Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

VFS

. 3 8 10 stations 10 Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations Symbol Porting specifications (A, B) Passage Symbol R1, R2 P 1 Side 2 Bottom Common Common Caution Option When using an exhaust cleaner, mount it downwards.

MLGP

m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40

MLGP

m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40

MLGP

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm)

MLGP

20 20 20 20 20 CNG MNB CNA 1 10 30 31 100 101 1 10 30 31 100 101 200 200 300 300 CNS Stroke (mm) Stroke (mm) CLS MLGPL32 to 63 MLGPL32 to 63 20 20 CLQ 63 MLGP 50 RLQ 50, 63 50, 63 Load weight m (kg) 50, 63 MLU 10 10 50, 63 40 40 40 40 ML1C 50, 63 40 D40 -X 32 32 32 32 32 32 204 10 50 51 100 101 200 200 300 300 4 10 50 51 100 101 Data Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

PSE550/300

Applicable pressure sensor PSE531 PSE541 PSE561 PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) pressure range 5%R.D.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

L (10) 8 Dimensions (24) (35) Applicable fittings size d 4 Model A L D 10-KQ2P-04 16 32 6 6 10-KQ2P-06 18 35 8 8 10-KQ2P-08 20.5 39 10 10 10-KQ2P-10 22 43 12 12 10-KQ2P-12 24 44.5 14 10-KQ2P-01 16 31.5 5 10-KQ2P-03 16 32 6 10-KQ2P-07 18 35 8.5 10-KQ2P-09 20.5 39 10 10-KQ2P-11 22 43 11.5 5.5 Rail mounting pitch 12.5 0 1 2 3 4 5 6 7 8 9 No.

Smooth Cylinder/Low Speed Cylinder

D-M9A D-M9V Qty. of auto switches mounted D-A9 D-M9 D-P3DW Note 1) 5 10(5) 15 (10) 15 (5) 1 pc. 10 15 5 10 10 15 (10) 15 (5) 2 pcs. 10 15 5 Note 1) 25 is only applicable for D-P3DW.

5

auto switches D-M9lV D-A9lV D-M9lWV D-M9lAV D-A9l D-M9lW D-M9lA D-M9l D-P3DWA Note 1) REB With 1 pc. 5 5 10 10 (5) 15 (10) 15 (5) 15 With 2 pcs. 5 10 10 10 15 (10) 15 (5) 15 REC Note 1) 25 is only applicable for the D-P3DWAl.

Compact 5-Port Solenoid Valve

Block Connector Connecting Base For the JJ5SY1-10, JJ5SY3-10, JJ5SY5-10 No.

MY1

For details, refer to page 8-11-101.

SX

Purchasing order is available in units of 10 pieces.

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

3

Piston speed [mm/s] 3 mm 5 mm 8 mm 8 mm 10 mm 10 mm 112.5 113.5 133.5 134.5 152 155 Maintenance can be performed for all sizes.

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

XL-OMY0001

XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Rated pressure range Rated pressure range Rated pressure range Rated pressure range Rated pressure range 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 100 kPa 0 to 1 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 1 MPa 0 to 2 kPa 101 kPa to 0 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa C O N T E N T S How to Order p. 7 Internal