0.

L-type plug connector (L): VQZ3l2l-lLl1-C6, C8, C10 85.8 [88] Approx. 300 (Lead wire length) 32 [39] 93.7 Max. 10 53.8 Applicable cable O.D. 3.5 to 7 Pg7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC M-type plug connector (M): VQZ3l2l-lMl1-C6, C8, C10 61.3 53.8 (Lead wire length) 42.5 33.4 Approx. 300 43.3 [50.3] 76 [78.2] 71 94.6 Unless otherwise indicated,

5 Port Solenoid Valve Series SV

Specification SV2000 SV1000 SV4000 SV3000 Applicable series Manifold type Tie-rod base manifold 1(P: SUP)/3, 5(E: EXH) type Common SUP, EXH Valve stations (maximum) 20 stations Max. number of solenoids 32 points Port size 1(P)/3, 5(E) port C10, N11 C8, N9 C12, N11, 03 C12, N11 C4, C6, C8 N3, N7, N9 C3, C4, C6 N1, N3, N7 C8, C10, C12 N9, N11, 02, 03 C6, C8, C10 N7, N9, N11 4(A)/2(B) port Flow

Series VQ Base Mounted Metal Seal/Rubber Seal

L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

SYA3000/5000/7000

1/4 (A, B port) 15 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 2 40 (23.9) 18 30 24.5 EB P EA 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) 36 3 position closed center / exhaust center / pressure center SYA7 20-F2) C8, N9 C10, N11 3 4 5 SYA 109.7 48.1 SYJA 51.6 38.1 2 x M5 x 0.8 (Pilot port) VZA 13.6 B VFA A One-touch fitting (A, B port) Applicable

Vacuum Regulator

SET side tubing O.D. 6, 8, 10 1/4" , 5/16" , 3/8" 6, 8 1/4" , 5/16" 135 g (IRV10-C08) 125 g (IRV10A-C08) 250 g (IRV20-C10) 250 g (IRV20A-C10) Weight (Without accessories) Standard connections Single sided connections Note 1) Use caution it varies depending on the pressure in vacuum pump side.

VQ20/30

VN VQ30 LVC LVA JIS Symbol LVH (A) 2 Characteristic Specifications LVD VQ20 VQ30 Series LVQ 1 (P) C8 C6 C10 C12 N.C.

5 Port Air Operated Valve SYA3000/5000/7000 Series

(49.5) (42.5) SYA7220-02-(F2) VZA 30 24.5 1/4 (A, B port) 15 VTA 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 VGA 2 40 (23.9) VPA 18 30 24.5 EB P EA VPA3 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) 36 3 position closed center / exhaust center / pressure center SYA7 20-(F2) C8, N9 C10, N11 3 4 5 109.7 48.1 51.6 38.1 2 x M5 x 0.8 (Pilot port) 13.6

VQ7-6/7-8

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 40 Series VQ7-6/7-8 Specific Product Precautions 1 Be sure to read before handling. Refer to pages 37 through 40 for safety instructions and common precautions.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note 3) For the inch-size One-touch fittings, refer to page 4-14-40.

Secondary Batteries

, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

0.82 3.8 0.26 0.86 3.2 0.34 C10 ( ) 0.70 [0.56] 0.59 0.25 0.27 0.59 0.67 2.7 [2.0] 2.4 0.38 [0.38] 0.21 2.8 One-touch 3 position 189 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 0.61 0.25 [0.31] 0.89 [0.61] 2.3 0.38 Note) [ ]: Denotes normal position.

Base Mounted Wiring: 01CD (Base Mounted Plug-in w/Multi-connector on D Side), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8)

Base Mounted Wiring: 01CD (Base Mounted Plug-in w/Multi-connector on D Side), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8), Thread: T (NPTF)

Base Mounted Wiring: 01SU (Base Mounted Plug-in for Serial Transmission), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4)