 sec. 1 sec.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Valve) DXT199-22-3A 1 pc. (Blanking plate assembly) DXT192-52-1-4A 3 pcs. (Connector assembly) DXT192-52-2-4A 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Port size M5 1/8 1/4 Series Assembly part no.

Table of Contents

2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

4 3 8 , 1 2 Port size 1 8 1 4 , 1 4 3 8 , Normally Open (N.O.)

Magnetically Coupled Rodless Cylinder

9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 2a 3a @0 @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

3, Steel ball AXT625-3A-10 Non plug-in type (For 10) (3) Note 1) For side ported Note 2) 1: A, B port size Rc 1/8, 2: A, B port size Rc 1/4 Note 3) Please contact SMC if parts except for 10/01T/01T1 are needed.

VFS

1 Non plug-in type VVF4000-3A-1 Plug-in type End plate (D side) assembly !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

2, Metal joint q, w, O-ring e, r, t, y, u VVFS5000-1A-2Plug-in type Non plug-in type VVFS5000-3A-1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly 11 End plate (D side) assembly Plug-in type Non plug-in type VVFS5000-3A-2 12 1217 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS6000 Model Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Flow characteristics (1

Basic type / Direct mount type Series CY3B/CY3R

9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 !3 !0 !1 !4 !2 y r i q 2a 3a @0 @4 @9 @6 !5 !6 !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 No. Description Material Note Component Parts No.

VFR

1, Metal joint q, w Plug-in type VVF4000-2A-1 End plate (U side) assembly VVF4000-2A-2 !1 End plate (U) !1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Short P3 and P4. 1 4 1.

LEC-OM07605CN

SSCNET/H(70ms) 36.1 (1) SSCNET SSCNET SSCNET LECSS2-T (2) (2) SSCNET SSCNET (3) (3) SSCNET SSCNET SSCNET (4) (4) SSCNET (5) (5) (6) (6) (7) (7) (8) (8) 8 31 8. 37 37.1 (1) LECSS2-T (2) (2) LECSS2-T 37.2 (1) LECSS2-T 3A 3A.1 (1) LECSS2-T 3E 3E.1 (1) J3 (MR Configurator2) "MRJ4(W)-B LECSS2-T LECSS2-T SSCNET/H SSCNET /H LECSS2-T SSCNET (2) [Pr.

MY1

Combination description Holder mounting bracket X416 1 2 1 1 1 1 1 1 1 X417 1 1 1 1 1 2 1 1 1 Nil W Z A L H AZ LZ HZ Nil W A L H A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH AL, AH AL, LH AH, LH A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH X416 on one side X416 on both sides X416 on one side, X417 on the other side X416 on A unit side X416 on L unit side X416 on H unit side