Compact Guide Cylinder

V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 10 10 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 50 50 Load mass m [kg] Load mass m [kg] 10 10 3 3 10 50 51 100 101 200 100 101 200 10 50 51 Stroke [mm] Stroke [mm] 21 Model Selection MGPK Series

C95

9 9 11 11 38 41 50 52 66 76 51 54 65 67 86 96 10 10 12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9 9 11 11 38 41 50 52 66 76 18 22 30 35 40 50 31 35 45

Vacuum Pad

N 10 04 Symbol Applicable tube O.D.

Vacuum Pad

N 10 04 Symbol Applicable tube O.D.

Vacuum Pad

N 10 04 Symbol Applicable tube O.D.

Vacuum Pad

N 10 04 Symbol Applicable tube O.D.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Recommended flow rate Note) (l/min (ANR)) IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" Internal capacity (cm3) 1.7 Mass (g) ZA Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 4.3 1.7 ZR Metric size Easy installation

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

Integrated Controller

[mm] Double Clevis Size Stroke range [mm] A CL CB CD CT CU CW CX CZ L RR 16 30 to 100 128.4 119.4 20 8 5 12 18 8 16 10.5 9 25 30 to 100 166.2 156.2 10 5 14 20 18 36 14.5 10 101 to 200 191.2 181.2 32 30 to 100 185.6 175.6 10 6 14 22 18 36 18.5 10 101 to 200 215.6 205.6 Material: Cast iron (Coating) The A and CL measurements are when the unit is in the original position.

5 Port Solenoid Valve

SS0700-80A-2 SS0700-80A-4 SS0700-TR-l 10 S0700-GS-5 Applicable tube Applicable tube 2 Applicable tube 3 Applicable tube 4 Applicable tube 1/8" Applicable tube 5/32" Symbol C2 C3 C4 N1 N3 Gasket, Screw 10 Note 1) Gasket 10 Note 1) Clip Note) Above part number consists of 10 units. Each unit has one gasket and two screws. 2 Note 2) Tie-rod assembly Note 1) 1 set includes 10 pieces.

Fieldbus System

Core wire colors Brown: Not connected Note 1), 24 VDC 10% (Control power supply) Note 2) White: 24 VDC +10%/5% (Solenoid valve power supply) Blue: Not connected Note 1), 0 V (Control power supply) Note 2) Black: 0 V (Solenoid valve power supply) Gray: Not connected Brown: 24 VDC +10%/5% (Solenoid valve power supply) White: 0 V (Solenoid valve power supply) Blue: 24 VDC 10% (Control power

MQQ

to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5 M6 x 1.0 7 18 10 5 M4 x 0.7 10 to 60 44 34 8 8 36 5.5 16 47 7 10 25.5 5.4 9 M6 x 1.0 7 19.5 10 6 M5 x 0.8 10 to 60 47.5 37.5 10 10 40 5.5 20 52 8 10 28 5.4 9 M6 x 1.0 7 23 10 49.5 7 M6 x 1.0 10 to 50, 75, 100 54 42 12 12 45 8.5 25 60 4.5 10 12 34 5.5 9 M6 x 1.0 7 26 10 57 10 M8 x 1.25 10 to 50, 75, 100 60.5 48.5 13 16 52 8.5 28 69 5 14

Cylinder with Lock

2 (Different surfaces) 10 n 10 + 30 (n 2) D-A9l 2 (Same surface) 50 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) D-A9lV 2 (Same surface) 40 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.

Table of Contents

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

VCA

Thread type Rc G NPT NPTF Nil F N T Stations 02 : 10 2 stations : 10 stations D side U side 1 2 3 4 5 How to Order Valves (VCA30/40) VC A 5 1 G 3 4 03 For air Thread type Rc G NPT NPTF Nil F N T Series 3 4 Class 3 Class 4 Port size (OUT) 5 N.C. for manifold Valve type Symbol 03 04 06 Class 3 Port size 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Fluid General air Dry air Nil A Orifice size Orifice

Modular F.R.L. Unit

-20 IS1000M-30 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04

2/3 Port Valve

VX3324-03 VX3234-03 VX3334-03 VX3244-03 VX3344-03 6 0.33 0.5 4 9 0.19 2.2 3.4 3 8 0.33 3 6 (10A) Option Material 0.5 4 9 No.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FR3-10-1-, VV5FR4-10-2To order valves and blanking plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number. VV5FRA3-10-061-03 1 pc. VFRA3111 5 pcs. VVFS3000-10A 1 pc.

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-02 VXE2330-02 VXE2240-02 VXE2340-02 VXE2250-02 VXE2350-02 VXE2260-02 VXE2360-02 VXE2220-03 VXE2320-03 VXE2230-03 VXE2330-03 VXE2240-03 VXE2340-03 VXE2250-03 VXE2350-03 VXE2260-03 VXE2360-03 VXE2260-04 VXE2360-04 1/8 (6A) 300 7.9 0.33 470 620 300 470 620 470 620 560 700 560 700 470 620 470 620 470 620 560 700 560 700 560 700 3 3.0 15 0.61 4.5 1/4 (8A) 1.10 6 26 1.60 8 38 1.0 1.90 10 46 0.33

13

-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-