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humidity range Storage temperature range Storage humidity range Withstand voltage Insulation resistance Noise resistance 35 to 85%RH (No condensation) 10 to 60C (No condensation and freezing) 35 to 85%RH (No condensation) Between all of external terminals and the case: 500 VAC for 1 minute Between all of external terminals and the case: 50 M(500 VDC) 1000 Vp-p Pulse width 1 s, Rise time 1 ns

EX260-SDN_eng

MS status Description NS status Installation Green On Green On On-line state, The device has connections in the established state.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

(de-energized) 980 m/s2 in X, Y, Z directions 3 times each (de-energized) 500 Vp-p, Pulse width 1 s, Rise time 1 ns Connection Material Weight Power supply / Output connection: 8P connector, Sensor connection: 4P connector (e-con) Housing: PBT, Display: PET, Backside rubber: CR 60 g (Except for any accessories that are shipped together.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

St a nd a rd Spe cifi ca t io ns Fluid V9L9P",3!t9 lMin. operating pressurellq ?sr_(9q9q!

Wireless System

No wireless slaves connected (Non-restorable error in wireless communication) 4 W-NS Red/Green Wireless communication connection is under construction. (Pairing) Orange LED is ON.

Stations: 5 Stations, Port Size: C6 (ø6 One-touch Fitting), SI Unit: ZENN (EtherNet/IP, -COM), Number of Input Blocks: 5 (Input Block 5 pcs.), Input Block: 2 (M12, 4 Inputs), Input Block COM: N [NPN (-)], Option 1: N (Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 11 Stations, Port Size: C4 (ø4 One-touch Fitting), S Kit: SNA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 3 Stations, Port Size: C6 (ø6 One-touch Fitting), S Kit: SNB (PROFIBUS DP - 16 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 6 Stations, Port Size: C6 (ø6 One-touch Fitting), S Kit: SDA (EtherCAT - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 6 Stations, Port Size: N7 (ø1/4" One-touch Fitting), S Kit: SDA (EtherCAT - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 12 Stations, Port Size: C4 (ø4 One-touch Fitting), S Kit: SDA (EtherCAT - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 10 Stations, Port Size: C4 (ø4 One-touch Fitting), S Kit: SNA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 4 Stations, Port Size: C4 (ø4 One-touch Fitting), S Kit: SDA (EtherCAT - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 4 Stations, Port Size: C6 (ø6 One-touch Fitting), S Kit: SDB (EtherCAT - 16 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 8 Stations, Port Size: C6 (ø6 One-touch Fitting), S Kit: SDA (EtherCAT - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 02 Stations, Port Size: N7 (ø1/4"), Cable Length: 1 [Lead Wire (25 Cores) 1.5 m Lead Wire], Option 1: N (Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 09 Stations, Port Size: N7 (ø1/4"), Cable Length: 1 [Lead Wire (25 Cores) 1.5 m Lead Wire], Option 1: N (Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 06 Stations, Port Size: C6 (ø6 One-touch Fitting), Cable Length: 1 [Lead Wire (25 Cores) 1.5 m Lead Wire], Option 1: N (Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 04 Stations, Port Size: C6 (ø6 One-touch Fitting), Cable Length: 1 [Lead Wire (25 Cores) 1.5 m Lead Wire], Option 1: N (Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 6 Stations, Port Size: N7 (1/4" One-touch Fitting), Kit Name: SD0 (Serial Kit without SI Unit), Unit COM: +COM, Option 1: N (Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)