OMU0023 (a) Alphanumeric characters (capital / small letters) (b) Special characters (BS, space, TAB, comma, full stop, hyphen) (c) Line-break code (CR + LF) (3) ID When communication is established between the Card Motor controller and upper level device such as a PLC, a request will be received and a response will be sent only when the pre-set Card Motor controller ID matches with the controller
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix
BF 9 Base-Mounted Type Plug-in Unit Series VQC1000/2000 1in = 25.4mm VV5QC11 S Kit (Serial Transmission Kit: EX250) (L3) (L4) L2 5.5 111 L1 21 63 P = 10.5 28 65 (12) 13 1.5 1.5 Indicator light Manual override (5.5) 93.5 (35) 66 75 37.5 Approx. 2 Approx. 4 Input block Mounting hole for 6-M4 SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-C8 3(R) port DIN rail clamp screw 0 BUS 62.5 1 60
BF 9 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 S Kit (Serial Transmission Kit: EX250) (L3) (L4) L2 5.5 111 L1 21 63 P = 10.5 28 65 (12) 13 1.5 1.5 Indicator light Manual override (5.5) 93.5 (35) 66 75 37.5 Approx. 2 Approx. 4 Input block Mounting hole for 6-M4 SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-C8 3(R) port DIN rail clamp screw 0 BUS 62.5 1 60 (12) 40.5 2 PWR 25
Stations: 6 Stations, Port Size: N7 (1/4" One-touch Fitting), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: D0 (DIN Rail Mount w/o DIN Rail)
Stations: 6 Stations, Port Size: N7 (1/4" One-touch Fitting), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: N (Name Plate)
Stations: 6 Stations, Port Size: N7 (1/4" One-touch Fitting), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: DN (DIN Rail Mount & Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)
Stations: 6 Stations, Port Size: N7 (1/4" One-touch Fitting), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: N (Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)
Stations: 6 Stations, Port Size: N7 (1/4" One-touch Fitting), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: DN (DIN Rail Mount & Name Plate)
Stations: 6 Stations, Port Size: N7 (1/4" One-touch Fitting), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: None, Option 2: RS (External Pilot, Silencer)
Stations: 6 Stations, Port Size: N7 (1/4" One-touch Fitting), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: D0N (DIN Rail Mount w/o DIN Rail, w/Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)
Stations: 6 Stations, Port Size: N7 (1/4" One-touch Fitting), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: B (Back Pressure Check Valve for All Stations)
Stations: 6 Stations, Port Size: N7 (1/4" One-touch Fitting), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: D0 (DIN Rail Mount w/o DIN Rail), Option 2: RS (External Pilot, Silencer)
Stations: 6 Stations, Port Size: 1/4" One-touch Fitting, Cable Length: 1.5m Cable 25 Pin, Option 1: Name Plate, Option 2: -
Stations: 6 Stations, Port Size: 1/4" One-touch Fitting, Cable Length: 1.5m Cable 25 Pin, Option 1: DIN Rail Mount & Name Plate, Option 2: Built-in Silencer, Direct Exhaust
Stations: 6 Stations, Port Size: 1/4" One-touch Fitting, Cable Length: 1.5m Cable 25 Pin, Option 1: DIN Rail Mounting, Option 2: Built-in Silencer, Direct Exhaust
Stations: 6 Stations, Port Size: 1/4" One-touch Fitting, Cable Length: 1.5m Cable 25 Pin, Option 1: Name Plate, Option 2: Built-in Silencer, Direct Exhaust
Stations: 6 Stations, Port Size: 1/4" One-touch Fitting, Cable Length: 1.5m Cable 25 Pin, Option 1: None, Option 2: Built-in Silencer, Direct Exhaust
Stations: 6 Stations, Port Size: 1/4" One-touch Fitting, Cable Length: 1.5m Cable 25 Pin, Option 1: DIN Rail Mounting, Option 2: -