Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 5 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Bottom, Port Size: 1/2

Base Mounted Wiring: Base Mounted Plug-in w/Terminal Blocks, Stations: 5 Stations, Passage: P and EA,EB: Common, Port A,B: Bottom, Port Size: 1/4, Thread: NPTF, Control Unit: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 5 Stations, Passage: P and EA,EB: Common, Port A,B: Bottom, Port Size: NPTF1/8, Control Unit: -

Base Mounted Wiring: Plug-in w/D-sub Connector on U Side, Stations: 5 Stations, Passage: P and EA,EB: Common, Port A,B: Bottom, Port Size: NPTF1/8, Control Unit: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 5 Stations, Passage: P and EA,EB: Common, Port A,B: Bottom, Port Size: NPTF1/4, Control Unit: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 5 Stations, Passage: P and EA,EB: Common, Port A,B: Bottom, Port Size: NPTF1/8, Control Unit: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 5 Stations, Passage: P and EA,EB: Common, Port A,B: Bottom, Port Size: NPTF1/8, Control Unit: -

Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on U Side, Stations: 5 Stations, Passage: P and EA,EB: Common, Port A,B: Bottom, Port Size: NPTF1/8, Control Unit: -

Base Mounted Wiring: Plug-in, Insert Plug w/Lead Wire, Stations: 5 Stations, Passage: P and EA,EB: Common, Port A,B: Bottom, Port Size: NPTF1/8, Control Unit: -

Piping: Base Mounted, Stations & Port Location: 5 Stations Type 40, Port Size: NPTF1/8

Base Mounted Wiring: Plug-in w/Terminal Block, Individual Junction Cover, Stations: 5 Stations, Passage: 2 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Bottom], Port Size: 1/8, Thread: NPT, Control Unit: -, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 5 Stations, Passage: P and EA,EB: Common, Port A,B: Bottom, Port Size: 1/8, Thread: -, Control Unit: -, Voltage of Air Release Valve: -, Q: -

5 Port Solenoid Valve Series SV1000/2000/3000/4000

A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M Symbol F1 H J1 J2 Q R1 R2 V ZB ZBN Protocol type SI unit part no.

EX600-WEN_WSV.eng

SWITZERLAND (41) 052 396 31 31 Dorfstrasse 7, CH-8484, Weisslingen, Switzerland Diagnostic Step 3 Connection to PLC UNITED KINGDOM (44) 0845 121 5122 Note) Refer to the operation manual of the PLC manufacturer for connection to PLC and Configurator.

EXxx-OMV0028.eng

Step 3 Connection to PLC SWITZERLAND (41) 052 396 31 31 Dorfstrasse 7, CH-8484, Weisslingen, Switzerland Note) Refer to the operation manual of the PLC manufacturer for connection to PLC and Configurator. Diagnostic UNITED KINGDOM (44) 0845 121 5122 With the above settings, it is possible to control the upper level controller.

EXW1-NT1_eng

9G, 2720-381 Alfragide Portugal ROMANIA (40) 213205111 Str Frunzei 29, Sector 2, Bucharest, Romania SLOVAKIA (421) 41 321321 1 Fantransk 1223, 01301 Teplika nad Vhom, Slovakia SLOVENIA (386) 7388 5412 Mirnska cesta 7, SLO-8210 Trebnje, Slovenia SPAIN (34) 945 184 100 Zuazobidea 14, 01015 Vitoria, Spain SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden SWITZERLAND (41) 052

PFxx-OMJ0005CN

PFM725 PFM750 PFM711 N2ArCO2 (JIS B8392-1 1.1.21.6.2ISO8573-1 1.1.21.6.2) N2Ar 0.210 L/min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052

DOC1023125

Set stroke is outside the stroke limit. (052) B Input RESET If this alarm occurs, please input the reset signal, and then instruct the operation again. Return to the origin is not completed within the set time. Return to the origin was not completed within the set time (097) C Input Check if the movement of the actuator was interrupted.

DOC1023126

Set stroke is outside the stroke limit. (052) B Input RESET If this alarm occurs, please input the reset signal, and then instruct the operation again. Return to the origin is not completed within the set time. Return to the origin was not completed within the set time (097) C Input Check if the movement of the actuator was interrupted.

High performance type Step Motor Controller (Servo/24 VDC)

(Including JOG operation after return to origin) The stroke is outside the stroke limit. (01-052) Make sure that the basic parameter, "Stroke (+)" and "Stroke (-)" are consistent with the distance of the electric actuator movement specified in the step data. limit B RESET Stroke input Caution If the operation method of step data is INC, take care with the position where operation