5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

For 30 type, common external pilot (on manifold side).)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Lead wire color 30 4A SY100 For DC: Red, Black 3. Loosen the terminal screws (slotted screws) on the terminal block, insert the cores of the lead wires into the terminals according to the connection method, and fasten them securely with the terminal screws. 30 1A SY100 For 100 VAC: Blue 30 2A SY100 For 200 VAC: Red 30 3A SY100 4. Secure the cord by fastening the ground nut.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Indicator Valve size 16 25 40 50 Without XLAV16-30-1-2 XLAV25-30-1-2 XLAV40-30-1-2 XLAV50-30-1-2 With XLAV16A-30-1-2 XLAV25A-30-1-2 XLAV40A-30-1-2 XLAV50A-30-1-2 Indicator Valve size 63 80 Without XLAV63-30-1-2 XLAV80-30-1-2 With XLAV63A-30-1-2 XLAV80A-30-1-2 Note 1) Add the seal material symbol shown on page 8 at the suffix of the model number.

Electric Actuators

(Horizontal mount/Vertical mount) Page 104 Dust seal specification (-X70) LJ1H 10/20/30 (Horizontal mount/Vertical mount) 110 LJ1S 10/20/30 (Horizontal mount) 116 TSUBAKI CABLEVEYOR specification (-X40) LJ1H 10/20/30 (Horizontal mount) 122 LJ1S 10/20/30 (Horizontal mount) 128 101 Made to Order Specifications Series LJ1H/LJ1S Clean Room Specification (-X60) Change of materials, anti-corrosive

Hydraulic

Made to Order Modification of Rod End Configuration 1 CH2 Series Mounting type Bore size Rod size series Stroke Cylinder options X A0 Indicate the rod end configuration pattern symbol A1 A2 A3 CO.5 30 30 30 30 D D D d d Width across flats F F F A4 A5 A6 30 30 30 D D D d D d 30 30 Width across flats Width across flats F Width across flats F F Note) Female thread effective depth should

Refrigerated Air Dryer

Note 3) Refer to pages 101 and 102 for further details on optional specifications.

Table of Contents

(Horizontal mount/Vertical mount) Page 104 Dust seal specification (-X70) LJ1H 10/20/30 (Horizontal mount/Vertical mount) 110 LJ1S 10/20/30 (Horizontal mount) 116 TSUBAKI CABLEVEYOR specification (-X40) LJ1H 10/20/30 (Horizontal mount) 122 LJ1S 10/20/30 (Horizontal mount) 128 101 102 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

15

Model LEY25 (Top/Parallel) LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250 300, 350, 400 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 LEF Note 2) Horizontal 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Work load [kg] LEJ Force [N] Note 3) (Set value: Rated torque

LJ1H

(Horizontal mount/Vertical mount) Page 104 Dust seal specification (-X70) LJ1H 10/20/30 (Horizontal mount/Vertical mount) 110 LJ1S 10/20/30 (Horizontal mount) 116 TSUBAKI CABLEVEYOR specification (-X40) LJ1H 10/20/30 (Horizontal mount) 122 LJ1S 10/20/30 (Horizontal mount) 128 101 102 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office:

CQS

Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125S 10S CQSB165S 10S CQSB205S 10S CQSB25-5S 10S 6.5 6.5 6.5 8.5 Single acting/Spring extend Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125T 10T CQSB165T 10T CQSB205T 10T CQSB255T 10T 6.5 6.5 6.5 8.5 Note) The

CQS

Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l

CL

to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 59 44 52 64 78 92 115 128 144 69 16 20 20 25 30 36 36 40 30 35 35 40 40 50 50 56 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160 180 9.0 9.0 11.5 13.5 13.5 19 19 19 12 12 15 18

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

SX

or less 2 position double 50 or less 56 or less 3 position 31 or less 1-6-29 Base Mounted 30 Series SX3000/5000/7000 Flow Characteristics/Weight Model/Series SX3000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics (1) Port size Weight (g) (2) Valve model Type of actuation Grommet L plug connector M plug connector 100 (66) 101 (67) 108 (74) 110 (75) C [dm3/(sbar)] b Cv C [dm3/(sbar

CL

to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 59 44 52 64 78 92 115 128 144 69 16 20 20 25 30 36 36 40 30 35 35 40 40 50 50 56 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160 180 9.0 9.0 11.5 13.5 13.5 19 19 19 12 12 15 18

Stainless Steel 316 Fittings

Width across flat Effective area (mm2) Weight (g) d M L Model 2 x Applicable tube H1 H2 I.D. 2.5 3 4 6 7.5 8 9 10 13 H1 H2 H2 4 4 6 8 10 10 12 12 16 KFG2H0425-00 KFG2H0403-00 KFG2H0604-00 KFG2H0806-00 KFG2H1075-00 KFG2H1008-00 KFG2H1209-00 KFG2H1210-00 KFG2H1613-00 7 11 25 43 42 44 42 71 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 1.6 2.6 6 17 30 35 45 57 101 5 21.8 8 8 d 5.8 6.6 24.8 28.6 10 14 10 14

SY

Connector assembly part numbers 30 4A SY100 For DC: DIN terminal 30 1A SY100 For 100VAC: With surge voltage suppressor (DS) 30 2A SY100 For 200VAC: No.1 () (+) 30 3A SY100 For other AC: ZNR Coil 30 A SY100 Without lead wires: No.2 (+) () (Connector, socket x 2pcs. only) With indicator light/ surge voltage suppressor (DZ) Lead wire length 300mm Nil No.1 () (+) 6 600mm 1000mm 10 15 20 25 30

Rotary Clamp Cylinders

Front matter 1 Model Selection Moment of Intertia 12, 16 20, 25 103 101 102 MK MK2T Allowable moment of intertia [kgm2] Allowable moment of intertia [kgm2] 104 MK2 103 MK 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 MK2T MK2T MK2 Allowable