REA/REB

5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

VFS

override Direct manual override G 1/2 electrical entry G 1/2 electrical entry 5-Rc 3/8, 1/2, 3/4 5-Rc 3/8, 1/2, 3/4 ( ): Rc 3/4 ( ): Rc 3/4 3-8-89 90 Series VFS5000 2 position single/double, 3 position closed center/exhaust center/pressure center/double check Non Plug-in 2 position single: VFS5110-E, VFS5110-D 2-7 mounting hole 5-Rc 3/8, 1/2, 3/4 Rc 3/4: 3(R2), Rc 1/2: 5(R1) G 1 2 Applicable

NCA1

1/4 2.72 2 5/8 5 53/64 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1 1/2 1/2 7/8 3/8-24 4.5 2 1/4 0 1/2 1.57 1.18 5/8 1/2-13 2 1/16 1 3/8 2 7/16 2.34 4 1/4 2.72 2 5/8 5 53/64 Detachable Rear Clevis Type NC A1D (MP2 Mounting Style) (in) Bore (in) MM KK A AA B C CB CD CW D DD E EA EE F G J L LR M WF XD Y LF P ZD 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 3/8 3/4 1/2 1/2 9/16 1/4-28 2 0.3 3/8 3/8 1.26 1.1 3/

HEC_W-E

Indication of current temperature S V 2 5 . 0 C Indication range: -9.9 to 80.0 C Min. increment: 0.1 C M O D E Indicated content: #1 Temperature detected by internal temp. sensor #2 Temperature detected by external P V < 2 3 . 0 C # 2 temp. sensor (When the external sensor is not connected, HHH would be indicated.) S V 2 5 . 0 C M O D E #1 and #2 change when [ ] or [ ] is pressed. 2.

Modular F.R.L. Unit

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

JXCx-OMT0001CN

(14.2) (b) (8) 2 1 (a) (14) (18) B1 A1 (17.7) 6 5 (c) 2 1 A6 B6 15 16 L (11) (30.7) 12.4 [820m] (a) (b) L E C P -* A B-1 2 L A A-1 1 B B-2 6 ) 8 8m B A-2 5 COM-A/COM B-3 3 ) A 10m COM-B/ A-3 4 ) B 15m (c) Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 7 ) A A-5 6 () B B-6 9 B A-6 8 3 (14.2) (b) 2 1 (5.5) (14) (a) B1 A1 5 (17.7) 6 (c) 2 1 (18) A6 B6 (6.3) 16 15 L (11) (30.7) -82No.JXC-OMT0001CN-C

Table of Contents

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Air Cylinder

15 30 Note 1) 15 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM2 D-M9lV 5 15 Note 1) 35 20 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CM3 D-A9lV 5 15 25 15 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9lWV D-M9lAV 10 15 Note 1) 35 20 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 D-C7l D-C80

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Vacuum Pad

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

5 y i !8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

2/3 Port Valve

2 !3 !4 !5 !

Table of Contents

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

3/5 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

LJ1H

B A C D 5 6 Standard Motor Series LJ1H10 Motor Output Slide Screw High Rigidity Direct Acting Guide 50W 20mm/20mm lead Horizontal Mount How to Order Stroke LJ1H101 SC 1 F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 1 2 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) F R L T B Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry Right

CA2

2 !3 !4 !5 !6 !7 !8 !

0.4

VQ 4/5 (R1)5 1 (P) 3(R2) B: Locking type (Tool reguired) 2-position double VQC 1/2 Metal Rubber 2(B) (A)4 VQC 4/5 (R1)5 1 (P) 3(R2) 2 B A 2-position double VQZ 2(B) (A)4 C: Locking type (Manual) (R1)5 1 (P) 3(R2) SQ 3-position closed center 2(B) (A)4 VFS 3 B A (R1)5 1 (P) 3(R2) VFR 3-position exhaust center 2(B) (A)4 D: Slide locking type (Manual) 4 VQ7 (R1)5 1 (P) 3(R2) 3-position pressure

Vacuum

See example on page 14. 0 1 ^ oo7 J 005 fl o.oe E ,* c', 001 .F o.ooz d0.005 _a z I z 0.003 0.002 I it E 0 001 0.0007 0.0005 0 . 2 0 . 3 0 5 0 . 7 I 2 3 5 7 1 0 Length of Tube L (m) 0 5 1 0 1 5 m 0 1 2 3 4 5 6 Suclion Flow Rals \ !